CP95

10 46.5 63 5 6.5 45 15 9 18 21 51 4.3 4 32 16 25 75 12 56.5 80 5 10 45 18 11 22 25 65 4.3 4 36 20 30 95 16 72 100 5 10 55 18 11 22 41 20 32 115 25 75 6.3 16 89 4 Mounting style (ES) Bore size (mm) d3 CN S5 K1 K2 I2 G1 G2 G3 EN EU CH H6 ER 32 11 10 38 51 21 18 31 14 32 10 15 10.5 8.5 6.6 40 11 12 41 54 24 22 35 16 36 10 18 12 8.5 6.6 50 15 16 50 65 33 30 45 21 45 12 20 15 10.5 9 63 15 16 52

Stability of suction position,

Pad form Bellows type with groove ZP3E-YF100BMJB ZP3E-YF80BMJB Width across flats 17 Width across flats 17 Bushing Bushing 8 8 50 43 52 A B 50 8 8 Bushing Bushing Width across flats 30 M22 x 1.5 Width across flats 30 D-D D-D M22 x 1.5 Rc1/8 52.5 61.5 A B Rc1/8 22 D D 26 22 32 D D 26 78.6 32 11 61 11 84.5 53.61) 22 75 44.11) 18 4 4 30 (Rotating angle) 30 (Rotating angle) 85 80 57 106 100

51

(24) B A 24.5 (22) B ( ): Dimension of the D-M9A.

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

resin Wear ring B !

VQ7-6/7-8

R1 R2 P Manual override A B PB 12 (16) (11) 10 (22) 16 16 (23) 75 (86) 62 (72) 75 (86) 62 (72) 50 A Prewired connector (M12) (L approx. 500) 2-7.5 Mounting hole PA R2 R1 P A B 2-Rc1/8 49 (64) 49 (64) (20) 18 18 (20) 44 (58) 44 (58) Indicator light 5-Rc3/8, 1/2, 3/4 (P, A, B, R1, R2) Rc1/8 Port Y (PE) SMC 108.5 (121.5) 23 (30) (ports A, B) 12 Y 50 (63) 3 5 38 (53) 38 (53) 32 (42) 1 23 (30

Air Fittings & Tubing

1 4 3 8 62 63.5 57.5 59.5 KQ2W12-02S KQ2W12-03S 17 12 22 47.7 37.7 20.9 17 28.5 1 2 KQ2W12-04S 66 68.5 22 147 101 105 3 8 1 2 71 (71) 76 80 KQ2W16-03S KQ2W16-04S 26.5 22 69.5 75 20.9 34 25 100 (84) 16 Reference dimensions after R(PT) thread installation.

Industrial Filters

Symbol Element length Number of arranged elements 4 7 9 18 22 29 34 37 53 83 04 07 09 18 22 29 34 37 53 83 Element length FQ1 A B C D L250 L500 (L250 x 2) L750 (L250 x 3) L1000 (L250 x 4) Symbol Nominal filtration accuracy (m) Note) FN Nominal filtration accuracy (m) 0.5 1 2 5 10 20 40 50 70 74 75 100 105 120 EB ES X50 001 002 005 010 020 040 050 070 074 075 100 105 120 Symbol Port size Port

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

Mechanical Valves Series NVM, NVFM, NVZNI

T 4.41 lbs. (2 Ko) P T 0.06 in. (1.5 mm) o.T o.oE in (2.o mm) T.T. 0.14 in. (3.5 mm) '75 PSIG (5 Kgf/cm2) A B D E F a H b u 5 (153.7) 4.87 (123 7l 1.57 (40) 1 . 1 8 {30t ).87 t22l u.4i, ( 1 1 ) J.75 (i 9) ).12 (3) ).43 :1 1) Millimeters in Parenlheses r.u.F, 4.41 rbs {2 Ko} t ' l 0.06 in. (1 5 mm) O T 0 08 in. (2 0 mm) 0.14 4n. (3.5 mm) .75 PSIG (5 Kgl/cm2) A B C D E F G H o , t ( (1s6 7)

CNS

B 1181 Class 2 M14 x 1.5 22 DJIS B 4636 + 2 point angle socket 24 24 JIS B 1181 Class 2 M16 x 1.5 160 -X 20Adjustment 1) [Horizontal] Caution Forward Data W SOL.A SOL.B SOL.C Action 1.

