Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Weight [g] LE-CA-1-B 270 LE-CA-3-B 520 LE-CA-5-B 870 LE-CA-8-B 1370 LE-CA-A-B 1710 LE-CA-B-B 2560 LE-CA-C-B 3400 U V W Red White Black Connector A2 terminal no. B-1 A-1 B-2 A-2 B-3 A-3 B-4 A-4 Connector D terminal no. 12 13 7 6 9 8 11 10 3 Signal Cable color Shield Brown Black Red Black Orange Black Yellow Black Vcc GND A A B B Z Z Connector B terminal no.

High Vacuum Angle Valve, XL Series

Valve side exhaust 29 Series XLS High Vacuum Angle Valve Dimensions (mm) 1in=25.4mm XLS/Without control power supply Grommet (G) D Conduit (C) J K 27010 E D G B C G(PF)1/2 Terminal (T) J K2 J H 29010 L 25 33 B C G(PF)1/2 DIN terminal (D) J K L C B F A 29.5 39 B C G(PF)1/2 6 to 9 22 A (mm) A B 104 L 48 62 C D F G H J E K 41 60 95 43 Model XLS-16G XLS-16C XLS-16D XLS-16T XLS-25G XLS-

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

Environment

PB H thread depth C Vent hole Note 3) J PC EV Z T M U D K Note 2) L R 4 x O1 thread depth R W A + Stroke B + Stroke S EH M 6 x MO thread depth MR XA H9 depth XA MH Section XX details MA ML + Stroke MC MD Section XX XB XA H9 XA [mm] Incremental encoder Absolute encoder B C D EH EV Without lock With lock Without lock With lock A W Z A W Z A W Z A W Z Size Stroke range [mm] 25 15 to 100 238

MNB

B Z + Stroke DB DX DD 90 B 4-DT A DS DH 4-DR DL DU DO DO DC DE DU DA Rotating Angle Bore size (mm) Part no.

MNB

B Z + Stroke DB DX DD 90 B 4-DT A DS DH 4-DR DL DU DO DO DC DE DU DA Rotating Angle Bore size (mm) Part no.

CY1

B Counter bore depth C CB HA 2-P (piping port) 4-J x E (depth) HT 2 x 4-MM thread depth M T T Y HP L TC F X WP GW QW PW GP D 4-LD W K WS With switch rail Plug HS G Q + Stroke CR HR Z + Stroke (Area E) for CY1RG25, 32, 40, 50, 63 2-P (piping port) 22 8 14 12.5 19.5 13 30 Plug 2-P (piping port) 12.5 CY1RG10 CY1RG15 (mm) CB CR B C D G GP GW H HA HB HC HP HR HS HT J x E K F Model CY1RG10 2 0.5

Guide Cylinder Series MGG ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

C 4-O D T 2-P Q E B U W S K L Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com AA I A R AP AB Y + Stroke X J V Z + Stroke AC AD 8-AF AE Stroke range (mm) Bore size (mm) AF AE AD AC AB AA G F N E M D L C K B J AP H I A 20 30 75 16.5 11 12 5.5 45 92 25 60 80 24 60 108

AR20-B to AR60-B

mounting dimensions A (Port size) Y W C B Q V K OUT OUT IN IN Z Plate thickness AR20(K)-B to AR30(K)-B: Max. 3.5 AR40(K)-B : Max. 5 R F P2 S (Pressure gauge port size) Bracket (Option) U M J D T N AR50(K)-B/AR60(K)-B 2 x P1 A (Port size) B Q C K OUT IN R F P2 S (Pressure gauge port size) Bracket (Option) T N J M D U 75 Regulator AR10-A Series Regulator AR20-B to AR60-B Series Regulator with

Modular Type Lubricators Series AL

Clearance For Maintenance W E G A AC-B AA M J N F (2) P1 (Port Size) C B Q Q V IN OUT K P2 (Gauge Port Size) Bracket and Relief Valve (Optional) U Min.

MNB

B Z + Stroke DB DX DD 90 B 4DT A DS DH 4DR DB DU DO DO DC DE DU DL Rotation (mm) No.

