Series AK1000

It is recommended to perform a helium leak test on all face seal connections and tube welds per the industry standards (refer to SEMI F1). Selection Warning 1. Conrm the specications.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Moment (Nm) Moment (Nm) Load weight (kg) M1 = F1 x L1 Piston speed V (mm/s) M2 = F2 x L2 ML1C/M2, M3 Moment (Nm) M3 = F3 x L3 Piston speed V (mm/s) (How to calculate the load ratio) A. Consider (1) max. load weight, (2) static moment, (3) dynamic moment (when stopper collides) when calculating the max. allowable moment and load weight.

Digital pressure switch for energy-saving control ejector

energy-saving control ejector MODEL / Series / Product Number ZSE10ZL3ZL6 series Table of Contents Safety Instructions 2 How to order read wires 9 Summary of Product parts 10 Definition and terminology 11 Wiring 15 Wiring 15 Internal circuit and wiring example 16 Easy Setting 17 Measurement mode 17 Function Setting 20 Function selection mode 20 Default setting 20 F0 Unit selection function 23 F1

Secondary Batteries

C6 X121 90-VQ1000 Series compatible with secondary batteries For blanking manual specification 90 Material restriction OUT side port size One-touch fitting for 4 One-touch fitting for 6 C4 C6 IN side port size One-touch fitting for 4 One-touch fitting for 6 C4 C6 *Specifications and dimensions for the 90-series are the same as standard products. 90 X121 VQ2000 FPG 01 01 90-VQ2000 Series

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Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

-X 20m2 m3 Data Moment (Nm) M1 = F1 x L1 F1 F2 M3 = F3 x L3 F3 M2 = F2 x L2 L1 L2 L3 Maximum Load Weight Select the load from within the range of limits shown in the graphs. Note that the maximum allowable moment value may sometimes be exceeded even within the operating limits shown in the graphs. Therefore, also check the allowable moment for the selected conditions.

Mechanically Jointed Rodless Cylinder With Protective Cover Series MY1  W ø16, ø20, ø25, ø32, ø40, ø50, ø63 1

-X 20m2 m3 Data Moment (Nm) M1 = F1 x L1 F1 F2 M3 = F3 x L3 F3 M2 = F2 x L2 L1 L2 L3 Maximum Load Weight Select the load from within the range of limits shown in the graphs. Note that the maximum allowable moment value may sometimes be exceeded even within the operating limits shown in the graphs. Therefore, also check the allowable moment for the selected conditions.

NCA1

Composite tube only) S T Y L E Standard Cylinder W Double Rod (Please see Page 19 for Mounting Information) K Non-rotating Piston Rod (5 to 14) O P T I O N S A Special Rod Thread (See Page 22) B5 Oversized Rod (See Char t below) B6 High Temperature * C3 Por t and Cushion Location (see Page 23) C6 Stainless Steel Piston Rod (Std. on XTSS series) C8 Adjustable Stroke Extended Piston Rod *

Air Cylinder NCA1 Series

Composite tube only) S T Y L E Standard Cylinder W Double Rod (Please see Page 19 for Mounting Information) K Non-rotating Piston Rod (5 to 14) O P T I O N S A Special Rod Thread (See Page 22) B5 Oversized Rod (See Char t below) B6 High Temperature * C3 Por t and Cushion Location (see Page 23) C6 Stainless Steel Piston Rod (Std. on XTSS series) C8 Adjustable Stroke Extended Piston Rod *

Actuation: 1 (2-Position Single), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: 01 (1/8), Thread Type: Rc, Bracket: F2 (w/Side Bracket)

Actuation: 1 (2-Position Single), Electrical Entry: L (L-type Plug Connector), Lead Wire Length: 6 (600mm, Maximum Length for L-type), Manual Override: Non-locking Push Type, A,B Port: N7 (ø1/4" One-touch Fitting, Inch), Thread Type: Rc, Bracket: F2 (w/Side Bracket)

Actuation: 2-Position Single, Electrical Entry: L-type Plug Connector, Lead Wire Length: 600mm, Maximum Length for L-type, Manual Override: Non-locking Push Type, A,B Port: ø1/4" One-touch Fitting, Inch, Thread Type: Rc, Bracket: w/Side Bracket

Rotary Actuator/Vane Type

(Viewed from the short shaft side) Symbol: C6 Symbol: C5 Applicable to single vane type only. Start of rotation is 45 up from the bottom of the vertical line to the left side. Applicable to single vane type only. Start of rotation is horizontal line (90 down from the top to the left side).