Compact Cylinder with Air Cushion Series RQ

32 L CU CW RR 18 36 7 28.5 M6 x 1.0 10 20 CX +0.4 +0.2 0.1 0.3 CZ B + Stroke CL + Stroke A + Stroke 40 18 36 7 28.5 M6 x 1.0 10 22 50 22 44 8 33.5 M8 x 1.25 14 28 Refer to page 9 for details on rod end nut and accessories.

VQ7-6/7-8

override A B PB 16 (23) (22)16 (11)10 12 (16) 62(72) 75(86) 62(72) 75(86) 50 PA R1 R2 P (P , A, B, R1, R2) 5-3/8, 1/2, 3/4 2-1/8 Indicator light B A Mounting hole 2-7.5 49(64) 49(64) 18 (20) (20)18 44(58) 44(58) G1/2 (Cable 8 to 10) Bottom ported drawing Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (

Profile Design ISO/VDMA Air Cylinder Series CP95

D C d H B 32 40 50, 63 80 100 16.5 21 26 31 39 19.6 25.4 31.2 37.0 47.3 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 6 8 11 13 16 17 22 27 32 41 NT-03 NT-04 NT-05 NT-08 NT-10 Piston rod ball joint KJ (DIN 648) Zinc chromate plated steel Bore d3 Order No. d1 h d6 b3 b1 l d7 l3 sw 32 M10x1.25 KJ10D 10 43 28 10.5 14 20 19 13 14 17 40 M12x1.25 KJ12D 12 50 32 12 16 22 22 13 16 19 50/63

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

VQZ242 Rubber seal 10.8(0.6) 15 or less 20 or less VQZ312 Metal seal 14.4(0.8) 17 or less 22 or less N.C. VQZ332 Rubber seal 16.2(0.9) 25 or less 33 or less 92 VQZ300 VQZ322 Metal seal 13.5(0.75) 17 or less 22 or less N.O. VQZ342 Rubber seal 16.2(0.9) 25 or less 33 or less Note 1) Value for sub-plate with maximum port size.

Integrated Controller

B-B B Component Parts Component Parts (Right/Left side parallel only) No.

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

MRQ DBasic type 11-MSQBA 11-MSQBR M5 x 0.8 depth 5 (Vacuum port) 20DC DB DA (mm) DA(h9) DB(h9) DC(H9) DD(h9) HB HC HD Size 10 20 30 50 46 45 20 35 20 5 59 HB 61 60 28 40 22 6 65 (HD) 11.5 67 65 32 48 22 6 68 5.5 HC 77 75 35 54 24 7 77 Dimensions other than above are identical to the basic type.

Air Cylinder

400 35 32 65 27 50 18 38 10 9 55 11 M6 x 1 7 16 11 M18 x 1.5 18 1/8 63 129 63 Up to 400 35 32 70 27 55 18 38 6 11 51 11 M6 x 1 7 16 11 M18 x 1.5 22 1/4 73 135 67 Up to 400 35 32 75 27 58 18 38 6 11 51 11 M8 x 1.25 7 16 11 M18 x 1.5 22 1/4 73 135 80 Up to 500 40 37 88 32 69 22 45 12 13 62 13 M8 x 1.25 7 19 13 M22 x 1.5 26 1/4 83 158 85 Up to 500 40 37 95 32 74 22 45 12 13 62 13 M10 x 1.25

Vacuum Ejector Box Type (Built-in Silencer)/Body Ported Type Series ZH 1

Vacuum pressure Suction flow rate 13-5-5 6 Series ZH Box Type (Built-in silencer): ZHB -S L One-touch connection Applicable tubing diameter B Model A 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 60 6 22 16 12.8 28 5 47 63 6 23 18 12.8 29 5 50 63 6 23 18 12.8 29 5 50 78 8 27.5 23 13.7 35 7 61 78 8 27.5 23 13.7 35 7 61 B C D E F G H ZH05BS-06-06 ZH05BL-06-06 ZH07BS

CLA

Operation , A B ~ Sol.