Series 10-SYJ3000/5000/7000 Rubber Seal 4/5 Port Solenoid Valve

manifold base Type 10-SS5YJ7-20 Type 10-SS5YJ7-21 Type 10-SS5YJ7-40 Type 10-SS5YJ7-41 Type 10-SS5YJ7-42 Type 10-SS5YJ7-41SA Applicable manifold base Type 10-SS5YJ7-40-Q Type 10-SS5YJ7-41-Q Type 10-SS5YJ7-42-Q Type 10-SS5YJ7-41SA-Q Gasket SYJ7000-21-1A-2-Q SYJ7000-21-3A Round head combination screw Blanking plate SYJ7000-21-3A-Q Gasket (Positioning pin) Dust cap Applicable manifold

4/5 Port Air Operated Valve Series SYJA3000

15 15 R2 R2 Individual EXH spacer SJ7000-17-1 Individual EXH spacer SJ7000-17-2 Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 R R1 R R1 Manifold gasket DXT199-21-10 Manifold gasket DXT199-21-11 L Blanking Plate Assembly SYJ7000-21-1A Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Applicable manifold base

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

9 D20 to 63 80, 100 -X @7 y w 20Data 40 to 100 80, 100 With rod end locking (Base cylinder only) Since the guide unit figure is the same as the standard type, refer to pages 8-21-19 to 8-21-21. Component Parts Zinc chromated For lock type Material Note Material No. Description No.

Table of Contents

analog Nil 21 22 23 24 P kPa Applicable to plug connector.

ZP

Dimensions: Without Buffer ZP2-R W-A5 04 06 ZP2-R 20 W-A5 04 06 ZP2-R 30 W-A5 04 06 Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 8 (Hexagon) Width across flat 10 (Hexagon) Q Q Q Width across flat 10 (Hexagon) Width across flat 10 (Hexagon) 4 4 4 4 4 4 21 21 21 M5 x 0.8 M5 x 0.8 M5 x 0.8 P P P (60) (60) (60) S S 31 8 31 S 31 14.9 A 14.9 14.9 R R R 6 6 6 M5

SMC Pneumatic Clean Series

Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 Relief type Vacuum suction type 1/8 25, 50, 75, 100, 125, 1/4 Non-lube Double acting, 150, 175, 200, 250, 300 single rod 1/8 1/4 Suction flow rate of vacuum suction type (Reference values) Specifications Bore size (mm) Item 20/25/32/40 1.5MPa 1.0MPa 0.05MPa

Air Cylinder

13 21 130 133 141 8 40 93 96 101 16 24 24 21 16 21 159 162 167 11 Axial foot: CBM2L Bore size Stroke A * -H -R -W N L ZZ + Stroke LS + Stroke N L CBM2G Bore size Stroke A Head flange: * -H -R -W Rod flange: CBM2F Bore size Stroke A * -H -R -W N L Z + Stroke Single clevis: CBM2C Bore size Stroke A -H -R -W N L Double clevis: CBM2D Bore size Stroke A -H -R -W N L ZZ + Stroke Z + Stroke

Table of Contents

Refer to pages 14-21-3 to 14-21-4 for Safety Instructions and Common Precautions. 21 (Width across flats) Selection Lock nut F.R.L. Warning M12 x 1 1. This product cannot be used as a check regulator by installing it between solenoid valve and actuator. Doing so could lead to equipment damage. 2.

SQ1000/2000

A 8 5 () Station 7 21 SOL. B 9 18 () 22 10 SOL. A 23 6 () 11 Station 8 SOL.

Tamper Proof and Flat Head Screw

-11SD 12.8 17 17.9 31.8 43.3 21 3/8" 27.8 39.3 6 AS321F-03-08SD AS321F-N03-07SD 15.2 18.5 29.5 41 1/4" 13.2 27.8 39.3 17 8 R 3/8 19 23 9.8 53.7 1.2 47.7 20.9 AS321F-03-10SD AS321F-N03-09SD 18.5 21 31.8 43.3 NPT3/8 19 23 9.8 20.9 53.7 1.2 47.7 5/16" 15.2 29.5 41 18.5 10 AS321F-03-12SD AS321F-N03-11SD 20.9 22 32.8 44.3 17.9 31.8 43.3 21 3/8" 12 AS421F-04-10SD AS421F-N04-11SD 18.5 21 33.6 47.9

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

VN LVC LVA E 21 S LQ2 LVH LVD One nut (including insert bushing) of the nuts is not attached. Please refer to below piping example.

High Purity Fluoropolymer

Model E M H W L 1/8 LQ1U11 LQ1U12 LQ1U21 LQ1U22 LQ1U31 LQ1U32 LQ1U33 LQ1U41 LQ1U42 LQ1U51 LQ1U52 LQ1U61 LQ1U62 4 3 6 4 10 8 6 12 10 19 12 25 19 10 11.5 29 10 Class 1 14 41 14 15 16.5 H W M 17 17 20 54 23 1/4 28 21 21 24 63 (E) (E) Class 2 to 5 77 26 26 29 39 L 102 39.5 36 49 36 M Inch sizes H Applicable tubing O.D.