Electric Actuator with Integrated Guide

(B contact) 3 wire GXL-N12FTB Switch specifications (SUNX Corporation) GXL-N12FT(B) Part no.

Mechanical Valves Series NVM, NVFM, NVZNI

F . 4 6 3 l b s . ( 2 1 k o ) P.T. 0 216 in, (5 5mm) or, 0 039 in (1mm) T T 0 256 in (6 smm) .75 PS|G (5 tuffi 2way 3 way F O F 3.31 lbs (1 5 kg ) T T 900 '75 PSIG (5 Kgf/cm2) A B c D E F G H J K A B c D E F G H J K M N 2.64 (67) 1.95 49.s) 0.96 '24.5) 0.69 '17.5)0.06 (1.s) 0.12 (3) 1.57 (40) 0.96 (24.5) 1.20 130.5) 0.24 (6) 3.31 (ul 2.09 (53) 1 . 1 0 (24\ 1.22 (31) 0.06 (1.5) 0.12 (3) 1.57

IIIIIII

F . 4 6 3 l b s . ( 2 1 k o ) P.T. 0 216 in, (5 5mm) or, 0 039 in (1mm) T T 0 256 in (6 smm) .75 PS|G (5 tuffi 2way 3 way F O F 3.31 lbs (1 5 kg ) T T 900 '75 PSIG (5 Kgf/cm2) A B c D E F G H J K A B c D E F G H J K M N 2.64 (67) 1.95 49.s) 0.96 '24.5) 0.69 '17.5)0.06 (1.s) 0.12 (3) 1.57 (40) 0.96 (24.5) 1.20 130.5) 0.24 (6) 3.31 (ul 2.09 (53) 1 . 1 0 (24\ 1.22 (31) 0.06 (1.5) 0.12 (3) 1.57

SMC Basic Pneumatics

Supply NC output NO output Exhaust of NC exhaust of NO Pilot tor NC Pilot for NO P A B R s z Y P A B R1 R2 z Y P A B EA EB PA PB 1 2 4 3 5 1 2 1 4 Table 7.2 Typical port identitications M O N O S T A B L E A N D B I S T A B L E Spring returned valves are monostable. They have a defined prefened position to which they automatically retum.

%silltr

Supply NC output NO output Exhaust of NC exhaust of NO Pilot tor NC Pilot for NO P A B R s z Y P A B R1 R2 z Y P A B EA EB PA PB 1 2 4 3 5 12 1 4 Table 7.2 Typical port identitications M O N O S T A B L E A N D B I S T A B L E Spring returned valves are monostable. They have a defined prefened position to which they automatically retum.

Clamp Cylinder with Lock Series CLK1

(Example) CLK1GA50-100Y-B None Single knuckle joint Double knuckle joint None With limit switch mounting base With dog fitting With pedestal (for 75, 100, 150 strokes only) Nil B D K Note 2) Port position Note 1) Accessories (options) are not available with 32. Cylinder type Note 2) Clevis width B (19.5mm) is not available with mounting base K.

Sine Cylinder Series REC

Stroke Z + Stroke S + Stroke H FT B (mm) A AL B B2 F FL G H D B1 FT FX FY FZ E Bore (mm) FX 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 20, 25, 32 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 S ZZ Z MM N NA NN P H1 H2 I K KA Bore (mm) 20 M20 x 1.5

Sine Cylinder Series REC

Stroke Z + Stroke S + Stroke H FT B (mm) A AL B B2 F FL G H D B1 FT FX FY FZ E Bore (mm) FX 0 -0.033 0 -0.033 0 -0.033 0 -0.039 20 18 15.5 34 26 13 8 13 10.5 10 41 4 60 75 20 25 22 19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 20, 25, 32 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 S ZZ Z MM N NA NN P H1 H2 I K KA Bore (mm) 20 M20 x 1.5

Cylinder with Lock

Trunnion pivot bracket TZ TX TO TO Z + 1/2 stroke TD TY2 TY1 B 4 x TT TS TH TF TC B 2 x TR TA TL TU TU With Rubber Bumper [mm] [mm] Bore size Z Part no.