100

10 0 90 Vacuum pressure reached 80 kPa Vacuum pressure in tank [kPa] 80 Vacuum pressure [kPa] 66 kPa 70 60 53 kPa 50 40 kPa 40 26 kPa 30 20 13 kPa 10 0 Suction flow rate [L/min (ANR)] 10 0 20 30 40 50 60 70 80 90 100 1 10 Time to reach vacuum [s] 1 0 2 3 4 5 6 7 8 9 10 11 12 Vacuum Break Flow Rate Characteristics*1 (Representative value) *1 Silencer exhaust specification The graph shows

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

30 (42) 3/8, 1/2, 3/4-2 port 3, 5 port 1/8 12 port 3/8, 1/2, 3/4-2 port 2, 4 port 3/8, 1/2, 3/4 1 port EVS7-8-FG-D-M0 EVS7-8-F G-D-M0 H J I 221.5 216.5 216.5 103 103 56 56 56 56 16 (20) (4 port) 16 (20) (2 port) 16 (20) (4 port) 16 (20) (2 port) B A PB B A PB 62 (72) 75 (86) 38 50 62 (72) 75 (86) 14 12 50 38 14 12 Manual override PA P R2 R1 49 (64) 49 (64) Manual override PA 2-8 mounting

Mechanically Jointed Rodless Cylinder MY1H Series Linear Guide Type: ø25, ø32, ø40  Piping can be connected from 4 directions on the head cover.  Allows on-site piping to suit the MY1B installation MY1H MY1H conditions. MY1B MY1M MY1C MY

70 85 9.5 16 15 9 11 14 114 140 170 54 68 84 24.5 28.5 35 5.6 6.8 8.6 18 22 26.5 40.2 50.2 62.7 40.5 50 62 39 49 61.5 53 64 75 14.5 15 20.5 50 60 80 60 80 100 Rc1/8 Rc1/8 Rc1/4 Centralized piping PF PP PG QW Q RR TT TTT VV WWW Model WW XXX Z YH PD PE ZZ (mm) MY1H25 MY1H32 MY1H40 32 42 37.5 15.5 12 14 23.3 28.5 35 20.5 16 20 14.5 16 20 15 16 23.5 206 264 322 42 51 59 7 8 9 37.5 47 59.5 12

JXCx-OMT0005CN

(P.53) 9.3 / IO Input 10byte 20byte IO 4.3 DeviceNet (2) IO Class68h(P.20) 10. (P.33) 9.4 IO Output IO 4.3 DeviceNet (2) IO Class68h(P.20) ON No.

ISO Cylinder

GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 16 GKM6-12 6 12 24 6 12 10 18 M6 x 1 31 20 GKM8-16 8 16 32 8 16 14 23 M8 x 1.25 42 25 GKM10-20 10 20 40 10 20 18 27 M10 x 1.25 52 Bore size Part no. b1 b3 dH7 d6 d7 h l l3 d3 a 8 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 10 KJ4D 8 6.0 5 18 11 27 10 10 M4 x 0.7 13 12 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 16 KJ6D 9 6.75 6 20 13 30 12 11 M6 x 1 13 20 KJ8D

Series 10-SV1000/2000/3000/4000 5 Port Solenoid Valve

One-touch fitting Rc 1/4 Rc 3/8 G 1/4 G 3/8 Mixed (Up to 18 solenoids possible) 8 One-touch fitting 10-SV1000 18 18 stations Type 16: Series 10-SV2000 Symbol 02 Stations 2 stations Note 10 One-touch fitting 10-SV2000 Double wiring Note 1) 12 02 12 stations 2 stations 12 One-touch fitting 10-SV3000 Specified layout Note 2) (Up to 24 solenoids possible) 20 20 stations 12 One-touch fitting

Rotary Actuator/Vane Type

10-(18-X) to (X-4) X-4 3 to 18 10-(18-X) to (X-1.5) X-1.5 20 10 to 20 10-(20-X) to (X-4.5) X-4.5 3 to 20 10-(20-X) to (X-1.5) X-1.5 30 10 to 22 12-(22-X) to (X-5) X-5 5 to 22 12-(22-X) to (X-2) X-2 87 CRB2 Series Axial: Top (Long shaft side) Axial: Bottom (Short shaft side) Symbol: A14 Symbol: A15 Applicable to single vane type only.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

2 Gasket Seal Clamp screw Clip HNBR HNBR Carbon steel Stainless steel 12 12 12 12 Pilot valve assembly V112 1021Enclosure Note) A set of parts containing 12 pcs. each is enclosed.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

2 Gasket Seal Clamp screw Clip HNBR HNBR Carbon steel Stainless steel 12 12 12 12 Pilot valve assembly V112 1021Enclosure Note) A set of parts containing 12 pcs. each is enclosed.

