1

Dimensions Double acting, Single rod Single acting, Spring return Single acting, Spring extend Z + Stroke H + Stroke Z Z Z Double acting Single acting (Spring return) Single acting (Spring extend) Action F H F H Without switch With switch Without switch With switch Without switch With switch Bore size (mm) 5 10 15 5 10 15 5 10 15 5 10 15 6 8 9 42 42 9 8 47 52 57 47 52 57 52 62 67 52 62 67

Aluminum High Vacuum Angle Valve

to 60C Heater With 100C heater With 120C heater D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// H0 H4 H5 High temperature type 5 to 150C Solid state auto switch Note) Size 25 is not applicable for H4.

LJ1H

Left Top Bottom 2 3 4 5 2m 3m 4m 5m Axial entry Right entry Bottom entry Specifications Intermediate strokes 100 5.2 200 6.0 300 6.8 400 7.5 500 8.3 5 to 40 (with no condensation) 10 74 600 mm kg C kg N mm/s mm Standard stroke For manufacture of strokes other than the standard strokes on the left, add "-X2" at the end of the part number.

Air Cylinder

N Rubber bumper 100 CG1 25 B S Z N CDG1 With auto switch M9BW 100 B 25 N S Z With auto switch (Built-in magnet) Number of auto switches Rod end thread Mounting Nil Male rod end F Female rod end Nil 2 pcs. S 1 pc. n n pcs.

Series 10-SY3000/5000/7000/9000 5 Port Solenoid Valve

(EA)5 1 (P) 3(EB) 3 position exhaust center 2(B) (A)4 4 (EA)5 1 (P) 3(EB) Air Preparation Equipment Pressure Control Equipment Flow Control Equipment Pressure Switches/ Pressure Sensors 3 position pressure center 2(B) (A)4 Light/Surge voltage suppressor 5 Electrical entry for D, Y (10-SY500/7000 only) Electrical entry for G, H, L, M, W (EA)5 1 (P) 3(EB) Nil S Z Nil S Z R U Without light/surge

CRB2/CRBU2/CRB1

CRB1 (mm) d1 = d1 = Q1 = M Q1 = M d1 (mm) Shaft type Size 50 63 80 100 J X Z Size Shaft type 50 S Y S Y S Y S Y 4 to 5 Thread 63 4.2 4.2 4.2 4.2 L1 = M5 x 0.8 4 to 6 L1 = Q1 Q1 80 5 5 5 M6 x 1 4 to 6.5 L1 100 6.8 M8 x 1.25 5 to 8 S axis Y axis J axis Z axis L1 Symbol: A43 Symbol: A44 Applicable to single vane type only A special end is machined onto both the long and short shafts, and

Rotary Actuator

LL LL Key dimensions [mm] Size Key dimensions LL 30 3 x 3 x 14 3 50 5 x 5 x 25 5 63 6 x 6 x 30 5 80 6 x 6 x 40 5 100 8 x 7 x 45 5 D215 CRA1 Series Symbol Shaft Pattern Sequencing2 -XA33 to -XA59 Applicable shaft type: X, Z, T, J, K How to Order C RA1 Z X D B J 50 90 M9BW A33 A34 C8 C30 Number of auto switches Magnet Nil 2 pcs. S 1 pc.

Table of Contents

(mm) d1 = d1 = Q1 = M Q1 = M d1 (mm) Shaft type Size 50 63 80 100 J X Z Size Shaft type 4 to 5 50 S Y S Y S Y S Y Thread L1 = L1 = 4 to 6 63 M5 x 0.8 4.2 4.2 4.2 4.2 4 to 6.5 Q1 Q1 80 M6 x 1 5 5 5 L1 5 to 8 100 M8 x 1.25 6.8 S axis Y axis J axis Z axis L1 Symbol: A43 Applicable to single vane type only Symbol: A44 Applicable to single vane type only A special end is machined onto both

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) d1 = d1 = Q1 = M Q1 = M d1 (mm) Shaft type Size 50 63 80 100 J X Z Size Shaft type 4 to 5 50 S Y S Y S Y S Y Thread L1 = L1 = 4 to 6 63 M5 x 0.8 4.2 4.2 4.2 4.2 4 to 6.5 Q1 Q1 80 M6 x 1 5 5 5 L1 5 to 8 100 M8 x 1.25 6.8 S axis Y axis J axis Z axis L1 Symbol: A43 Applicable to single vane type only Symbol: A44 Applicable to single vane type only A special end is machined onto both

