4/5 Port Air Operated Valve Series SYJA3000

SYJ5000-21-1A 02 2 stations -+ -+ A : : B B R port 1/4 R P 20 20 stations Applicable individual EXH spacer assembly SYJ5000-17-1A Applicable individual SUP spacer assembly SYJ5000-16-2A Applicable individual SUP spacer assembly ARBYJ5000-00-P Thread type A, B port size A, B port 1/8, C6 Nil F N T Rc G NPT NPTF P port 1/4 01 1/8 One-touch fitting for 6 C6 N7 One-touch fitting for 1/4" Type

5 Port Solenoid Valve SY Series

(-F2) G H 22.5 28.5 [35.5] A, B port M5 x 0.8 28.5 [35.5] 2 23.5 25 18.5 P 16.9 (15) EA EB M5 x 0.8 (P, EA, EB port) For manifold gasket positioning 21.5 die-cast hole 19 22.5 L plug connector (L): SY3120-L(-F ) M plug connector (M): SY3120-M(-F ) C4, N3 C6, N7 M8 connector (W0): SY3120-W0(-F ) 1 2 1 2 C4, N3 C6, N7 C4, N3 C6, N7 1 2 28.5 [35.5] 13.1 (Lead wire length) 33 M8 x 1 Approx. 300

Series 10-SZ3000 5 Port Solenoid Valve Cassette Type Manifold

4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 A 4 One-touch fitting (X, PE port) Applicable tubing O.D.: 6, 1/4" One-touch fitting [4(A), 2(B) port] Applicable tubing O.D.: 4, 5/32" 6, 1/4" (L4) L3 (3.2) 113.7 U side D side 3.1 8 36.3 58.2 5.5 35 18 28.8 70.7 B COM A B COM A B COM A B COM A B COM A DIN rail holding screw Manual override DIN rail (Press and turn for the locking type.) 4(A) port side:

SV

(N7:7) (C6:3.2) (For DIN rail mounting) (7.5) (81) (When circular connector is mounted) B B B B 109.5 102.9 111.4 118 100.4 91.9 A A A A 90 B A B A B A B A Dimensions are the ones for SV1300--.

Membrane air dryer, copper and zinc free series 25A-IDG is available in a single unit. 25A-IDG is suitable for use in secondary battery manufacturing applications with a dew point of -40°F (-40°C). Membrane air dryer series; Single unit style; 5 sizes available; Port sizes: Rc1/4", Rc3/8", Rc1/2"; Series 25A-IDG is compatible with secondary batteries application

Membrane air dryer, copper and zinc free series 25A-IDG is available in a single unit. 25A-IDG is suitable for use in secondary battery manufacturing applications with a dew point of -40°F (-40°C). Membrane air dryer series; Single unit style; 5 sizes available; Port sizes: Rc1/4", Rc3/8", Rc1/2"; Series 25A-IDG is compatible with secondary batteries application

SYJ300/500/700

Type 41 Applicable solenoid valve SYJ514SYJ514MSYJ524SYJ524MHow to Order SS3YJ5 41 05 C6 R port 1/8 Stations P, R port thread type A port size 02 : 20 P port 1/8 2 stations : 20 stations A A M5 01 C4 C6 N3 N7 M5 x 0.8 1/8 Nil Rc G NPT NPTF Applicable blanking plate assembly SYJ500-10-3A F N T 4 One-touch fitting 6 One-touch fitting A port M5 x 0.8, 1/8, C4, C6 5/32" One-touch fitting 1/4"

VZS

Single solenoid type A side solenoid Black: A Red: COM Double, 3 position type A side solenoid Black: A Red: COM Valve B side solenoid White: B Red: COM Lead wire color Lead Wire Color Single solenoid type A side solenoid Black: A Red: COM Double, 3 position type A side solenoid Black: A Red: COM Valve (1) B side solenoid White: B Red: COM Lead wire color Lead wire length: 0.6 m 3-7-4 5 Series

