CV/MVGQ

247 280 292 Z 101 111 115 138 144 Z 93 103 107 129 135 ZZ 221 231 239 271 283 40 50 63 80 100 15 0.032 0.059 15 0.032 0.059 18 0.032 0.059 25 0.040 0.073 25 0.040 0.073 38 20 20 20 24 24 45 50 57 69.5 79.5 23 23 28 35 43 85 95 110 140 162 77.5 87.5 102 124.5 144.5 115 125 146 190 212 8 0 0 0 0 18 18 18 20 20 43.5 49 63 73 The minimum stroke of the one with rod boot is 20 mm or more. 10-15

CL

to 500 20 to 600 20 to 600 20 to 750 20 to 750 30 to 1000 30 to 1000 30 to 1200 27 32 32 37 37 47 47 53 60 70 86 102 116 145 161 182 22 27 27 32 41 59 67 73 77 85 112.5 121 133 69 78 84 92 100 141.5 150 167 44 52 64 78 92 115 128 144 10 12 16 20 25 25 28 32 17 17 20 16 20 20 25 30 36 36 40 40 50 55 65 80 90 90 90 6.5 6.0 6.0 8.0 8.0 43 43 43 14 14 14 15 17 17 21 21 16 16 18.5 15 17 17 21

Table of Contents

10 20 20 20 20 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy Stainless steel Nil W

CM2

TZ TY TX TT TD Q P WB N1 G WA Bore size (mm) In the case of with rod boot, refer to basic style on page 6-4-31 and f dimension on page 6-4-13. 20 20 20 144 36 52 32 32 10 8 6 8.5 8 13 17.5 21.5 25 25 25 152 40 60 40 40 10 9 6 8 13 17.5 10.5 24.5 32 32 32 154 40 60 40 40 10 9 6 8 13 17.5 11.5 27 40 40 40 188 44.5 77 53 53 11 10 8 11 16 21.5 15 32.5 6-4-34 35 Series CDM2W Air Cylinder: Standard

CXS

400mm/s 2 20 50 CXSM CXSL CXSM CXSL 10 Weight m (kg) Weight m (kg) 10 32 32 25 25 1 1 20 20 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph V = up to 800mm/s 4 Graph V = up to 600mm/s 3 6 5 3 32 2 Weight m (kg) Weight m (kg) 32 25 25 1 1 20 20 CXSM CXSL CXSM CXSL 0.6 10 20 30 40 50 100 5 0.6 10 20 30 40 50 100 5 Overhang L (mm) Overhang L (mm) Graph

Vacuum System Peripherals:

Series ZM 13-14-20 4.

Auto Switch Guide

If using other screws, switch may be damaged. (3) Load current range and Maximum load current 5 to 20 mA 5 to 40 mA 20 mA Contact protection circuit None D-A93 2.4 V or less (up to 20 mA)/3 V or less (up to 40 mA) D-A93V 2.7 V or less Internal voltage drop 0.8 V or less Auto Switch Internal Circuit Colors of lead wire inside ( ) are the ones before conformed to IEC standard.

CJ2

(mm) Material: Iron A 15 15 CX 3.2 6.5 BA 12 18 GB 18 23 BB 12 18 H 20 20 CD(cd) 3.3 5 CA 14 20 KA 4.2 5.2 CB 14 20 MM M4 X 0.7 M5 X 0.8 NA 5.5 5.5 NB 22.5 27.5 R 5 8 U 8 10 Part No.

LEH_C

/LEHZJ /P.17 3.1 /LEHF /P.20 4.1 /LEHS /P.10 2.1.1 /LEHZ /P.13 2.2.1 /LEHZJ /P.17 3.1 /LEHF /P.20 4.1 /LEHS 3) 4) /P.50 8.3 5) () /P.53 8.3 6) /P.39 6. 7) 8) () 0 /P.28,30 9) () /P.28,30 () 10) /P.28,30 INC/ () 29 - No. 2 / 1)() () () 2)IN* 15ms( No.

LJ1H

12 10 20 20 20 40 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 LJ1H10 LJ1H20 LJ1H30 2 Horizontal 8 25 25 18 Standard motor 8 12 8 12 24 5 10 5 10 Vertical 32 10 12 10 20 10 12 10 20 40 High rigidity direct acting guide LJ1H 20 20 40 44 Horizontal 50 25 25 60 Non-standard motor 8 12 8 12 66 5 10 5 10 Vertical 74 10 10 82 Options Page 100 Made to Order 101 Clean room

Magnetically Coupled Rodless Cylinder Series CY3 B R /CY1 1

CY1S15/20/25/32/40 14 (mm) J x K B C D d EA EB FA H HA HG HP HT HS HB GP G FB A L Model CY1S15 CDY1S15 CY1S20 CDY1S20 CY1S25 CDY1S25 CY1S32 CDY1S32 CY1S40 CDY1S40 M6 x 1.0 x 9.5 7.5 9.5 5 16.6 12 6 13 3 40 29 13 39 21 15 1 52 6.5 6 60 M6 x 1.0 x 9.5 10 9.5 5.2 21.6 16 46 36 17 45 20 25.5 4.5 62 8.5 70 M8 x 1.25 x 10 10 11 6.5 26.4 16 8 14 4 54 40 20 53 20 23 9 70 8.5 7 70 M10 x 1.5 x 15