Rotary Actuator Vane Style Series CRB2 Size: 10, 15, 20, 30, 40 1

(mm) d1 = d1 = Q1 = M Q1 = M d1 (mm) Shaft type Size 50 63 80 100 J X Z Size Shaft type 4 to 5 50 S Y S Y S Y S Y Thread L1 = L1 = 4 to 6 63 M5 x 0.8 4.2 4.2 4.2 4.2 4 to 6.5 Q1 Q1 80 M6 x 1 5 5 5 L1 5 to 8 100 M8 x 1.25 6.8 S axis Y axis J axis Z axis L1 Symbol: A43 Applicable to single vane type only Symbol: A44 Applicable to single vane type only A special end is machined onto both

CJ2

(mm) MM NA NN S T Z Bore LZ LY LX LT LH LC LB H GA F D A Y X 6 15 M3 X 0.5 16 M6 X 1.0 61 (66) 3 117 (122) 1.6 9 4.5 32 15 16.5 28 24 14.5 8 3 7 5 10 16 32 16.5 24 1.6 9 4.5 15 28 8 8 4 15 12.5 7 5 49 42 M4 X 0.7 12.5 M8 X 1.0 9 105 25 33 2.3 14 5.5 23 28 8 8 5 15 6 50 M5 X 0.8 M10 X 1.0 106 ( ) in S or Z dimensions: With auto switch With air cushion Dimensions not mentioned in the below

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

voltages of AC : SY100-30-3ANil S Z R U 5 6 V S R 1 2 Without light/surge voltage suppressor With surge voltage suppressor With light/surge voltage suppressor Power saving circuit is not available in the case of W type.

Hydraulic

/4"(6.3) rubber hose 10 Cylinder bore size 20 9 8 7 6 5 6 5 4 (steel pipe I.D.) 4 3 2 7 6 5 4 3 2 20 30 40 50 60 80 100 200 300 400 500 2.8 Flow velocity inside pipe (m/s) Piston speed (mm/s) How to read the chart: Example) The required flow rate necessary to operate a 50 cylinder at a speed of 100mm/s is 12l/min.

Free Mount Cylinder

25 30 38 48 5 6 8 10 M3 x 0.5 M4 x 0.7 M5 x 0.8 M6 x 1.0 M8 x 1.25 M10 x 1.25 4 9 9 13.5 2 4.5 4.5 4.5 3.5 5 5 5 With auto switch S Without auto switch Bore size (mm) 5 st 38 41 45 41 45 47 S Z Z 10 st 43 46 50 46 50 52 15 st 48 56 60 56 60 62 5 st 56 62 66 65 73 79 10 st 66 72 76 75 83 89 15 st 76 87 91 90 98 104 5 st 38 41 45 51 55 57 10 st 43 46 50 56 60 62 15 st 48 56 60 66 70 72 5

ISO Cylinder

12 5 28 13.4 M4 x 0.7 19 6 15 12 7 16 10 12 M12 x 1.25 4 M5 x 0.8 12 5 28 14.2 M4 x 0.7 19 6 15 12 7 16 12 16 M16 x 1.5 6 M5 x 0.8 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 16 16 M16 x 1.5 6 M5 x 0.8 17 6 38 14.2 5 M6 x 1 24 8 18.3 16 10 22 20 20 M22 x 1.5 8 G1/8 20 8 44 17 6 M8 x 1.25 32 11 24 22 13 24 25 22 M22 x 1.5 10 G1/8 22 8 50 20 8 M10 x 1.25 32 11 30 22 17 28 Bore size S Z 1 to

Compact 5-Port Solenoid Valve

V S V V R V *1 Can be selected when the pilot, silencer type symbol is Nil or S Not available for R type * The 3/5(E) port is plugged for the built-in silencer type.

CM2

Z Z S S Z S S ZZ ZZ ZZ ZZ Z 20 6 21.5 25 20 158 112 143 183 133 137 87 168 193 6 24.5 32 25 162 112 147 187 137 137 87 172 197 6 27 40 32 164 114 149 189 139 139 89 174 199 164 214 224 8 32.5 40 138 179 168.5 163 113 204 229 188 243.5 254 193.5 218.5 213 268.5 279 6-4-49 50 Series CM2 Clevis Integrated Style (E) CM2E Bore size Stroke S T Spring return S + Stroke Z + Stroke ZZ + Stroke

Environment

(The lock cable is included when the motor with lock option is selected.) *7 Standard cable entry is (A) Axis side. i Cable length [m]*5, *8 o Driver type*5 25A25ANil Without cable 2 2 5 5 A 10 Compatible driver Power supply voltage [V] Nil Without driver A1 LECSA1-S 100 to 120 A2 LECSA2-S 200 to 230 B1 LECSB1-S 100 to 120 B2 LECSB2-S 200 to 230 C1 LECSC1-S 100 to 120 C2 LECSC2-S 200 to

CXS

stick-slip even at 5 to 50mm/s.

Proposals for Energy Saving

1 32A 40A 50A Class B Class H G C D, T G, C S T Note) S L, Z S L, Z Thread AC Flange DC Note) Surge voltage suppressor is attached to the lead wire.