3 Port Air Operated Valve Series SYJA300

Type 41 Applicable solenoid valve SYJ514SYJ514MSYJ524SYJ524MHow to Order SS3YJ5 41 05 C6 R port 1/8 Stations P, R port thread type A port size 02 : 20 P port 1/8 2 stations : 20 stations A A M5 01 C4 C6 N3 N7 M5 x 0.8 1/8 Nil Rc G NPT NPTF Applicable blanking plate assembly SYJ500-10-3A F N T 4 One-touch fitting 6 One-touch fitting A port M5 x 0.8, 1/8, C4, C6 5/32" One-touch fitting 1/4"

SZ3000

Manifold specifications Model SS5Z3-60 Manifold type Non-plug-in type P(SUP), R(EXH) system Common SUP, EXH Valve stations 2 to 20 stations Location Valve A, B port piping specifications Direction Lateral C8 P, EA, EB ports Port size C4, C6, M5 A/B ports PA/B 3.4 (0.19) C4 A/BR 3.2 (0.18) Valve effective area mm (Cv value) PA/B 3.7 (0.21) C6 A/BR 3.9 (0.22) PA/B 3.4 (0.19) M5 A/BR 3.2 (0.18

Series 10-SYJ300/500/700 Rubber Seal 3 Port Solenoid Valve

) N7 N9 C6, C8, Directional Control Valves Air Grippers Modular F.

VQZ1000/2000/3000

A A 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 B B B 4 2-Rc 1/8, 1/4, C6, C8 C6: One-touch fitting assembly for 6 C8: One-touch fitting assembly for 8 VQD 2 A C8: One-touch fitting assembly for 8 B 23 P = 22 L1 L2 L3 (For C6, C8) ( 9.5) DIN rail clamp screw 80 ( 9.5) 2-M4 mounting hole (For C6, C8) (For C6, C8) 4.5 2-M6 mounting hole IN IN IN IN 5.5 80 6.5 (40) 69.5 58 37.5

Vacuum System Peripherals:

(When port sizes for A, B ports are mixed, indicate C4 or C6 in cell .)

Rubber seal 5 Port Solenoid Valve Series SYJ5000

-21-1A 02 2 stations -+ -+ A : : B B R port 1/4 R P 20 20 stations Applicable individual EXH spacer assembly SYJ5000-17-1A Applicable individual SUP spacer assembly SYJ5000-16-2A Applicable individual SUP spacer assembly ARBYJ5000-00-P Thread type A, B port size A, B port 1/8, C6 Nil F N T Rc G NPT NPTF P port 1/4 01 1/8 One-touch fitting for 6 C6 N7 One-touch fitting for 1/4" Type 43 (5

VZ100/300/500

/R port Thread type Stations A port side P port M5 01 C4 C6 B3 B7 2 stations 02 M5 x 0.8 1/8 Tube Nil Rc G NPT NPTF F N T 20 stations 20 One-touch fitting for 4 One-touch fitting for 6 A port M5 x 0.8, 1/8, C4, C6, B3, B7 One-touch fitting for 5/32" One-touch fitting for 1/4 Note) For more than 9 stations, supply air to both sides of P port and exhaust air from both sides of R port.

Rubber seal 5 Port Solenoid Valve Series SYJ7000

Type 42 (5 Port/Base mounted) How to Order SS5YJ742 05 C6 Applicable interface regulator ARBYJ7000-00-P Thread type A, B port size Stations C6 Nil F N T 02 Rc G NPT NPTF One-touch fitting for 6 2 stations + + P port 1/4 C8 : One-touch fitting for 8 : B R P R N7 20 One-touch fitting for 1/4" 20 stations A, B port A N9 One-touch fitting for 5/16" R port 1/4 B Note) For more than stations,

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SZ3000

One-touch fittings can be changed A side manual override: Orange A side passage symbol: Orange A B 3-NC 3-NC B side passage symbol: Green B side manual override: Green Series Replaceable port sizes SZ3000 C6 C4 M5 A side spool valve B side spool valve A side coil Elbow fittings are for C4 and C6 only.

Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow

Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Fixed SI Unit, Instruction Manual: None, Calibration Certificate: w/Calibration Certificate, Connector: Lead Wire w/Connector (2 m), Option: Bracket for w/o Flow

Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: F [1 PNP Outputs + Analog (4 to 20 mA)], Unit Specification: Fixed SI Unit, Instruction Manual: None, Calibration Certificate: w/Calibration Certificate, Connector: w/o Lead Wire w/Connector, Option: -