CM2

25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 20 25 32 40 0 0 1 6 6 6 7 12 3 3 4 9 0 0 0.5 5.5 5 5 6 11 3.5 3.5 4.5 9.5 1.5 1.5 2.5 7.5 D-B5 D-B6 D-B59W D-G5NTL D-B5 D-B6 D-C7 D-C8 D-C73C D-C80C D-C7/C8 D-H7l D-H7lW D-H7BAL D-H7lF D-C73C D-C80C D-H7C D-B59W D-A3lA D-G39A D-K39A D-A44A D-A3lA D-G39A D-K39A

CY1

CY1S15, 20 to 40 (mm) J x K GP G FB A L B C D d EA EB FA H HA HG HP HT HS HB Model CY1S15 CDY1S15 CY1S20 CDY1S20 CY1S25 CDY1S25 CY1S32 CDY1S32 CY1S40 CDY1S40 7.5 9.5 5 16.6 12 6 13 3 40 29 13 39 21 15 1 52 6.5 6 60 M6 x 1.0 x 9.5 10 9.5 5.2 21.6 16 46 36 17 45 20 25.5 4.5 62 8.5 70 M6 x 1.0 x 9.5 10 11 6.5 26.4 16 8 14 4 54 40 20 53 20 23 9 70 8.5 7 70 M8 x 1.25 x 10 12.5 14 8 33.6 20 8

Compact Manifold Regulator

IN Fitting Type Inch size Metric size ARP Common supply block (S) Common supply block with pressure switch (P) Fitting type Fitting type Straight 6 8 10 8 6 10 Elbow Straight 1/4 5/16 3/8 5/16 1/4 3/8 Elbow Symbol Symbol IR-A 01 02 03 13 14 15 51 52 53 63 64 65 5 56 56 5 IR 0.4 0.2 0.6 0.5 SMC 20 MPa 24 20 17 24 56 IRV 0.3 0.1 VEX 32.5 SRH 4.

VQ5000

213 121.3 91.5 13.5 2(B) port 59.5 53 4 (A) port17.5 13.5 2(B) port 59.5 4(A) port 17.5 Indicator light SMC 2 4 2 4 SMC A B A B 53 40 66 162 50 41 37 31.5 18 53 40 66 B A A B Manual override 1 3 5 14 12 14 5 1 3 12 53 2-6.5 Mounting hole 35 2-6.5 Mounting hole 35 53 Manual override 18 31.5 37 41 50 98 PE X PE X P R1 R2 R2 R1 P 27.5 27.5 41 41 Rc 1/8 PE port Rc 1/8 External pilot port Rc

•

l 15 :1-7 "140 177 144 42 19 20 236 118 275 18 M16x 1.5 \ 15 34 15 0160 Up to 1200 I 56 180 38 178.5 20 17 53 Bdre size MM N pis \VithOO1 (l}d bool\ With rod boot (Single side) (mm) (BotilSjjes,1 ZZ ZZ 341 364 341 364 367 388 1m,") H ZZ e f h 0125 M3D x 1 5 30.5 1!

VQ5000

59.5 59.5 27.5 27.5 2-3/8 Ports R1, R2 (Port A) 17.5 13.5 (Port B) Indicator light SMC 2 4 T 5 1 3 16 16 13 A 40 53 66 53 66 B A VQ5000 2 4 14 5 1 3 12 Manual override 2-6.5 Mounting hole 17.5 13.5 35 53 35 53 3-1/2 Ports P, A, B Bottom ports 16 M5 ground screw SMC (Ports A, B) 26.5 18 31.5 37 41 50 98 PE X P R1 R2 27.5 41 41 27.5 1/8 Port PE 1/8 External pilot port 5-1/2 Ports P, A, B,

CS1

90 43 14 19 31 35 to 1000 3/4 M36 X 1.5 18.5 180 182 144 236 118 275 M16 X 1.5 53 56 20 19 40 90 59 43 14 17 36 39 to 1200 3/4 M40 X 1.5 115 18.5 200 204 162 265 132 320 M18 X 1.5 60 63 24 25 17 39 45 70 48 20 41 to 1200 Lube Non-lube 3/4 1 M45 X 1.5 115 18.5 225 226 182 280 150 335 M20 X 1.5 63 60 17 24 25 39 48 46 50 74 20 to 1200 M56 X 2 140 275 277 225 355 180 420 M24 X 1.5 23 71 67

Electric Actuators

10 20 20 20 20 LG1H20 LG1H21 LG1H21 Without coupling 148 Standard motor High rigidity direct acting guide LG1H 10 20 10 20 Horizontal With coupling 158 Non-standard motor 10 20 10 20 With coupling 168 Options Page 178 Construction 179 Mounting 181 Non-standard Motor Mounting 182 Deflection Data 183 Part Number Designations F 2 G X10 1 P A 100 LG1 21 H Frame material Aluminium alloy

MGP

to 74st 53 53.5 75 to 200st 84.5 85 201 to 400st 122 122 20 to 74st 0 0 75 to 200st 31.5 31.5 201 to 400st 69 68.5 40 to 124st 80 85.5 20 to 39st 63 69.5 125 to 200st 104 104.5 201 to 400st 122 122 20 to 39st 10 16 40 to 124st 27 32 125 to 200st 51 51 201 to 400st 69 68.5 20 25 20 25 A E A E Bore size (mm) Bore size (mm) 25 to 74st 97 97 106.5 106.5 115 137 75 to 200st 102 102 118 118 142