HRX-OM-Q033

Contact output signal 1 selected alarm ---(AL.01) Contact output signal 2 function RMT Contact output signal 2 operation A Contact output signal 2 selected alarm ---(AL.01) Contact output signal 3 function ALM Contact output signal 3 operation B Contact output signal 3 selected alarm ---(AL.01) 1: Regarding the detail of the default setting, refer to each reference page. 1.4 Parameters

HRX-OM-T004

Contact output signal 1 selected alarm ---(AL.01) Contact output signal 2 function RMT Contact output signal 2 operation A Contact output signal 2 selected alarm ---(AL.01) Contact output signal 3 function ALM Contact output signal 3 operation B Contact output signal 3 selected alarm ---(AL.01) 1: Regarding the detail of the default setting, refer to each reference page. 1.4 Parameters

HRX-OM-R028

Contact output signal 1 selected alarm ---(AL.01) 1 Contact output signal 2 function RMT Contact output signal 2 operation A Contact output signal 2 selected alarm ---(AL.01) 1 Contact output signal 3 function ALM Contact output signal 3 operation B Contact output signal 3 selected alarm ---(AL.01) 1 1: Regarding the detail of the default setting, refer to each reference page. 1.4 Parameters

HRX-OM-X071

signal 1 alarm AL.01 AL.01 to AL.32 D.OUT1 ALARM CODE No.15 screen Contact output signal 1 maintenance MT.01 MT.01 to MT.05 D.OUT1 MANT CODE No.16 screen Contact output signal 2 function RMT 1 D.OUT2 SEL No.17 screen Contact output signal 2 operation A A/B D.OUT2 TYPE No.18 screen Contact output signal 2 alarm AL.01 AL.01 to AL.32 D.OUT2 ALARM CODE No.19 screen Contact output signal

HRX-OM-W004

HRX-OM-W004-H Operation Manual Communication function Thermo-chiller Air-Cooled Water-Cooled refrigerated type refrigerated type HRR010-A-10HRR012-A-10HRR018-A-10HRR010-A-20HRR012-A-20HRR018-A-20HRR024-A-20HRR030-A-20HRR050-A-20HRR050-A-40HRR010-W-10HRR012-W-10HRR018-W-10HRR010-W-20HRR012-W-20HRR018-W-20HRR024-W-20HRR030-W-20HRR050-W-20HRR050-W-40Keep this manual available whenever necessary

HRX-OM-W002

Table 3-1 Amount of radiation and required ventilation Required ventilation amount (m3/min) Heat Differential temp. of 3 C between inside Differential temp. of 6 C between inside radiation Model (kW) and outside of and outside of installation area installation area HRR012-A-10/20Approx.2 40 20 HRR018-A-10/20Approx.4 70 40 HRR024-A-10/20Approx.5 90 50 HRR030-A-10/20Approx.6 100 60 3.2 Installation

HRX-OM-X084

For a facility having a large installation area (that can vent the air naturally): Make an air outlet on a wall at a high level and air inlet on a wall at a low level, to allow for adequate airflow. 2. For a facility having a small installation area (that can not vent the air naturally): Make a forced air exhaust vent on a wall at a high level and an air inlet on a wall at a low level.

KP/KPQ/KPG

D2 A L2 H Connection threads Union Tee: KPQT, KPGT (M5) H (width across flats) Effective area mm D1 Model L1 TPH TPS A 2-Applicable tubing Note 1) Applicable tubing O.D. mm Connection threads R (M5) Weight g M L2 D2 M L1 M L1 8 10 14 8 10 14 12 14 KPQT04-M5 KPQT04-01 KPQT04-02 KPQT06-M5 KPQT06-01 KPQT06-02 KPQT08-01 KPQT08-02 KPQT10-02 KPQT10-03 KPQT12-03 KPQT12-04 KPGT04-M5 KPGT04-01 KPGT04

0.4

Note 4) Dual 3-port type is not applicable. 2 2-position double (Rubber) 4-position dual 3-port valve (C) 2(B) 4(A) 2(B) (A)4 Note) C C: Locking type (Manual) (R1)5 1 (P) 3(R2) 1(P) 5(R1) 3(R2) N.C. N.O.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

A External pilot type R (2) B C A Note 1) Option Note 2) For details about external pilot specifications, refer to page 4-14-40.

EXxx-OMW0014CN

OFF 8 V 4 PNP (C/Q) 0.25 A ( US1 ) 57 No.EX-OMW0014CN-A 9.3.

