KJ

(inch) 10-32 UNF Connection thread UNF NPT H (Width across flats) <10-32 UNF> <10-32 UNF> Min. port size D1 Note) D2 L1 P A Weight (g) Model L3 M L2 L1 M Applicable tubing KQ2VT01-32 KQ2VT01-34S KQ2VT03-32 KQ2VT03-34S KQ2VT05-34S KQ2VT07-32 KQ2VT07-34S KQ2VT07-35S KQ2VT07-36S KQ2VT09-35S KQ2VT09-36S KQ2VT09-37S KQ2VT11-35S KQ2VT11-36S KQ2VT11-37S KQ2VT13-36S KQ2VT13-37S 52 54.5 52 54.5 54.5

F

Applicable Applicable Model D1 L1 L2 P Q A M Minimum Tube OD Fitting Size Hole Applicable Applicable Model D1 L1 L2 P Q A M Effective Tube OD mm Fitting Size Orifice (mm2) Inch d Diameter d Nylon/Urethane 1/8 3.2(1/8) KQU01-99 9.6 52 17.5 9.6 9 36.5 15.5 2 3.2 3.2 KQU23-99 9.6 52 17.5 9.6 9 36.5 15.5 3.4/2.9 5/32 4(5/32) KQU03-99 10.4 53 18 10.4 9.7 37 16 2.5 4 4 KQU04-99 10.4 53 18 10.4

Rotary Clamp Cylinders

M5 x 0.8 (Piping port) M8 x 1.25 Effective thread depth 11 12 U K 2 x 5.5 through 2 x 2 x 9 counterbore depth 7 S 3 5.5 L K C 2 x 3.3 depth 3 +0.15 +0.05 R + Clamp stroke 3 4 B Q + 2 x Clamp stroke A Both ends tapped: MKA M6 x 1.0 10 10 R + Clamp stroke (Basic) (mm) B A C E F K L Oh9 Q R S U Model MKB20 MKB25 0 0.052 36 46.8 36 49 25.5 72.5 62 31 4 20 13.5 0.15 7.5 0.15 0.15 0 0.052 40 52

Large Size Vacuum Module: Series ZR

(ANR)) Type S 22 38 54 62 84 ZA Type L 42 52 74 88 105 Air consumption (l/min (ANR)) 46 78 95 185 150 ZX Maximum vacuum pressure L: -53 kPa S: -84 kPa ZR Built-in silencer, Manifold exhaust Individual exhaust port Exhaust release (Ejector exhaust) ZM Valve unit ZR1-V Supply valve (Pilot type)/Release valve (Pilot type) Component equipment ZMA N.C./N.O.

Table of Contents

Display (PF2D30/31) Sensor 40 Brown 15 6 2 Analog output Switch output or Pulse output Main circuit Main circuit Main circuit Main circuit 8 4 Load + 12 to 24 VDC ZSE ISE White 7 3 Black PSE A 62 52 42 5 1 Blue Z I SE3 PF2D5--1 A Model PF2D520 12.7 Display (PF2D30/31) PS PF2D504 4-4.5 9.52 Sensor Brown 2 6 Z I SE1 2 52 1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco

REA/REB

ML2B C J G5-S (Refer to page 10-2-52.) Review of operating conditions > 1 CV Determination of load factor () Load weight (W) Static moment (M) Dynamic moment (Me) = + + Max. load weight (Wmax) Allowable static moment (Mmax) Allowable dynamic moment (Memax) MVGQ 1 CC (Refer to data (B) on page 10-2-52.)

Electric Slide Tables

(Pulse input type) 1 Refer to page 52 for the detailed specifications of the controller/driver. 2 Only available for the motor type Step motor.

CG1

52 77 77 42.5 42.5 67.5 67.5 17.5 27 92.5 27.5 27.5 102 52 52 77 77 42.5 42.5 67.5 67.5 17.5 27 92.5 30 30 102 127 127 117.5 117.5 D-B59W D-B59W 53 53 78 78 43.5 43.5 68.5 68.5 18.5 28 93.5 33.5 33.5 103 128 128 118.5 118.5 57.5 57.5 82.5 82.5 46 46 71 71 21 32.5 96 38 38 107.5 132.5 132.5 121 121 52.5 52.5 77.5 77.5 43 43 68 68 18 27.5 93 24.5 24.5 102.5 D-H7W D-H7W 52.5 52.5 77.5 77.5

CATALOG VC10

All Models Model 22, 32, 72 STRAIN RELIEF CONNECTOR .30 (7.6) .30 (7.6) .20 (5.1) SPADE TERMINAL COIL MOLDED MANIFOLD MOUNT All Models Models 22, 32, 52 Model 22**, 32, 52, 72 * SINGLE AUTOMOTIVE ADD .232 (5.9) FOR SPADE TERMINAL COIL OPTION HIGH TEMPERATURE MOLDED COIL FLANGE MOUNT All Models except 52 All Models Models 22**, 72 DOUBLE AUTOMOTIVE PORT 90 RIGHT All Models except 52 EUROPEAN

