Compact Cylinder with Lock Series CLQ

A A1 E1 L1 MM RR1 U1 ND NX NZ L 34 41 42 56 71 79 8.5 16 25 30 30 40 50 55 M8 x 1.25 10.3 11.5 34 41 42 56 71 79 8.5 10.5 14 18 21 21 16 20 22 28 38 44 25 30 30 40 50 55 M8 x 1.25 10.3 12.8 12 16 21 24 11.5 14 14 20 27 31 8 10 10 14 18 22 8 10 18 22 28 32 8 10 10 14 18 22 8 10 18 22 28 32 IY-G02 IY-G03 IY-G04 IY-G05 IY-G08 IY-G10 20 25 32, 40 50, 63 80 100 I-G02 I-G03 I-G04 I-G05 I-G08 I-G10

Rotary Actuator

1.5 5 29.5 33 186 (230) 142 22.5 23.5 12 8 100 Rc3/8 112 85 85 25 40 4 60 M12 x 1.75 depth 14 5 259 (325) 1.5 5 39.5 33 245 (311) 172 28 25 12.5 8 Size AU BU CU SU MU Key Note 2) dimensions b L1 50 9.5 6 19 33 M12 x 1.75 5 0 0.030 25 63 10.5 6 22 35.5 M14 x 2 6 0 0.030 30 80 12.5 8 24 44 M16 x 2 6 0 0.030 40 The dimensions of the shaft type (W: Double shaft, X: Single shaft with four chamfers

VQZ1000/2000/3000

3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

VQ5000

How to order manifolds U side VV5Q 5 5 08 03 C 5 W n Base mounted Plug-in Kit designation 1 2 4 3 1. Stations 5.

CJ2-Z 10-/11- Series 21-/22- Air Cylinder/ø10, ø16

5 GB 5 5 GA 8 8 F 4 5 D 15 15 A 10 16 Bore size With air cushion With air cushion type is not available for 21-/22-CJ2.

Square Tube Type Air Cylinder Series MB1

5 5 5 M6 x 1.0 M6 x 1.0 M8 x 1.25 M8 x 1.25 M10 x 1.5 M10 x 1.5 6 6 7 7 10 10 M10 x 1.25 M14 x 1.5 M18 x 1.5 M18 x 1.5 M22 x 1.5 M26 x 1.5 26.5 26.5 31 31 37.5 37.5 1/8 1/4 1/4 3/8 3/8 1/2 84 84 94 94 114 114 4 4 5 9 11.5 17 6.5 9 10.5 12 14 15 135 139 156 156 190 190 22 30 35 35 40 40 to 500 to 500 to 600 to 600 to 800 to 800 10 14 18 18 22 26 With rod boot (mm) 151 to 200 l 151 to 200 h

CXS

stick-slip even at 5 to 50mm/s.

HRX-OM-Q026

(TEMP READY) signal . 5-19 5.8.2 Ready completion (TEMP READY) signal setting / checking . 5-20 5.9 Offset Function . 5-22 5.9.1 Offset function . 5-22 5.9.2 Usage example of offset function . 5-23 5.9.3 Setting/checking of offset function. 5-25 5.10 Operation Restoration after Power Failure . 5-27 5.10.1 Operation restoration function after power failure . 5-27 5.10.2 Setting/checking of

Series AK1000

Option Material Code Specification Standard High inlet pressure (Max. inlet pressure 3000 psig (20.7 MPa)) 5) Ports Diaphragm Nozzle Code Body Brass Poppet No code Material Code S, SH V V V V B S SH Ports 316 SS Hastelloy C-22 Hastelloy C-22 B 316 SS HR Hastelloy C-22 2P 3P 4PL 5PC Refer to the following porting configurations.

MU

(mm) H1 6 7 8 11 11 H 36 40 45 53 56 GY 5 5.5 7 8 10 GX 10 8.5 9 11.5 11.5 EY 26 42 54 64 72 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT Model MUB25 MUB32 MUB40 MUB50 MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 M5 x 0.8 depth 7.5

HRX-OM-M090

completion of preparation (TEMP READY) . 5-19 5.8.2 Signal for completion of preparation (TEMP READY) setting / checking . 5-20 HRS Series HRX-OM-M090 Contents 5.9 Offset function . 5-22 5.9.1 Offset function . 5-22 5.9.2 Offset function setting and checking . 5-24 5.10 Function to recover from power failure . 5-26 5.10.1 Function to recover from power failure . 5-26 5.10.2 Function to recover

