Series: 25A-PFM7, Flow Rate Range: 50 [1 to 50 (25) L/min], Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Unit Switching Function, Operation Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector, 2 m; Rubber Cover for Connector, Silicon Rubber, Option: Bracket for w/o Flow

Flow Rate Range: 25 [0.5 to 25 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: G1/8, Piping Entry Direction: Straight, Output Specification: E [1 PNP Outputs + Analog (1 to 5 V)], Unit Specification: Unit Switching Function, Instruction Manual: With Instruction Manual, Calibration Certificate: w/Calibration Certificate, Connector: -, Option: -

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: F01 (G1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Lead Wire w/Connector (2 m), Option: S (Bracket for w/Flow Adjustment Valve)

Valve: ZS-33-M)

Air cylinder (Series compatible with secondary batteries)

A B 40 9 9 5 5 50 9.5 8.5 5.5 4.5 63 12.5 11.5 8.5 7.5 80 16.5 13.5 12.5 9.5 100 18 16 14 12 Note)Abjust the auto switch after confirming the operating conditions in the actual setting.

Flow Rate Range: 50 [1 to 50 (25 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/8, Piping Entry Direction: Bottom Side, Output Specification: 2 PNP Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment Valve

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: Rc1/4, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment Valve

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: ø6 One-touch Fitting, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: C8 [ø8 (5/16") One-touch Fitting], Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow

Flow Rate Range: 11 [2 to 100 (50 for CO2) ℓ/min], Flow Adjustment Valve: None, Port Size: NPT1/4, Piping Entry Direction: Straight, Output Specification: 2 PNP Outputs, Unit Specification: Fixed SI Unit, Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover], Option: Bracket for w/o Flow Adjustment Valve

V100

plug connector (M) (A) 2 VKF 1 (P) 3 (R) M plug connector (M) VQZ N.O.

Compact 5-Port Solenoid Valve

2(B) port side: Yellow (DIN rail) (8) 9.5 A A A A B B B B 78.5 66.5 66.2 4 A 4 A 4 A 4 A 47.3 B 2 B 2 B 2 B 2 (5.5) (35) 4.6 (26.1) 5.3 2.2 (12.2) (14.8) 18.6 4 x M4 Mounting hole (Recommended tightening torque: 1.4 N.m) 18 L2 44.8 1.5 18 0.6 m, 1.5 m, 3 m (Lead wire length) (L4) (DIN rail mounting hole pitch: 12.5) (5.3) (Fitting for the type with P/E ports on the U and/or D sides) (L3)

1

Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com A A a B B s j C f g t C0.5 C0.2 b C0.2 d e 45 45 Section A-A p k C0.5 45 (d) C n h i l C0.5 q m O Section B-B r (I) View C (mm) a b c d e f g h i o j k m n p q r s l t Model 0 0.2 0.05 0.15 +0.2 0 +0.1 0 +0.2 0 CXS6

High Purity Fluoropolymer

L1 L2 H G F M E B A M 1/8 3 4 LQ1B12-M LQ1B11-M 2 10 4 8 18.5 11.5 15.5 12 1/8" Class 1 4 6 4 6 LQ1B43-M LQ1B42-M LQ1B41-M LQ1B36-M LQ1B35-M LQ1B34-M LQ1B33-M LQ1B32-M LQ1B31-M LQ1B24-M LQ1B23-M LQ1B22-M LQ1B21-M 19.5 1/8" R (NPT) Port size 4 15 6 12 14 28 16.5 16 2-B 22 1/4" M L2 A 10 F 1/4" 19 6 8 25 1/4 H G (E) (E) 5 20 9 18 17 36.5 23 L1 L1 10 Class 2 to 5 21 3/8" 6 8 27 M 12 10 12 3

Plug-in Unit

3/8, C8, C10, C12 <4(A), 2(B) port> Rc 1/4: 1/4" Female thread Rc 3/8: 3/8" Female thread C8 : 8 One-touch fitting C10 : 10 One-touch fitting C12 : 12 One-touch fitting 38.7 P=25 65.5 VQ5 VQZ VQD Manual override Indicator light L2 48 L1 6.5 65.5 P=25 A A A B A B A B A B A B 9 A A A A A A A 143 163 74.5 9 B B B B B 10 0.6 m, 1.5 m, 3 m Lead wire length n 1 2 3 4 5 6 7 Stations D-side 8 U-side

Slider Type Ball Screw Drive/11-LEFS Series

For details about fixing method, refer to Wiring/Cables in the Electric Actuators Precautions. o Actuator cable length Nil Without cable 1 1.5 m 3 3 m 5 5 m 8 8 m* LER Nil: Left LEH LEY -X5 !0 Controller/Driver type*1 A 10 m* 11LEFS 11LEFS C 20 m* !

VQ5000

, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 179 106 9 9 59.2 46.8 When U side mounting (FU) 83.5 55.5 M5 ground screw U side 19 34.5 n 12 X 2n-Rc 3/8, 1/2 4(A), 2(B) port B 2 A 4 Indicator light 6 A 4 B 2 A B 5 SMC SMC SMC SMC SMC A A A A A B B B B B Manual override B 2 A 4 A B A B A A B 4 L2 L1 B 2 A 4 3 B 2 A 4 2 34.5 48 68.5

Environment

PA LEM M U D LEY K Note 2) 4 x O1 thread depth R L S M Y 4 x O1 thread depth R M EH PC A + Stroke B + Stroke LES LEPY LEPS XA H9 depth XA 6 x MO thread depth MR LER Section XX details MH LEH LEY -X5 LEY -X5 MA ML + Stroke MC MD Section XX XB 11LEFS XA XA H9 (MB) 11LEJS 25A[mm] LEC Size Stroke range [mm] A B C D EH EV H J K L M O1 R PA PB V LEC S 25 15 to 100 130.5 116 13 20 44 45.5 M8 x 1.25

5 Port Air Operated Valve Series SYA3000/5000/7000 1

VVPA4 5 0 04 04 1 Thread type Nil Rc G NPT NPTF VP 5 port Air operated manifold F N T 5 Base size Rc A, B Port size Rc 3 4 6 1 VVPA450 Symbol 04 Port size VVPA460 1 2 3 4 Mixed 1 06 10 M (2) Piping Note 2) In the case of mixed specifications, indicate M and specify port location sparately on a manifold specification sheet.

Nozzle Diameter: 10 (ø1.0mm), Vacuum Pressure: L (-48 kPa), SUP: F01 (Screw-in G 1/8), VAC: F01 (Screw-in G 1/8)