Air Cylinder

1.5 44 78 (87) 130 (139) 50 18 M18 x 1.5 55 90 (102) 150 (162) 63 18 M18 x 1.5 69 90 (102) 150 (162) 80 22 M22 x 1.5 86 108 (122) 182 (196) 100 26 M26 x 1.5 106 108 (122) 182 (196) 20 30 18 55 27 15.5 10.5 126 (134) 25 30 19 62 32 16.5 10.5 133 (141) 32 35 19 62 38 18.5 10.5 135 (143) 40 35 19 70 48 21.5 10.5 150 (159) 50 40 19 78 59 24 10.5 170 (182) 63 40 20 78 72 24 10.5 170 (182) 80 52

42

52 VQ4000 3/8 Exhaust center Metal seal VQ440 5 0 6.2 0.18 1.5 6.9 0.17 1.7 45 47 47 0.28 (0.34) Rubber seal VQ440 5 1 7.0 0.38 1.9 7.3 0.38 2.0 50 52 52 3-position Pressure center Metal seal VQ450 5 0 6.2 0.18 1.6 6.4 0.18 1.6 45 47 47 0.28 (0.34) Rubber seal VQ450 5 1 7.0 0.38 1.9 7.1 0.38 2.0 50 52 52 Double check Metal seal VQ460 5 0 2.7 3.7 55 57 57 0.50 (0.56) Rubber seal VQ460

VS 8-2/VS 8-4

S kit (Serial transmission kit: EX250) M12 female input connector M4 x 7 earth thread 2 x Rc, G (According to ISO1179-1), NPTF 3/8" 3(R) port Rc, G (According to ISO1179-1), NPTF 1/8" Pilot port Rc, G (According to ISO1179-1), NPTF 1/8" Pilot exhaust port M8 female input connector 0 57.5 82 0 BUS 60 30 1 35.5 1 31.3 2 PWR 3 22 28.5 129.5 M12 male power connector 11.3 13.5 19 (n-1) x 19 52

REA/REB

ML2B C J G5-S (Refer to page 10-2-52.) Review of operating conditions > 1 CV Determination of load factor () Load weight (W) Static moment (M) Dynamic moment (Me) = + + Max. load weight (Wmax) Allowable static moment (Mmax) Allowable dynamic moment (Memax) MVGQ 1 CC (Refer to data (B) on page 10-2-52.)

EXxx-OML0010CN

a) (52) b) 28 c) (52) c) (16) e) (16) f) (/) g) () h) () i) j) k) l) m) -19No.EX-OML0010CN-C 4.

JXCx-OMU0026

Refer to 9.1 Profile parameter (P.52) for details.

JXCx-OMT0023

CH2 Torque [%] ALM EM1 MBR RD 56.8 3600 CH3 Effective load ratio [%] CH1 Servo motor speed [r/min] 52 52. CH2 Torque [%] ALM EM1 RD TLC 3.5 227 CH3 Droop pulses [pulse] (unit: 100 pulses) CH1 Servo motor speed [r/min] 61 61. CH2 Torque [%] ALM EM1 SON RD 0.8 56.8 CH3 Within one-revolution position [pulse] CH1 Servo motor speed [r/min] 8E 8E.

Fieldbus Device Handheld Terminal

Unit information display Explanation of screen a) Displayed unit symbol (Refer to page 52) b) Tag name (Refer to page 28) c) Part number (Refer to page 52) d) Manifold number (Refer to page 16) e) Unit number (Refer to page 16) f) Number of bytes that SI unit occupies (Input/Output) g) Number of total input bytes (Digital input + Analog input + Diagnostic data) h) Number of total output bytes

Air Combination

42.5 73 42.5 73 42.5 73 186.9 155.6 153.9 149.5 154 169.5 174 AC40C-06-D 28 41.5 27.8 52 42.5 73 42.5 73 42.5 73 188.9 157.6 155.9 151.5 156 171.5 176 -28- 10-5.

Cylinder with Lock

Width across flats KB B C V MM BH1 BH2 BH3 TX D E B1 C B ZZ + Stroke S + Stroke H A K BN N1 N MA MB F AL H1 TT B C B1 C B TY With rod boot d e 10.2 f h 10.2 l [mm] Bore size A AL B B1 BH1 BH2 BH3 BN BP C D E F GA GB GC GD GE GF H H1 J 32 22 19.5 46 46 23 38.5 46.5 59 1/8 32.5 12 30 13 37.5 13 37.5 18.5 4 13 47 6 M6 x 1.0 40 30 27 57 52 28.5 42.5 48.5 73 1/8 38 16 35 13 59.5 14 44.5 19.5 4

MB1

Dimensions GC GC S + (2 x Stroke) Stroke B Stroke A ZZ + (2 x Stroke) ZZ + Stroke (A + B) S + Stroke (A + B) ZZ 262 320 320 S 200 244 244 GC 43 52 52 ZZ 231 235 262 S 180 180 200 Bore size (mm) 32 40 50 GC 36 38 41 Bore size (mm) 63 80 100 Bore size (mm) 32 40 50 63 80 100 GC 36 38 41 43 52 52 S 178 178 198 198 242 242 ZZ 272 280 314 314 386 386 NPT ports XC18 15 Dual stroke cylinder/single