MY1

D-Y7P, D-Y7PV D-Y59B, D-Y69B D-Y59A, D-Y69A Internal circuits Lead wire length 0.5m 10 9 10 D-Y59A, D-Y69A Lead wire length 3m 53 50 53 Dimensions DC(+) Brown [Red] D-Y59A, D-Y7P, D-Y59B Main circuit of switch OUT Black [White] M2.5 x 4 Slotted set screw Indicator light 3.4 2.5 DC() Blue [Black] SMC 6.2 5 D-Y7P(V) 29 DC(+) Brown [Red] Main circuit of switch Most sensitive position 12.5 OUT

Ejector Valve Unit, Series ZYY/ZYX

For ejector valves only (without solenoid valves) Ejector valve ZYY35LZ-10S-E15C Double solenoid (24VDC) SY3240-5LZ J ZZY 1 U Single solenoid (24VDC) SY3140-5LZ Blanking plate assembly SX3000-75-1A Cylinder port size C6: With 6 One-touch fitting Manifold base (4 stations) ZZYY3-45-04D-C6-J1U With ejector Number of ejectors 1 to 10 Ejector mounting position U D U side D side U side Stations

Model Selection 1

Single unit C6 to C12 Pilot operated (For dry air) 0.01 to 0.6 3.4, 4.8 C6 to C12, (3/8) (1) 17-2-89 VV2Q22/32 N.C. Manifold Note 1) All IN ports are 3/8. Note 2) 10 is N.C. (normally closed) only. 17-1-2 17-1-3 2 Model Selection 2 Equipment for Controlling Fluids Model Selection 2 According to the model selection guide below, refer to number of port, valve style (N.C./N.O.

Rotary Actuator: Free Mount Type/Vane Style Series CRBU2

Symbol: C5 Applicable to single vane style only Symbol: C6 Applicable to single vane style only Start of rotation is 45 up from the bottom of the vertical line to the left side. Rotation tolerance for CRBU2W10 is . A parallel key is used instead of chamfer for size 40. Start of rotation is 45 up from the bottom of the vertical line to the left side.

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Rubber seal 5 Port Solenoid Valve Series SYJ7000

0.57 0.37 0.45 0.55 0.36 0.50 0.51 0.50 0.38 0.46 2.3 2.0 2.1 2.3 2.1 2.1 2.5 2.2 2.2 2.2 0.26 0.25 0.25 0.26 0.24 0.20 0.23 0.30 0.23 0.26 0.55 0.49 0.51 0.54 0.50 0.50 0.59 0.55 0.52 0.53 1/8 1/8 1/8 1/4 1/4 1/4 1/4 1/4 1/4 1/4 1/8 C6 C8 1/8 C6 C8 1/8 1/8 C6 C8 Type SS5YJ7-20 Body ported SYJ72 for internal pilot Type SS5YJ7-21 Type SS5YJ7-40 Base mounted Type SS5YJ7-41 SYJ74 for internal

3 Port Solenoid Valve Metal Seal Series VZ200 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Side/Base (Same side of solenoid) Piping direction/ Location Port size P, E port VT Top/Valve Side/Base (Opposite side of solenoid) VV3Z2-50-0612(A) port M5 x 0.8, Rc 1/8 C4, C6 C4, C6 Rc 1/8 VZ215VZ225Base mounted (Without sub-plate) VVZ200-31A-2 VVZ200