VM

only) 0.5 MPa supply L Model A 1.5 mm P.T. 20 N F.O.F. 7.5 VM120-01-00 VM130-01-00 32.5 1.5 mm O.T. 3.5 VM121-01-00 VM131-01-00 28.5 2-4.6 mounting hole 3.0 mm T.T.

AC Servo Motor Driver (Network card type ）

Model A B C Accessory fittings Clamp fitting L AERSBAN-DSET 100 86 30 Clamp A: 2pcs. A 70 AERSBAN-ESET 70 56 Clamp B: 1pc. B 45 11 25 11.

V

V A C U U M S W I T C H S E R I E S ZSE1 ZSE1--55 ZSE1 L Switch Type 55L E L E C T R I C A L E N T R Y Grommet (24) L Grommet (120) C w/Plug Connector (24) CL w/Plug Connector (120) CN Plug Type (w/o Lead) C O N N E C T I O N 00 NZM Ejector Mounting 01 1 8 PT T1 1/8 NPTF ACCESSORIES V A C U U M S W I T C H S E R I E S ZS S W I T C H T Y P E Interface plate for ZM Ejector P31806-01 (blank

ARM10/11

AV SMC K P C U O S L H AU 5 3 AF A-A A 2 6 AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR A 4 VEX 8 F AMR E D ITV H 10 B IC 11 VBA 7 1 SMC VE C J VY1 A G 9 PPA G AL Component Parts Replacement Parts No. Material Part no. No.

ARM10/11

AV SMC K P C U O S L H AU 5 3 AF A-A A 2 6 AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR A 4 VEX 8 F AMR E D ITV H 10 B IC 11 VBA 7 1 SMC VE C J VY1 A G 9 PPA G AL Component Parts Replacement Parts No. Material Part no. No.

3-Screen Display High-Precision Digital Pressure Switch ∗1 ® New New The ∗1  Excluding the Z/ISE20B-L compatible type has been added to the 20B series.

B C For vacuum pressure 0.0 to 101.0 kPa 10.1 kPa 0 101.0 kPa Analog output [mA] 5 20 Analog output [V] For compound pressure 100.0 to 100.0 kPa 100.0 kPa 100.0 kPa For positive pressure 0.100 to 1.000 MPa 0.100 MPa 0 1.000 MPa 0.100 to 2.00 MPa 0.100 MPa*1 0 2.00 MPa 1 4 *1 Analog output is 0.8 [V] or 3.2 [mA] at the pressure A. 0.6 2.4 B A C B A C Pressure Pressure Functions Sub screen

Mist Separator Regulator

Rc C2SF-2J-A G C2SFF-2J-A NPT C2SFN-2J(Z)-A Rc G NPT C2SF-2(Z)-A C2SF-2-A Appearance and part No. -14- C Note 1) C Note 1) Option symbol Semi-standard symbol 6 C 6C Semi-standard: C Semi-standard: Piping port thread ty pe Piping port thread ty pe (9) Part No. (9) Part No. Rc G NPT AD27-C(Z)-D Rc G NPT AD27(-Z)-D AD27-C-D AD27-D Appearance and part No.

Ｍ icro Mist Separator Regulator

Rc C2SF-2J-A G C2SFF-2J-A NPT C2SFN-2J(Z)-A Rc G NPT C2SF-2(Z)-A C2SF-2-A Appearance and part No. -14- C Note 1) C Note 1) Option symbol Semi-standard symbol 6 C 6C Semi-standard: C Semi-standard: Piping port thread ty pe Piping port thread ty pe (9) Part No. (9) Part No. Rc G NPT AD27-C(Z)-D Rc G NPT AD27(-Z)-D AD27-C-D AD27-D Appearance and part No.

JXCx-OMT0061CN

B RESET 72 - <>+JOG <>+1-052 B RESET <> 1-096 C RESET <> (1-097) <> C RESET <> <>OFF JOG OFF 1-098 OFF DRV C RESET <>ON SVRE ON DRIVE ON 1-099 <> SETOFF DRV C RESET <> <>1 2 (1-103) C RESET 1 [] A [a ] [] A [a ] 2 [SW] <> <> ( (1-106) RESET SVON ) C <>1 <> <> 1-144 RESET SVON D 73 - <> ON <>(M24V) 1-145 RESET SVON (1) D <> <> <> 1-146 RESET SVON