5

119 12 12 1/8 12.5 12.5 M5 x 0.8 32 79 11 11 121 12 12 1/8 10.5 10.5 1/8 40 87 12 12 139 13 13 1/8 13 10 1/8 Up to 1500 50 102 13 13 162 14 14 1/4 14 14 1/4 63 102 13 13 162 14 14 1/4 14 14 1/4 80 122 196 20 20 3/8 17.5 17.5 3/8 100 122 196 20 20 1/2 17.5 17.5 1/2 Female Rod End (mm) Bore size A1 H MM ZZ 20 8 13 M4 x 0.7 92 25 8 14 M5 x 0.8 93 32 12 14 M6 x 1 95 40 13 15 M8 x 1.25 104

Air Cylinder

PD Mounting 20 12 12 13 24.2 6 25 12 10 (12) 13 26.7 6 32 12 10 (12) 13 30.2 6 40 12 10 (12) 16 34.6 8 50 13 13 20 40.6 10 63 13 13 20 47.1 10 HH Applicable Tubing O.D./I.D. Note) ( ): Long stroke Bore size (mm) 20 25 32 40 50 63 Applicable tubing O.D. (mm) 6/4 6/4 6/4 8/6 10/7.5 10/7.5 Applicable tubing material Can be used for either nylon, soft nylon or polyurethane tubing.

SMC

-/22-MXS25L-10 13-/22-MXS25L-20 13-/22-MXS25L-30 13-/22-MXS25L-40 13-/22-MXS25L-50 13-/22-MXS25L-75 13-/22-MXS25L-100 13-/22-MXS25L-125 13-/22-MXS25L-150 151 MXS Air slide table 1322Specific Product Precautions Made to Order -X52 Use of fluoro rubber for dust cover and dust plug Be sure to read before handling. 13-MXS Refer to standard products How to Order -X52 Precautions Material used

Made to Order

CG1(K)R series Width across flats B2 Width across flats MA MI MM2 H2 MK Stroke MT ML + Adjustment MH + Stroke + Adjustment S + Stroke ZZ + 2 x Stroke + Adjustment (A: 25 mm, B: 50 mm) CG1(K)R Series (mm) B2 10 13 13 17 19 19 H2 3.6 5 5 6 8 8 MA 12 17 17 19 24 24 MH 38 41 41 47 60 60 MI 14 20 20 25 32 32 MK 7 9 9 10 13 13 ML 18 18 18 24 32 32 MM2 M6 x 1 M8 x 1.25 M8 x 1.25 M10 x 1.25 M14 x

Compact 5-Port Solenoid Valve

14 15 16 L1 159.8 166.3 172.8 179.3 185.8 192.3 198.8 205.3 211.8 218.3 224.8 231.3 237.8 244.3 250.8 L2 56.4 62.9 69.4 75.9 82.4 88.9 95.4 101.9 108.4 114.9 121.4 127.9 134.4 140.9 147.4 L3 185.5 198 198 210.5 210.5 223 223 235.5 235.5 248 248 260.5 273 273 285.5 L4 175 187.5 187.5 200 200 212.5 212.5 225 225 237.5 237.5 250 262.5 262.5 275 L5 13 16 13 16 13 16 12 15 12 15 12 15 18 15 18

Vacuum Pad

ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3(10/13/16) UM: ZP3(10/13/16) B: ZP3-T (10/13/16) UM:-A5 ZP3-T (10/13/16) B:-A5 ZP3-T (10/13/16) UM:-B5 ZP3-T (10/13/16) B:-B5 ZP3-T (10/13/16) UM:-A12-@ ZP3-T (10/13/16) B:-A12-@ ZP3-T (10/13/16) UM:-A12-04 ZP3-T (10/13/16) B:-A12-04 ZP3-T (10/13/16

LEC-OM02704CN

UL/C-ULK5 13 19 13 13.6 (1) (a) () SD 1(4.12) (b) ( ) (c) () 13 20 13 M 1. 2. 3. () 4. 5. 1. 2. 3. () 4. 1. ()(FR-BIF()) 2.

ZX

Refer to pages 13-2-4 to 13-2-5 for ejector system unit. Refer to pages 13-2-32 for ejector system manifold. Refer to pages 13-2-40 to 13-2-41 for external vacuum supply system unit. Single unit Single unit 13-2-68 to 13-2-72 Manifold Manifold Refer to page 13-2-54 for external vacuum supply system manifold.

