10

13 47 6 M6 x 1 6 10 16 4 M10 x 1.25 27 1/8 84 17 48 49 4 6.5 178 40 30 27 52 22 38 16 35 13 14 51 8 M6 x 1 6 14 16 4 M14 x 1.5 27 1/4 84 22 55 58 4 9 186 50 35 32 65 27 46.5 20 40 14 15.5 58 11 M8 x 1.25 7 18 16 5 M18 x 1.5 31.5 1/4 94 22 68 71 5 10.5 210 63 35 32 75 27 56.5 20 45 14 16.5 58 11 M8 x 1.25 7 18 16 5 M18 x 1.5 31.5 3/8 94 28 81 81 9 12 210 80 40 37 95 32 72 25 45 20 19 72 13

Rotary Actuator/Vane Type

[mm] [mm] Size CRB2 CRBU2 X Y X Y 10 3 to 14 1 to 8 1 to 14 1 to 8 15 4 to 18 1.5 to 9 1.5 to 18 1.5 to 9 20 4.5 to 20 1.5 to 10 1.5 to 20 1.5 to 10 30 5 to 22 2 to 13 2 to 22 2 to 13 40 18 to 30 4.5 to 15 18 to 30 4.5 to 15 Size CRB2 CRBU2 X Y X Y 10 3 to 10 (19) 1 to 12 (3) 1 to 3 (12) 1 to 19 (10) 15 4 to 11.5 1.5 to 15.5 1.5 to 6.5 1.5 to 20.5 20 4.5 to 13 1.5 to 17 1.5 to 7.5 1.5 to

Modular F.R.L. Units

13 13 13 13 13 1 Drain guide is NPT1/8 (applicable to the AF20-A) and NPT1/4 (applicable to the AF30-A to AF60-A).

0.4

or less VQ1200 13 or less 10 or less 0.70 0.15 0.16 0.72 0.25 0.18 Metal seal 13 or less Double VQ1201 20 or less 15 or less 0.85 0.20 0.21 1.0 0.30 0.25 Rubber seal 20 or less VQ1300 40 or less 20 or less 0.68 0.15 0.16 0.72 0.25 0.18 Metal seal 26 or less Closed center VQ1301 47 or less 25 or less 0.70 0.20 0.16 0.65 0.42 0.18 Rubber seal 33 or less VQ1000 VQ1400 40 or less 20 or less

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Insulation color Dot mark Dot color 12 Light brown Red 13 Yellow Black 14 Yellow Red 15 Light green Black 16 Light green Red 17 Gray Black 18 Gray Red 19 White Black 20 White Red Pulse input usable only with differential. Only 1.5 m cables usable with open collector. (12) L 20 19 Round terminal 0.5-5 Green (22) (25) (40) (10) Weight 2 1 (45) Product no.

HRX-OM-W002

. 9-11 9.4.1 HRR012-A/W-10/20. 9-11 HRR Series HRX-OM-W002 Contents 9.4.2 HRR018-A/W-10/20. 9-11 9.4.3 HRR024-A/W-20. 9-12 9.4.4 HRR030-A/W-20. 9-12 9.5 Heating capacity . 9-13 9.5.1 HRR012-A/W-10-,HRR018-A/W-10-. 9-13 9.5.2 HRR012-A/W-20,HRR018-A/W-20 . 9-13 9.5.3 HRR024-A/W-20,HRR030-A/W-20 . 9-13 9.6 Pump capacity. 9-14 9.6.1 HRR012/018/024/030-A/W. 9-14 9.6.2 HRR012/018-A/W-10-T/MT .

Sine Cylinder Series REC

18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 20, 25, 32 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 S ZZ Z MM N NA NN P H1 H2 I K KA Bore (mm) 20 M20 x 1.5 1/8 146 200 191 M8 x 1.25 20 30 5 8 33.5 5 6 25 M26 x 1.5 1/8 146 204 195 M10 x 1.25 20 34.5 6 8 37.5 5.5 8 32 M26 x 1.5 1/8 159

Sine Cylinder Series REC

18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 20, 25, 32 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 S ZZ Z MM N NA NN P H1 H2 I K KA Bore (mm) 20 M20 x 1.5 1/8 146 200 191 M8 x 1.25 20 30 5 8 33.5 5 6 25 M26 x 1.5 1/8 146 204 195 M10 x 1.25 20 34.5 6 8 37.5 5.5 8 32 M26 x 1.5 1/8 159

Series VQ Base Mounted Metal Seal/Rubber Seal

64 Single Rubber seal VQ1 5.4 (0.3) 15 or less 20 or less Metal seal VQ1210 3.6 (0.2) 10 or less 13 or less Double Rubber seal VQ1211 5.4 (0.3) 15 or less 20 or less Metal seal VQ1310 3.6 (0.2) 20 or less 26 or less Closed center VQ1000 Rubber seal VQ1311 5.4 (0.3) 25 or less 33 or less 78 Metal seal VQ1410 3.6 (0.2) 20 or less 26 or less Exhaust center Rubber seal VQ1411 5.4 (0.3) 25 or

MXS

Z K 23.5 33.5 43.5 53.5 63.5 88.5 J 19.5 29 39 56 60 96 I 13 8.5 9.5 10.5 24.5 38.5 NN 2 2 3 3 4 5 H 28 30 20 28 23 28 G 9 12 13 15 20 27 N 4 4 4 4 6 6 HA 20 30 20 28 46 56 KA ZZ 56 61 72 90 108 158 GA 17 12 33 43 43 83 NA 2 2 2 2 4 4 M 49 54 65 83 101 151 MXS8L-10 MXS8L-20 MXS8L-30 MXS8L-40 MXS8L-50 MXS8L-75 48.5 53.5 64.5 82.5 100.5 150.5 82.5 132.5 3.11-30 Air Slide Table Series MXS MXS

MGP

Nickel plated Nickel plated 16 20 to 100 13 Kits include items 23, 24, 25 26, 27, 28 from the table above.

LX

Front mount type l l l Model Bolt Max. tightening torque Nm Max. screw-in depth (l mm) Model Bolt Max. tightening torque Nm Body thickness (l mm) LXS M6 x 1 7.4 13 LXS M6 x 1 7.4 20 Use bolts at least 0.5mm shorter than the maximum screw-in depth, so they do not touch the body. Caution 2. Through holes 2.

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 8mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 40mm, Adjuster: CS (Metal Stopper, Extension End)

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 8mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 40mm, Adjuster: A (Rubber Stopper, Both Ends)

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 8mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 10mm, Adjuster: AT (Rubber Stopper, Retraction End)

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 8mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 50mm, Adjuster: A (Rubber Stopper, Both Ends)

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 8mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 10mm, Adjuster: A (Rubber Stopper, Both Ends)

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 8mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 20mm, Adjuster: A (Rubber Stopper, Both Ends)

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 8mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 30mm, Adjuster: A (Rubber Stopper, Both Ends)

Specification: 13 (Clean Series, Vacuum Suction Type, Special Treatment on Guide), Bore: 8mm, Thread: M Thread: ø6 to ø16 Bore; Rc: ø20, ø25 Bore, Symmetric Type: Standard Type, Stroke: 50mm, Adjuster: AT (Rubber Stopper, Retraction End)