MNB

L1 E1 R1 U1 A1 U1 R1 A MM NDH10 NZ MM NDH10 NX NX E1 L1 30 40 50 60 60 20 22 28 40 40 12 12.5 16.5 23.5 23.5 16 19 24 34 34 32 40 50, 63 80 100 32 40 50, 63 80 100 14 19 24 26 26 10 11 14 20 20 16 19 24 34 34 40 50 64 80 80 M10x1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 M10 x 1.25 M14 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 10 10 14 22 22 14 14 20 30 30 28 28 40 60 60 10 10 14 22 22 14 14 20

SMC

-MXS20L-10 13-/22-MXS20L-20 13-/22-MXS20L-30 13-/22-MXS20L-40 13-/22-MXS20L-50 13-/22-MXS20L-75 13-/22-MXS20L-100 13-/22-MXS20L-125 13-/22-MXS20L-150 148 MXS Air slide table 1322Dimensions / MXS25 1322Basic style Air cylinder Rotary actuator Air gripper Directional control valve Fittings & Tubing Pressure switch Clean gas filter Flow control equipment Filter, Pressure control equipment Air

ZP

+4 12 806 328 +7 +228 3 22 868 357 378 907 401 951 100-B01-A22 990 397 How to Order ZPX 40 HB N J 25 B01 A18 Mounting thread Pad diameter (mm) A18 M18 x 1.5 (40 to 80) 40 40 A22 M22 x 1.5 (100, 125) 50 50 63 63 Vacuum entry 80 80 B01 Rc 1/8 100 100 125 125 Applicable buffer stroke (Rotating) HB Pad type Material 40 50 63 80 100 125 Stroke 25 Large bellows pad N NBR Spring Force S Silicon

Cylinder with Lock

0 14 0.050 0.093 20 0.1 0.3 30 15 17 22 68 71 260 275 63 14 +0.070 0 14 0.050 0.093 20 0.1 0.3 30 15 17 28 81 81 272 287 80 22 +0.084 0 22 0.065 0.117 30 0.1 0.3 42 23 26 34 102 102 341 364 100 22 +0.084 0 22 0.065 0.117 30 0.1 0.3 42 23 26 40 124 124 361 384 Bore size Z ZZ 32 219 229.5 40 237 248 50 268 283 63 280 295 80 351 374 100 371 394 Double clevis: MWBD Port Cushion valve

MGP

32, 40 50, 63 50, 63 32, 40 32, 40 32, 40 50, 63 32, 40 10 10 32, 40 5 20 50 76 75 100 200 5 20 25 25 26 26 50 76 75 100 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 40 40 100 100 30 30 80 80 Load weight m (kg) 20 20 10 10 5 20 50 100 200 5 20 50 100 200 26 Compact Guide Cylinder With Air Cushion Series MGP Horizontal Mounting Ball Bushing 21 l = 50mm V = 400m/s 22 l =100mm

Floating Joint

20 25 32 32, 40 40 32, 40 50 50, 63 80 100 100 125 160 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24 6.6 6.6 6.6 9 9 9 9 9 11 11 11 18 22 6 6 6 9 9 9 12 12 16 19 19 21 29 21 24 24 31 31 31 41 41 50 59.5 59.5 66 96 36 40 40 52 52 52 45 45 55 65 65 72 100 48 52 52 70 70 70 19 25 25 32 32 32 65 65 75 90 90 100 150 0.08 0.12 0.12 0.28 0.28 0.28 0.63 0.63 1.15

LEC-OM02704CN

(RX(n+2)2~RX(n+2)9) 1 5 22 5 1 2 3 (1) DWELL [10STMm] [ms] [ms] [r/min] [ms] 1 5.00 3000 100 150 0 1 2 7.00 2000 0 3 3 8.00 1000 0 0(2) 1. 0 2. ,02 0 2 No.1 (100) No.1 (150) ( 3000 ) ( 2 000 ) 0r/min (1 000 ) No.1 (100) 7.00 0 5.00 12.00 8.00 1 ON (RYn1) OFF No.

Air Slide Table

100 100 100 125 125 125 Page 11 150 150 Low thrust with high rigidity type MXQB 10 10 10 10 10 20 20 20 20 20 30 30 30 30 30 40 40 40 40 40 Stroke 50 50 50 50 50 75 75 75 75 75 100 100 100 100 125 125 125 Page 53 150 150 Single side-ported type MXQC 10 10 20 20 30 30 Stroke 40 40 50 50 75 75 Page 67 100 Height interchangeable type MXQ 10 10 10 10 10 10 20 20 20 20 20 20 30 30 30 30 30

TABLE OF CONTENTS

300) 200 (200) 150 (200) 100 (125) 100 35 (40) N.O.

CG5-S

30 M14 x 1.5 12 14 42 16 22 41.6 30 36 12 14 IY-G04SUS +0.5 +0.3 +0.5 +0.3 I-G05SUS Y-G05SUS 50, 63 50,63 14 14 22 22 M18 x 1.5 56 18 28 40 M18 x 1.5 16 20 56 20 25 50.6 40 44 16 20 IY-G05SUS +0.070 0 I-G08SUS Y-G08SUS 80 80 18 18 28 28 M22 x 1.5 71 21 38 50 M22 x 1.5 21 27 71 23 35 64 50 56 21 27 IY-G08SUS +0.5 +0.3 +0.084 0 I-G10SUS Y-G10SUS 100 100 22 22 32 32 31 M26 x 1.5 79 21 45 55