CQ2

16 16 18.5 13.5 11.5 14 D-F9W D-F9WV D-F9BAL D-A7 D-A80 D-A9 D-A9V D-F9 D-F9V D-A79W Bore (mm) A 9.5 12.5 15.5 15.5 18 13 11 13.5 A 7 10 13 13 15.5 10.5 8.5 11 B 5.5 5 6.5 7 6 8.5 11.5 14.5 B 6 5.5 7 7.5 6.5 9 12 15 B 3 2.5 4 4.5 3.5 6 9 12 B 10 9.5 11 11.5 10.5 13 16 19 A 17 12 10 12.5 B 5 7.5 10.5 13.5 A 21 16 14 16.5 B 9 11.5 14.5 17.5 A 20 15 13 15.5 B 8 10.5 13.5 16.5 12 16 20 25 32

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

-/22-MXS25L-10 13-/22-MXS25L-20 13-/22-MXS25L-30 13-/22-MXS25L-40 13-/22-MXS25L-50 13-/22-MXS25L-75 13-/22-MXS25L-100 13-/22-MXS25L-125 13-/22-MXS25L-150 797 MXS 1322Air Slide Table Specific Product Precautions Made to Order Dust cover and dust plug made by fluororubber -X52 Be sure to read this before handling.

SQ1000/2000

(A)(B) (A)(B) 4 2 4 2 When ordering with manifolds 5 13 5 13 For adding stations (R1) (P)(R2) (R1) (P)(R2) When only valves are required.

ZR

(Refer to page 13-3-37.)

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

For Safety Instructions and Actuator Precautions, refer to pages 7-13-3 to 7-13-6.

CV/MVGQ

RB J Stroke range QY H H1 H2 HX I K MM N NA NN S ZZ F Q Eh8 B1 B2 D AL A Bore size (mm) 20 25 32 40 Up to 300 19.8 14 41 5 8 65.3 28 5 M8 x 1.25 15 24 M20 x 1.5 62 116 13 8 15.5 13 26 18 20 0 0.033 DUp to 300 45 120 13 22 14 6 8 70.5 33.5 5.5 M10 x 1.25 15 30 M26 x 1.5 62 19.5 17 32 10 22 26 0 0.033 Up to 300 13 25.8 16 45 6 8 76.5 37.5 5.5 M10 x 1.25 15 34.5 M26 x 1.5 64 122 19.5 17 32 12

CV/MVGQ

RB J Stroke range Q H1 NN F H MM ZZ H2 HX QY I K N NA S AL A B2 D Eh8 B1 Bore size (mm) 20 25 32 40 Up to 300 13 41 116 14 5 62 19.8 5 8 65.3 28 M8 x 1.25 15 24 M20 x 1.5 18 8 15.5 13 26 20 0 0.033 DUp to 300 13 45 120 14 5.5 62 22 6 8 70.5 33.5 M10 x 1.25 15 30 M26 x 1.5 22 10 19.5 17 32 26 0 0.033 Up to 300 13 45 122 16 5.5 64 25.8 6 8 76.5 37.5 M10 x 1.25 15 34.5 M26 x 1.5 22 12 19.5 17

CM2

Please delete the unnecessary part. 1.4-12 Series CM2 Rear Flange (G) CM2G Bore size Stroke (mm) Bore Stroke range A B2 C2 D H2 I AL E F B FD B1 FT FX FY FZ G H H1 0 0.033 0 0.033 0 0.033 0 0.039 1 to 300 13 26 30 5 8 18 8 28 15.5 13 34 7 4 60 20 75 8 41 20 1 to 300 17 32 37 6 8 22 10 33.5 19.5 13 40 7 4 60 25 75 8 45 26 1 to 300 17 32 37 6 8 22 12 37.5 19.5 13 40 7 4 60 32 75 8 45 26

Table of Contents

unit (digit) T 16-13-4 Temperature characteristics The amount of leakage TSJ 16-13-5 E N Ejector 16-13-3 U Noise resistance Non reversed output mode Normal mode NPN output 16-13-4 F Unit conversion URJ 16-13-5 F.S.

Table of Contents

Refer to page 3-13-4.)

SMC Pneumatic Clean Series

x 1.25 M8 x 1.25 15 11.5 10.5 8.5 40 32 25 20 11 8 8 8 36 31 31 31 16 13 13 13 37 42.5 34.5 30 24 47.3 37 37 30 108 82 80 80 7 5.5 5.5 5 22 17 17 13 41 32 32 26 6 6 5 8 8 8 50 45 45 41 24 22 22 18 31 26 26 26 75 75 75 66 60 60 60 M26 x 1.5 M26 x 1.5 M20 x 1.5 174 140 138 134 17.5 17.5 19.5 15.5 35.5 26-0.033 0 7 7 7 5 4 4 1/4 1/8 1/8 14 12 10 16 13 13 45 41 41 35.5 26-0.033 0 17.5 19.5 35.5

SX

17.5 15.5 14 13 12 16.5 15 12 13 14 15 16 stations Stations n 11 stations 335.5 DIN rail 348 360.5 373 398 410.5 L1 L2 L3 L4 350 362.5 387.5 400 325 337.5 294 310 326 342 262 278 Manual override (Press and turn for the locking type.)