HRX-OM-R016

completion of preparation (TEMP READY) . 5-19 5.8.2 Signal for completion of preparation (TEMP READY) setting / checking . 5-20 HRS Series HRX-OM-R016 Contents 5.9 Offset function . 5-22 5.9.1 Offset function . 5-22 5.9.2 Offset function setting and checking . 5-24 5.10 Function to recover from power failure . 5-26 5.10.1 Function to recover from power failure . 5-26 5.10.2 Function to recover

LJ1H

10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room specification 104 Dust seal specification 110 TSUBAKI CABLEVEYOR specification 122 Construction 134 Mounting 140 Non-standard Motor Mounting 143

MU

MUB63 Stroke range (mm) 5 to 300 5 to 300 5 to 300 5 to 300 5 to 300 D 12 14 16 20 20 C 54 68 86 104 124 B1 17 19 22 27 27 BY 7 8 9 9 12 B 24 28 32 39 50 BX 9 6.5 8 10 11 ET M5 X 0.8Depth11 M6 X 1Depth11 AL 19.5 23.5 27 32 32 BS 37 45 44 54 53 K 5.5 5.5 6 7 7 A 22 26 30 35 35 BT M5 X 0.8Depth7.5 M6 X 1Depth12 M8 X 1.25Depth13 M8 X 1.25Depth11 M10 X 1.5Depth15 M10 X 1.5Depth14.5 M12 X 1.75Depth18

CLQ

5 !

AZ1000

Material Body Poppet 316L SS Hastelloy C-22 Diaphragm Hastelloy C-22 Code Option S SHP 316L SS Code Specification Standard (Cv: 0.65) High flow (Cv: 1.1) No code HF Surface finish Gauge port (Inlete, Outletr) Code Ports Surface finish Ra 10 in. (0.25 m) Standard 25 in. (0.62 m) Pressure gauge 1) Force compensation (Cv: 0.65) 4)5) FC Code Ports 2 ports 3 ports 4 ports Code No code Q psig/bar

Cylinder with Lock Series CNG

28 M4 x 0.7 35.8 5 6 24 65 29 14 11 5.5 25 16 43.4 M8 x 1.25 1/8 141 8 42 3 12 21.5 2.5 10 3.2 28 M5 x 0.8 39.8 5.5 8 29 73 33 16 13 5.5 30 20 48 M10 x 1.25 1/8 151 10 42 3 12 26.5 2.5 10 4.5 28 M5 x 0.8 49.4 5.5 10 35.5 73 40 20 15 6.6 35 22 59.4 M10 x 1.25 1/8 154 12 48 3 12 26.5 2.5 10 4.5 30 M6 x 1 58.4 6 14 44 81 49 22 18 6.6 40 30 71.4 M14 x 1.5 1/8 169 (178) 14 56 4 12 28 (mm) Without

CG1

7 7 8 47 52 53 63.5 75.5 75.5 95 95 110 (118) 130 (138) +l 45 (53) 22 38.5 45 3.5 115.5 (123.5) 137.5 (145.5) +l 45 (53) 25 3.5 4 5 5 5 7 6.6 117.5 (125.5) 139.5 (147.5) +l 51 (60) 30 6.6 9 11 11 14 54.5 16.5 22 22 8.5 11 13 14 16 135 (144) 155 (164) +l 55 (67) 40 70.5 4.5 17.5 157.5 (169.5) 177.5 (189.5) +l CJ1 55 (67) 45 82.5 4.5 17.5 20 20 106 157.5 (169.5) 177.5 (189.5) +l 60 (74) 55

HRX-OM-W038

completion of preparation (TEMP READY) . 5-19 5.8.2 Signal for completion of preparation (TEMP READY) setting / checking . 5-20 HRS Series HRX-OM-W038 Contents 5.9 Offset function . 5-22 5.9.1 Offset function . 5-22 5.9.2 Offset function setting and checking . 5-24 5.10 Function to recover from power failure . 5-26 5.10.1 Function to recover from power failure . 5-26 5.10.2 Function to recover

Fieldbus System

pin) socket Note 1) Input channel 2 channels (1 channel/connector) Supplied voltage 24 VDC Max. supplied current 0.5 A/connector Protection Short-circuit protection Input Output 0 to 10 V, 1 to 5 V, 0 to 5 V 0 to 20 mA, 4 to 20 mA 12 bit resolution Input signal range 10 to 10 V, 5 to 5 V 20 to 20 mA 16 bit resolution EX600-AXA 15 V 22 mA Note 2) Max. rated input signal 50 100 k Input impedance