CG1

Standard stroke range (mm) Long stroke range (mm) Bore (mm) TC GB GA F E AL TB C D B1 ZZ A H H1 I J K KA MM NA P S TA WA WB W WH 30 12 12 12 13 14 14 20 20 2 2 2 2 2 2 3 3 12 14 18 25 30 32 40 50 14 11 11 20 25 32 40 50 63 80 100 8 10 12 16 20 20 25 30 18 22 22 30 35 35 40 40 15.5 13 17 17 19 27 27 32 41 10 (12) 35 5 6 6 8 11 11 13 16 26 31 38 47 58 72 89 M4 X 0.7 Depth 7 5 6 8 10 14 18 18

KJ

(inch) H2 (Width across flats) T D Note) B E Mounting hole M Weight (g) H1 (Width across flats) Min. port size Model KQ2LE01-00 KQ2LE03-00 KQ2LE05-00 KQ2LE07-00 KQ2LE09-00 KQ2LE11-00 KQ2LE13-00 1 8 1/2-20 UNF 1/2-20 UNF 9/16-18 UNF 9/16-18 UNF 3/4-16 UNF 7/8-14 UNF 1-12 UNF 13.5 13.5 15 15 20 23 26 9.6 10.4 11.4 13.2 15.2 17.9 21.7 27 26 32 29 53 85 105 2.5 3 3.5 4.6 6 7 9.6 15.5 16 16.5

JXCx-OMU0004

1000 1000 [mm/s [mm/s] 20 10 2] 1000 1000 [mm/s [mm] 1 1 3 LEP6 LEP10L LEP10 J K J K J K 7 14 12 24 12.5 25 8.5 17 16 32 19 37.5 [N] 10 20 20 40 25 50 [mm/s] 20 10 20 10 20 10 *LEP6 30%F.S.LEP10 25%F.S.

Vacuum Pad: Ball Joint Type, Series ZPT/ZPR

Q H R R H Width across flats 12 Width across flats 3 F Width across flats 12 Width across flats 3 F E E D C D C 3 2 3 2 A B A B With a stroke of 10mm With a stroke of 20 to 50mm Dimensions/10mm stroke Additional dimensions by stroke (mm) (mm) Q: 6 Q: 8 H I J Stroke A B C D E F H I J Model R S R S 20 +10 3 0 ZPR20F10-0-A14 20 22 12.5 15.5 29.3 46.5 58.5 126.5 30 +20 +7 50 ZPR25F10-0-A14 25

High Purity Fluoropolymer Fittings HYPER FITTING ® Series LQ1 1

x 10 10 x 8 12 x 10 10 x 8 19 x 16 12 x 10 19 x 16 12 x 10 25 x 22 19 x 16 25 x 22 19 x 16 Tubing O.D.

HRX-OM-W038

0.0 5 0 10 20 30 5 0 10 20 30 Circulating fluid flow[L/min] Circulating fluid flow[L/min] Fig. 9-7 Pump capacity(HRS040--20-(BJM)) 9.6.2 HRS040--20-T,-MT 0.5 50 Available area 0.4 40 Circulating fluid pressure[MPa] Pump head[m] Outlet50Hz Outlet:60Hz 0.3 30 0.2 20 0.1 10 Return port Available area 0 0.0 0 10 20 30 40 Circulating fluid flow[L/min] Fig. 9-8 Pump capacity(HRS040--20-T/-MT)

MB1

MK Standard part number MB1 XC6 Stroke ML + Adjustment 4 MH + Stroke + Adjustment Stainless steel piston rod and rod end nut ZZ + 2 strokes + Adjustment (A: 25, B: 50) Specifications Bore size (mm) 32 40 50 63 80 100 MA 21 27 32 32 36 46 MK 10 12 15 15 20 20 MI 24 32 38 38 45 55 MH 44 48 53 53 72 75 ML 18 20 21 21 32 32 MM 10 14 18 18 22 26 ZZ 175 183 205 205 258 261 Double acting single

Suction Guard (Produced upon receipt of order) FHG Series

) 2B (16) 2 1/2B (20) 3B (24) 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 1/2 3/4 1 1 1/4 1 1/2 2 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 2.7 2.7 2.7 5.1 5.1 5.0 10.3 10.3 1/2B (04) 3/4B (06) 1B (08) 1 1/4B (10) 1 1/2B (12) 2B (16) 2 1/2B (20) 3B (24) 22.2 27.7 34.5 43.9 49.1 61.1 77.1 90.0 56 56 56 76 76 76 101 101 71 71 71 104 104 104 129 129 53 53 53 74 74 74 94 94 9 9

3/5 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ1000/2000/3000

port 20 20 37.4 66.5 20 16 20 (38) VQ4 The broken line indicate DIN rail mounted style [-D].

High Power Cylinder:

1/4, 3/8 20 4 500 0.5 0.1 0.3 10 32 (3/8) 10 1/4, 3/8 8 1000 0 1/4, 3/8 3/8 3/8 3/8 12 16 20 24 1500 2000 2500 3000 1,000 2,000 3,000 Max. speed Vmax (mm/s) Graph 3:40 40 8 10 1/4, 3/8 h=0.7 6 500 30 0.5 40 (3/8) 12 18 24 30 36 1000 1500 2000 2500 3000 3/8 12 3/8 12 3/8 12 3/8 12 3/8 12 0.1 0.3 20 10 Note) Refer to p.4.10-5 for max. absorbed energy since cushioning ability may in some cases

Direct Operated 2 Port Solenoid Valve For Water, Oil, Steam, Air Series VX21/22/23 1

Use compatible heavy duty cords with cable O.D. of 6 to 12. Use the tightening torques below for each section.