Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: W [Lead Wire w/Connector (2m) + Rubber Cover]

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: None, Connector: Z (w/o Lead Wire w/Connector)

25

E 21 SN LQ1 LQ1 fittings Nut (including insert bushing), 1 location removed Fitting type E Union elbow T Union tee Applicable tube size Metric Inch Applicable tube size (mm) Applicable tube (inch) Reducing Reducing Size No.

Process Pump

E 21 S LQ1 LQ1 fittings Nut (including insert bushing), 1 location removed Fitting type E Union elbow T Union tee Applicable tube size Metric Inch Applicable tube size (mm) Applicable tube (inch) Reducing Reducing Size No.

Compact 5-Port Solenoid Valve

r w q e r w 5 (EA) 4 (A) 3 (EB) 2 (B) 1 (P) 2-position single 2-position double (A)4 2(B) (A)4 2(B) 3(EB) (EA)5 1 3(EB) (EA)5 1 (P) (P) 4-position dual 3-port valve 3-position closed center/exhaust center/pressure center q e r w q e r w 3-position closed center 3-position exhaust center 4-position dual 3-port valve N.C. valve x 2 pcs.

smcmaintenancepartslist

2 #4 e !8 #8 #6 #5 #2 w !0 e i !3 @8 !9 @0 @1 @2 @3 @4 @5 t u !4 !5 @7 y !6 !7 #0 #3 !1 @9 r q #1 #7 @6 o Component Parts Part Name Qty Remarks Item Part Name Qty Remarks Item q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

High Purity Fluoropolymer

Model L M N W H E W 4 6 19 LQ2U22 LQ2U21 19.9 55 18 16 1/4 (M) 10 LQ2U52 LQ2U51 LQ2U42 LQ2U41 LQ2U33 LQ2U32 LQ2U31 SMC 65 6 8 26.2 22 24 24 H 77 64 (E) (E) 12 19 10 12 L 33.1 21 28 30 30 Class 2, 3 88 75 40 26 32 36 36 86 (M) N Inch sizes Applicable tubing O.D.

Slider Type Ball Screw Drive/11-LEFS Series

How to Order 25 100 B 2 S A1 S2 w e r t u y i o !0 !

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Flow Rate Range: 10 [0.2 to 10 (5 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Flow Rate Range: 25 [0.5 to 25 (12.5 for CO2) â„“/min], Flow Adjustment Valve: S (Yes), Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: Straight, Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: N (None), Calibration Certificate: A (w/Calibration Certificate)

Flow Rate Range: 50 [1 to 50 (25 for CO2) â„“/min], Flow Adjustment Valve: None, Port Size: N01 (NPT1/8), Piping Entry Direction: L (Bottom), Output Specification: 2 [Analog Output (4 to 20 mA)], Instruction Manual: With Instruction Manual, Calibration Certificate: A (w/Calibration Certificate)

Power Valve: Economy Valve Series VEX5

Assembly 1) Pass the cable u through the cable gland r, plain washer t and rubber seal y in this order and connect to the terminal block e. Then, mount the terminal block e on the housing w.

VEX1

Construction Component Parts Description No. q w e r t y u i o !0 !1 !