15

[mm] Double Clevis Size Stroke range [mm] A CL CD CT CU CW CX CZ L RR 25 15 to 100 158.5 148.5 10 5 14 20 18 36 12.5 10 105 to 200 183.5 173.5 32 20 to 100 178.5 168.5 10 6 14 22 18 36 16.5 10 105 to 200 208.5 198.5 63 50 to 200 232.6 218.6 14 8 22 30 22 44 33.4 14 205 to 300 267.6 253.6 Material: Cast iron (Coating) * The A, CL and L measurements are when the unit is at the retracted stroke

MXQ

22 22 22 17 18 37 56 H 46 46 46 56 56 56 59 62 NN 2 2 2 2 3 3 4 4 4 GA 18 18 18 22 48 73 74 96 118 HA 50 50 50 56 48 56 112 118 124 I 16 16 16 16 18 23 25 18 21 J 46 46 46 56 72 100 155 190 215 K 31 41 51 61 71 96 121 146 171 KA 126 183 211 239 NA 4 4 4 4 4 8 8 8 8 M 94 94 94 104 122 155 212 240 268 Z 92.5 92.5 92.5 102.5 120.5 153.5 210.5 238.5 266.5 ZZ 108 108 108 118 136 169 226 254

JA/JAH/JB/JS

16 19 22 25 32 80 90 19 25 30 38 47 58 79 89 30 42 52 56 70 80 96 116 11.5 14 17.5 23 28 35 45 55 0.09 0.18 0.36 0.61 1.09 2.03 6.4 10 6.6 9 11 11 14 16 18 22 24.5 28.5 35.5 44.5 53 65 67.5 78 7 8 11 13.5 16 20 22 24 13 17 22 27 32 41 46 55 Option Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 JAL20-8-100 JAL25-10-150 JAL32-10-100

JA/JAH/JB/JS

27 32 41 46 55 CV MVGQ CC RB Option Pneumatic: Up to 1 MPa Hydraulic: Up to 3.5 MPa 20 25 32 30, 40 40 30, 40 50 50, 63 80 100 100 125 160 JAF20-8-100 JAF25-10-150 JAF32-10-100 JAF40-12-125 JAF40-12-150 JAF40-12-175 JAF50-16-150 JAF63-16-200 JAF80-20-250 JAF100-24-300 JAF100-27-150 JAF125-27-200 JAF160-33-200 13 17 17 22 22 22 27 27 32 41 41 41 55 7 8 8 11 11 11 13.5 13.5 16 20 20 20 24

CNA

Part no. 0.1 0.3 +0.070 0 12 I-04 I-05 I-08 I-10 40 50, 63 80 100 NT-04 NT-05 NT-08 NT-10 40 50, 63 80 100 16 15.5 20 69 22 24 55 M14 x 1.5 M14 x 1.5 8 22 25.4 21 0.1 0.3 +0.070 0 12 74 27 28 15.5 20 11 60 M18 x 1.5 M18 x 1.5 27 31.2 26 16 0.1 0.3 +0.070 0 18 36 22.5 26 91 37 71 M22 x 1.5 M22 x 1.5 13 32 37.0 31 28 0.1 0.3 +0.084 0 20 28 37 40 24.5 105 83 M26 x 1.5 M26 x 1.5 16 41 47.3 39

CNA

2) n = 2, 4, 6, 8, 100 + 50 (n 2) n = 2, 4, 6, 8, 110 + 50 (n 2) n = 2, 4, 6, 8, Same side CLQ 15 90 100 110 35 75 80 90 100 1 Different sides MLGP 2 Same side 100 100 100 D-A3 D-G39 D-K39 35 + 30 (n 2) n = 2, 3, 4, 75 + 30 (n 2) n = 2, 4, 6, 8, 80 + 30 (n 2) n = 2, 4, 6, 8, 90 + 30 (n 2) n = 2, 4, 6, 8, 100 + 100 (n 2) n = 2, 3, 4, 100 + 100 (n 2), n = 2, 4, 6, 8, Different

Series MXS 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

22-MXS25L-75 13-/22-MXS25L-100 13-/22-MXS25L-125 13-/22-MXS25L-150 797 MXS 1322Air Slide Table Specific Product Precautions Made to Order Dust cover and dust plug made by fluororubber -X52 Be sure to read this before handling.

CJ5-S

14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41 60 90 30 29 20 71 16 M12 x 1.75 10 26 33 8 M26 x 1.5 100 1/2 23 131 32 110 DBore size (mm) Pivot bracket CD(Shaft) Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ -X 0.040

CJ5-S

14 Up to 600 40 35 32 27 38 60 20 21 14 58 11 72 M10 x 1.5 7 18 22 7 M18 x 1.5 69 1/4 15 109 21 80 22 60 Up to 750 40 37 32 50 75 25 28 20 71 13 89 M10 x 1.5 10 22 33 7 M22 x 1.5 80 3/8 23 130 32 J 100 22 60 Up to 750 40 37 41 60 90 30 29 20 71 16 10 26 33 8 M26 x 1.5 100 1/2 23 131 32 110 M12 x 1.75 DBore size (mm) Pivot bracket CD(Shaft) Z ZZ LD LE LF LG LH LL LP LT LV LX LY LZ -X 0.040

Series MXQ 13- ø6, ø8, ø12, ø16, ø20, ø25 22- Air Slide Table

306 13-/22-MXQ2010 13-/22-MXQ2020 13-/22-MXQ2030 13-/22-MXQ2040 13-/22-MXQ2050 13-/22-MXQ2075 13-/22-MXQ20-100 13-/22-MXQ20-125 13-/22-MXQ20-150 Note) Note) 1322Note) Refer to the bottom view of MXQ20-50. 817 MXQ 1322Air Slide Table Dimensions: MXQ20 1322Axial piping (20): MXQ20-P 1322Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure