SFOD-OMT0005CN

(PLC ) Alarm _Comment _061 (01-061) <> (1) ()1(ABS)2(INC) (2)PLC 15ms(30ms) 13.2[2](P.53) 3D B RESET (+)(-) Alarm _Comment _062 (01-062) (+)(-) 3E B RESET <> (01-096) C RESET <> -64- (01-097) <> C RESET <> <>OFF JOG OFF (01-098) OFF DRV C RESET <>ON (SVRE ON) DRIVE ON (01-099) <> SET OFF DRV C RESET <> <>12 (01-103) C RESET 1 [] A [a ] 2 [SW] [] A [a ] <> <>

HRX-OM-R016

AL.01 HRS Series 5.18 Communication function 5-53 HRX-OM-R016 Chapter 5 Display and setting of various functions Communication mode setting and cheking 1. Press and hold the [MENU] key for approx. 2 sec. Repeat pressing the key until the setting screen for communication mode [ ] appears on the digital display.

HRX-OM-O021

AL.01 HRS Series 5.19 Communication function 5-53 HRX-OM-O021 Chapter 5 Display and setting of various functions Communication mode setting and cheking 1. Press and hold the [MENU] key for approx. 2 sec. Repeat pressing the key until the setting screen for communication mode [ ] appears on the digital display.

HRX-OM-R005

AL.01 HRS Series 5.19 Communication function 5-53 HRX-OM-R005 Chapter 5 Display and setting of various functions Communication mode setting and cheking 1. Press and hold the [MENU] key for approx. 2 sec. Repeat pressing the key until the setting screen for communication mode [ ] appears on the digital display.

Modular Type Air Filter Series AF

F 30 41 50 50 G 27 40 54 54 H 22 23 26 25 E 18 16 17 14 C 10 14 18 20 D 40 53 70 70 P 57 73 73 B 97 129 165 169 A 40 53 70 75 AFD20 AFD30 AFD40 AFD40-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specification Model With drain guide With barb fitting Metal bowl Metal bowl with level gauge B B 97 142 178 182 B B AFD20 AFD30 AFD40 AFD40-06 162 198 202 137 173 177 136 172 176 34

BP1000

47.0 2.35 01 59.7 Hastelloy is a registered trademark of Haynes International.

REC

RE A B Model Recommended Speed Controller REC Model Elbow type Straight type In-line type CX REC20 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 REC25 AS2201F-01-06-X214 AS2301F-01-06-X214 AS2001F-06-X214 CY REC32 AS2201F-01-06-X214 AS2301F-01-06-X214 AS3001F-08-X214 REC40 AS3201F-02-08-X214 AS3301F-02-08-X214 AS3001F-08-X214 MQQ M Courtesy of Steven Engineering, Inc.-230 Ryan Way

Series 10-, 21- AR-B Regulator, Series 10-, 21- ARK-B Regulator with Backflow Function

Model Option 10-/21-AR20(K)-B 10-/21-AR25(K)-B 10-/21-AR30(K)-B 10-/21-AR40(K)-B 10-/21-AR40(K)-06-B 10-/21-AR50(K)-B 10-/21-AR60(K)-B Bracket assembly Note 1) AR50P-270AS Note 2) AR20P-270AS Note 3) Note 3) AR25P-270AS AR30P-270AS AR40P-270AS Set nut AR20P-260S AR25P-260S AR30P-260S AR40P-260S 10: G49-10-01, 21: G49-10-01-MS-X3 Standard Pressure gauge Note 4) 10: G49-4-01, 21: G49-4-01

SMC has improved product performance and reliability with the redesigned SY series valve. The SY3000 and SY5000 have the same valve width as their predecessors, but the flow has been increased by up to 80%, allowing the valve size to be reduced. A built-in strainer in the pilot valve prevents trouble caused by foreign matter. By using H-NBR seal material for the main valve and seals, Ozone

Actuation: 1 (2-Position Single), Barrier: w/o Barrier, Electrical Entry: TT (Cable Type), Lead Wire Length: 30 (3000mm), Manual Override: Non-Locking Push, Port Size: 01 (1/8), Thread Type: T (NPTF), Bracket: F1 (w/Foot Bracket)

AZ1000

This detection method conforms to the SEMI standard F1. [Outboard leakage] Leakage rate from inside to outside of the products occurring when an internal pressure is more than the external pressure. This can be detected by pressurizing helium inside the products and detecting helium leaking outside from the products. This detection method conforms to the SEMI standard F1.

90

NPN 1 output ISE30A-01-N-ML Digital pressure PNP 1 output ISE30A-01-P-ML NPN 1 output/ Voltage output ISE30A-01-C-ML switch Note 3) NPN 1 output/ Current output ISE30A-01-D-ML Note 1) This is an assembly of the bracket and resin panel nut. Note 2) l in part numbers for a round type pressure gauge indicates a type of connection thread.

Speed Controller with One-touch Fitting

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS221F-01-01(S)A 1/8" 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS221F-01-03(S)A 5/32" 8.2 AS221F-01-07(S)A 1/4" 11.2 20.8 27.9 10 (9) AS221F-01-09(S)A 5/16" 13.2 22.4 29.5 14.2 11 (10) AS221F-02-01(S)A 1/8" 1/8 13 (12.7) 7.2 22.6 36.6 35 31.1 29.5 13.3 18 (19) AS221F-02-

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

Fitting plug KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 Dimensions L (mm) A Applicable fitting size d A L D Part number KQP-01 KQP-03 KQP-07 KQP-09 KQP-11 5 6 8.5 10 11.5 31.5 32 35 39 43 1/8 5/32 1/4 5/16 3/8 16 16 18 20.5 22 D Used to block unused cylinder port. L DIN rail AXT100-DR12.5 (Pitch) 5.25 7.5 Suffix number into from the dimension table below.

Stainless Steel One-touch Fittings Series KG

Mounting hole T(M) L1 L2 Nylon Urethane 1 8 KGE04-01 16 35 25 40 29 14 16 27.5 31 28 31.5 33.5 27.5 33 11 15 11 15 17 7.5 13 4 M12 1 13 5.6 5.6 14 1 4 KGE04-02 17 1 8 1 4 3 8 1 8 KGE06-01 KGE06-02 KGE06-03 KGE08-01 17 6 M14 1 13.1 13.1 17 15 17 19 26.1 18.0 28 27 48 17 1 4 KGE08-02 M16 1 8 18.5 17 19 3 8 KGE08-03 15 19 35 1 4 KGE10-02 34.5 36.5 41.5 29.5 53 67 12.5 14 10 21 M20 1 21 22 24

Series KG Stainless Steel One-touch Fittings

Mounting hole T(M) L1 L2 Nylon Urethane 1 8 KGE04-01 16 35 25 40 29 14 16 27.5 31 28 31.5 33.5 27.5 33 11 15 11 15 17 7.5 13 4 M12 1 13 5.6 5.6 14 1 4 KGE04-02 17 1 8 1 4 3 8 1 8 KGE06-01 KGE06-02 KGE06-03 KGE08-01 17 6 M14 1 13.1 13.1 17 15 17 19 26.1 18.0 28 27 48 17 1 4 KGE08-02 M16 1 8 18.5 17 19 3 8 KGE08-03 19 15 35 1 4 KGE10-02 34.5 36.5 12.5 14 41.5 29.5 53 67 10 21 21 M20 1 22 24

Speed Controller with Indicator Stainless Steel Type Elbow Type/Universal Type AS-FSG Series

Inch Size [mm] Model d T (R, NPT) H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M W1 W2 X Y Weight [g] Unlocked Locked Unlocked Locked AS221FSG-01-01 (S) 1/8" 7.2 12 19.1 26.2 19.1 43.9 42.4 40.8 39.3 13.3 20 21.5 6.5 15 13 (13) AS221FSG-01-03 (S) 5/32" 8.2 AS221FSG-01-07 (S) 1/4" 11.2 20.8 27.9 14 (13) AS221FSG-01-09 (S) 5/16" 13.2 22.4 29.5 14.2 15 (14) AS221FSG-02-01 (S) 1/8" 1/8 13 (12.7) 7.2

Speed Controller with One-touch Fitting Stainless Steel Type Elbow Type/Universal Type AS-FG Series Push-lock type

Inch Size [mm] Model d T H D1 D3 L1 L2 L3 L4 Note 1) A Note 2) M Weight [g] Unlocked Locked Unlocked Locked AS22l1FG-01-01(S)A 1/8" 7.2 12 19.1 26.2 19.1 30.6 29.2 27.5 26.1 13.3 9 (9) AS22l1FG-01-03(S)A 5/32" 8.2 AS22l1FG-01-07(S)A 1/4" 11.2 20.8 27.9 10 (9) AS22l1FG-01-09(S)A 5/16" 13.2 22.4 29.5 14.2 11 (10) AS22l1FG-02-01(S)A 1/8" 1/8 13 (12.7) 7.2 22.6 36.6 35 31.1 29.5 13.3 17 (18)

EXxx-OMU0020CN

Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01() 1 Valve 2, 3 diagnostics 01() 2 Valve 4, 5 diagnostics 01() 3 Valve 6, 7 diagnostics 01() 4 Valve 8, 9 diagnostics 01() 5 Valve 10, 11 diagnostics 01() 6 Valve 12, 13 diagnostics 01() 7 Valve 14, 15 diagnostics 01() 5.1.1.4.

LEC-OM02904

C 1. ##0016 ## 00 01 1 02 2 03 3 04 4 05 5 06 6 07 7 08 8 09 9 10 10 11 11 12 12 13 13 14 14 15 15 16 16 2. **No. 3.