5

Applicable bore size (mm) A A1 E1 L1 MM RR1 U1 NDH10 NX I-G04 32, 40 42 14 22 30 M14 x 1.5 12 14 10 +0.058 0 18 0.3 0.5 I-G05 50, 63 56 18 28 40 M18 x 1.5 16 20 14 +0.070 0 22 0.3 0.5 I-G08 80 71 21 38 50 M22 x 1.5 21 27 18 +0.070 0 28 0.3 0.5 I-G10 100 79 21 44 55 M26 x 1.5 24 31 22 +0.084 0 32 0.3 0.5 * A knuckle pin and retaining rings are included.

Series SV

SX5000-57-6 SX3000-146-2 SX5000-138-1 SV2000-55-1SV2000-55-2A SV2000-21-1 (M3 x 30) VZ1000-11-1SV1000-69A SX7000-57-5 SX3000-146-2 SV3000-65-1 SV3000-55-1SV3000-55-2A SV3000-21-1 (M4 x 35) VZ1000-11-4SV3000-69A SX3000-57-4 SX3000-146-2 SX3000-181-1 SV1000-55-1SV1000-55-2-1 SX3000-22-2 (M2 x 24) VZ1000-11-1SV1000-69A SY9000-11-2 SX3000-146-2 SV4000-65-1 SV4000-55-1SV4000-55-2A SV2000-21-2

Table of Contents

20 16 (15) 19 (16) 22 (18) 3.6 4.0 5.2 3.6 4.0 5.2 4.0 4.7 5.3 3.9 4.5 5.1 0.22 0.15 0.13 0.22 0.15 0.13 0.28 0.27 0.19 0.28 0.24 0.15 15 17 21 15 17 21 16 18 22 16 18 21 2.5 Single VP4150 2 position 3 position 3.3 3.0 VP4250 Double 3.8 3.6 Closed center VP4350 4.4 3.6 VP4450 Exhaust center 4.4 ( ): Denotes the normal position.

Series 10-, 21- AW-B Filter Regulator

-06-B 10-/21-AW60K-B 142.1 174.1 176.1 261.1 93.9 122.1 154.1 156.1 241.1 91.4 Dimensions B B B B Optional specifications Standard specifications Model Round type pressure gauge Bracket mounting size Panel mount Q R S T U V W Y Z F J K BB CC H J M N 10-/21-AW20K-B 10-/21-AW30K-B 10-/21-AW40K-B 10-/21-AW40K-06-B 10-/21-AW60K-B P1 P2 A B C Note) D E 6 7 7 7 14 19 21 21 28.5 38.5 42.5 42.5

Series CXS 10-/11-/12- Dual rod cylinder 21-/22- ø6, ø10, ø15, ø20, ø25, ø32

CXSJ10-10 21-/2211-/12CXSJ10-20 21-/2211-/12CXSJ10-30 21-/2211-/12CXSJ10-40 21-/2211-/12CXSJ10-50 21-/2211-/1279

Micro Mechanical Valve Series VM1000

) NC 18 36 4.5 13.5 18 VM4 SMC NO 22.5 OUT 13.5 25 3 x 1/8 21 35 T.T. 20 N F.O.F. 4 x 4.5 mounting hole 90 2312 3 Port Mechanical Valve Series VM400 Series VM400 Key selector (2 position) VM430-01-36 Panel mounting hole ON T.T. 40 OFF 39 Max. 6 38 21 30.5 Symbol 1.5 1.5 (OUT) 2 (126.6) 53 22.1 3 10 12 (105.6) 3 (N.C.) 1 (N.O.) (75.1) NC 36 4.5 13.5 18 13.5 18 VM4 SMC NO 22.5 OUT 35 25 21

Rubber seal 5 Port Solenoid Valve Series SYJ7000

15 15 R2 R2 Individual EXH spacer SJ7000-17-1 Individual EXH spacer SJ7000-17-2 Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Applicable manifold base Type SS5YJ7-40 Type SS5YJ7-41 Type SS5YJ7-42 R R1 R R1 Manifold Gasket DXT199-21-10 Manifold Gasket DXT199-21-11 L Blanking Plate Assembly SYJ7000-21-1A Applicable manifold base Type SS5YJ7-20 Type SS5YJ7-21 Applicable manifold base

Tamper Proof Speed Controller with One-touch Fitting Elbow Type/Universal Type Series AS  1F-T

-07ST 17 1/4" 13.2 27.8 39.3 29.5 41 8 18.5 15.2 79 R3/8 19 23 9.5 1.5 47.4 19.8 52.6 79 19.8 52.6 AS321F-03-10ST AS321F-N03-09ST 18.5 1.5 47.4 5/16" 15.2 29.5 41 NPT3/8 19 23 9.5 31.8 43.3 10 21 18.5 81 81 AS321F-03-12ST AS321F-N03-11ST 21 3/8" 17.9 31.8 43.3 32.8 44.3 12 22 20.9 83 141 AS421F-04-10ST AS421F-N04-11ST 21 3/8" 17.9 33.6 47.9 33.6 47.9 10 21 18.5 141 24 28.6 12 1.5 55.8 1/2