XL

msec T msec 600 600 Bellows seal 400 400 200 200 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve type XLD Normally closed Model Exhaust Initial exhaust valve 1200 1200 1000 1000 800

A

Model A B C D E F G H J NAR425 80 141 37 67 71 (72) 3 50 48 80 B24 NAR625 98 152 40 78 76.5 (77.5) 7 87 52 90 B25 NAR825 126 217 75 110 92.5 (93.5) 5 NAR925 160 242 89 140 107.5 (108.5) 10 H O W T O O R D E R P I L O T O P E R AT E D P R E S S U R E R E G U L AT O R 25 (N)AR Japanese N North American O P T I O N S B O D Y S I Z E B Bracket G Gauge 4 1/2 6 1 8 1 1/2 9 2 P O R T S I Z E 25

VFS

In the case of w/ Z, enter ZP.

C95Series

B TA ~ TL TU TC TX TE TO TR n TS TH TF Z " TOH10 MB-S03 32 46 62 45 8.5 62 50 74 12 7 13 10 35 47 89 12 g.070 MII-S04 40 52 80 60 10 80 63 97 17 9 17 12 45 60 93 16 +8-070 50 65 80 60 10 92 75 109 17 9 17 12 45 60 105 1 6gmo Mounting plate (Double clevis) MII-S06 63 75 100 70 15 11 0 90 130 20 11 22 14 60 80 105 201.084 80 95 100 70 15 130 11 0 150 20 11 22 14 50 80 129 20 1 1)84 Ma,510

High Rigidity Slider Type Ball Screw Drive/11-LEJS Series

11LEJS 800 800 1500 1500 m Me L3 [mm] L3 [mm] L3 [mm] L3 [mm] 600 600 L3 25A1000 1000 Z 400 400 500 500 LEC 200 200 0 0 0 0 LEC S 0 10 5 15 20 0 10 5 15 20 30 25 0 10 40 50 20 30 0 10 40 50 20 30 60 70 80 Work load [kg] Work load [kg] Work load [kg] Work load [kg] LEC SS-T 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000 mm/s2 5000 mm/s2 or less is same as 5000

Electric Actuator with Integrated Guide

Tact time Moving distance: _mm t = Tact time: _s s = Cycle time: _s Time t s z x Example) Projection distance x: _mm y: _mm z: _mm Work piece moment y Environment General, Clean room, Mist environment, Dusty environment 94 98 Series LTF Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

•

"'t I( r: i-: 1 \ W 'll f:: l '-'; I Q c...::; I ~"~ ...Ab.. ,..;= ~ -LK F N -H S + Stroke .!'!. FT ZZ1 +t+ Stroke Z Z t Stroke (mm) .. ,.,.,." .".

CG5-S

, 100 80, 100 e t q o i r y t !

CRQ2

2 @1 e u o t @3 !8 @0 @0 @2 !4 !7 !1 !9 !2 @1 @4 e u o t @3 !8 @0 @0 @2 q w r @5 y !5 !6 i q w r @5 y !5 !

100

ZL1 Series RoHS How to Order ZL 1 12A Without valve ZL 1 5 M Z D A M L 12A K1 With valve Max. suction flow rate: 100 L/min (ANR) q w t o u i e r y !0 !1 !

Mechanically Jointed Rodless Cylinder Series MY2H/HT ø16, ø25, ø40

Wall mounting z y Features 4 Wb: MGGLB25-200 (4.35kg) x y x z Wa: Connection plate t =10 (880g) MY2H40G-500 3. Ceiling mounting Features 4 4.

High Vacuum Angle Valve, XL Series

msec T msec 600 600 Bellows seal 400 400 200 200 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size XLF Normally closed XLG Double acting (dual operation) Valve type Model 140 140 120 120 100 100 80 80 T msec T msec T msec O-ring seal 60 60 40 40 20 20 0 0 16 25 40 50 63 80 16 25 40 50 63 80 Size Size Valve type XLD Normally closed Model Exhaust Initial exhaust valve 1200 1200 1000 1000 800

SY

) With "Z", only positive common specification is available.

LEC-OM07605CN

(b) () () t t [Hz] [Hz] [Hz] [Hz] 3. 7.1.6 3 4.5Hz2250Hz [Pr. PB45 ] ()150ms (1) t t 7 12 7. (2) Pr. PB45 ] [Hz] [Pr.

Mechanically Jointed Rodless Cylinder Series MY3 ø16, ø25, ø40, ø63 1

orientation Ceiling m2 Wall m3 Vertical m4 Horizontal m1 Note) M3 Static load m M1 m1 x g x X m2 x g x X m4 x g x Z M1 Static moment z y Y m1 x g x Y m2 x g x Y m3 x g x Z M2 Z m3 x g x X m4 x g x Y M3 m4 x g Note) m4 is a mass movable by thrust.

V

O O R D E R S E R I E S V Q Z 1 0 0 / 2 0 0 / 3 0 0 B A S E M O U N T E D P L U G L E A D T Y P E 5 VQZ P O R T S I Z E {2(A) P O R T} : VQZ100 Symbol Port Size CP Without Sub-Plate 01 Rc(PT)1/8 S E R I E S 1 VQZ100 Body Width 10mm 2 VQZ200 Body Width 15mm 3 VQZ300 Body Width 18mm P O R T S I Z E {4(A), 2(B) P O R T} : VQZ200/300 Symbol Port Size Without Sub-Plate (VQZ1000/2000/3000) 01 Rc

Solid State Auto Switches

Applicable Cylinders Weight (g) Cylinder series Bore size (mm) D-G5NB Auto switch model CDM2-Z, CDM2, CDBM2, CDVM3, CDVM5, CDLM2, CDLG1, MLGC CDG1-Z, CDG1 CDA2-Z, CDA2, CDBA2, CDV3, CDVS1, CDL1 MGC, MGG 20, 25, 32, 40 3 m (L) 79 Lead wire length 20, 25, 32, 40, 50, 63, 80, 100 5 m (Z) 125 40, 50, 63, 80, 100 20, 25, 32, 40, 50 Operating Range Bore size (mm) 20 Cylinder series 35 25 40 32

SYJ300/500/700

Power saving circuit is only available in the "Z" type.

MHZ

Weight (g) End boss type (Symbol) Model E W K M Double acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 12-2-69

MHZ

Weight (g) End boss type (Symbol) Model E W K M Double acting Single acting MHZL2-10 70 70 80 80 80 MHZL2-16 170 170 180 180 180 MHZL2-20 310 310 330 330 330 MHZL2-25 535 535 580 580 580 12-2-69