MY1

M2 M3 m2 m3 16 20 25 32 40 50 63 16 20 25 32 40 50 63 6.0 3.0 1.0 18 7 2.1 10 5.2 1.7 26 10.4 3 15 9.0 2.4 38 15 4.5 MY1MW 30 15 5.0 57 23 6.6 59 24 8.0 84 33 10 115 38 15 120 48 14 140 60 19 180 72 21 6.0 3.0 2.0 18 7 2.1 10 5.0 3.0 25 10 3 15 8.5 5.0 35 14 4.2 30 14 10 49 21 6 MY1CW MY1B 60 23 20 68 30 8.2 115 35 35 93 42 11.5 MY1H 150 50 50 130 60 16 The above values are the maximum allowable

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

16.4 20.4 25.5 QW 66 98 110 NV 4.5 6.6 9 NX 7.3 10.5 14 PP 5.3 8 16 Model MY2HT16G MY2HT25G MY2HT40G U 5 6 8 UU 3 4.4 2 VV 10.5 15.3 29 X 7 9 12 XX 12 14 23 Y 5 8 12 Z 160 210 330 Model MY2HT16G MY2HT25G MY2HT40G P indicates cylinder supply ports.

VZS

Other dimensions are the same as the grommet type. 3-7-14 15 Series VZS2000 Manifold Specifications Refer to page 3-7-4 for wiring specifications. Plug-in Type: Stacking Type Manifold Base with D-sub Connector Wide range of interchangeability (D-sub connector (25P) conforming to MIL standard) Quick wiring permits easier installation.

e-Rodless Actuator

M2 M3 m2 m3 16 25 16 25 5 4 3.5 18 16 14 E-MY2C 13 14 10 35 35 30 7 6 7 15 13 13 E-MY2H 28 26 26 32 30 30 The above values are the maximum allowable values for moment and load weight. Refer to each graph regarding the maximum allowable moment and maximum load weight for a particular slide table speed.

RB/RBL/RBQ

14 16.2 16.2 4 4 MK(2) Note) L, LL and S dimensions of RBL(C)1007/1006 are different from those of RB(C)1007/1006.

Thermo-chiller

If the voltage increase ratio (dV/dt) at the zero cross should exceed 40 V/200 sec., it may result in malfunction. 4 min 6 min 10 min 14 min 20 min 30 min 2 min 1 min Max.

VFA3000

port) 3 (Breathing port) 5 x , 14 38 (Piping port) 5 x , 14 38 (Piping port) 3 position closed center/exhaust center/pressure center: VFA3 40-X1 3 4 5 02 03 2 x 4.3 2 x 18 (Mounting hole) (Pilot port) Breathing port 5 x , 38 14 (Piping port) 1766 5 Port Air Operated Valve Series VFA5000 How to Order Port size 02 03 1 4 3 8 Body ported VFA5 1 20 03 Base mounted VFA5 1 44 03 1(P) port location

HRS100/150

Cooling Capacity HRS100-A-20/40(50 Hz) HRS100-A-20/40(60 Hz) 14 14 12 12 Ambient temperature 32C Cooling capacity [kW] Cooling capacity [kW] 10 10 Ambient temperature 40C Ambient temperature 32C Ambient temperature 40C 8 8 6 6 4 4 Ambient temperature 45C Ambient temperature 45C 2 2 0 0 5 10 15 20 25 30 35 5 10 15 20 25 30 35 Circulating fluid temperature [C] Circulating fluid temperature

High Precision Digital Pressure Switch, Series ZSE50F/ZSE60F, ISE50/ISE60

Normal operation Value clear Initial setting P.14 Adjust the zero point of atmospheric pressure. Detects and displays pressure and operates switch. Set "Output mode", "Response time" and "Auto/ Manual mode." Auto preset P.14 P.16 The pressure set point is calibrated automatically at the time of adsorption or primary pressure confirmation.

3 Port Solenoid Valve

With the 0.1 W specification, the vibration and impact resistance is 10/50 m/s2 or less. Note 3) With the low vacuum specification, the operating pressure range is 1.33 102 Pa to the maximum operating pressure.

Dedicated Controller

to 9800mm/s2 Note) Note) There are cases in which the position, speed and acceleration designations are not realized, depending on the actuator that is connected and the operating conditions.

JXCx-OMT0028CN

0255 15 0255 4 16 0255 17 0255 ID1 18 (ID=1) 19 ID2 2039 ID1 ID3 4059 ID1 ID4 6079 ID1 ID5 8099 ID1 ID6 100119 ID1 ID7 120139 ID1 ID8 140159 ID1 ID9 160179 ID1 ID10 180199 ID1 ID11 200219 ID1 ID12 220239 ID1 240249 250253 254,255 (GW [IN Data] Address.14 Address.17) 4 codeAddress.14 Address.14 Address.17 ) Address.15 Address.14 (code:1-148) 00h 94h 15bit 8bit 7bit 0bit

PSE530/200

SET To measuring mode 16-3-14 14 Series PSE530/200 Multi-channel Controller/Pressure Sensor Operation 3: Special Setting 1 Precision indicator setting Refer to A Display calibration function on page 16-3-17 for details. Calibration mode + SET MPa Measuring mode kPa Press and hold for 2 seconds or longer.

3 Port Solenoid Valve SYJ300/500/700 Series

-3 Manifold gasket DXT201-14-2 Manifold gasket DXT201-14-1 Applicable base sub-plate SS3YJ7-40 SS3YJ7-41 SS3YJ7-42 SS3YJ7-41R SS3YJ7-42R Manifold base Applicable base SS3YJ7-20 SS3YJ7-21 SS3YJ7-21R Manifold base 18 18

10

For air gripper and auto switch precautions, refer to the Handling Precautions for SMC Products and the Operation Manual on the SMC website: http://www.smcworld.com Refer to pages 12 to 14 for cylinders with auto switches.

AC Servo Motor Driver (SSCNET Type)

Parameter Configuration using Setup software (MR Configurator2TM) . 14 6.1 Setup software (MR Configurator2TM) .14 6.1.1 Installation Method . 14 6.2 Basic driver set-up for Initial Test Drive .14 6.2.1 Start up the Setup software (MR Configurator2TM) . 15 6.2.2 System Settings . 16 6.2.3 Model Selection . 16 6.2.4 Driver ON LINE Check . 17 6.2.5 Help Function . 17 6.3 Parameter setting (

AC Servo Motor Driver (SSCNET /H Type)

Acceleration/deceleration time (ms) = {3000 (r/min) 60 (S) } 8 (mm) 1000 3000 (mm/s2) 133 (ms) Speed at a rated motor rotation of 3000rpm Accel/decel time (ms) = {Rated Rotation Speed (r/min) 60 (S) } Screw Lead (mm) 1000 * Acceleration/deceleration speed (mm/s2) *Acceleration speed is measured in ms, so this must be calculated as (s) 1000 -39- 6.6.4 Movement distance Configuration and

3 Port Solenoid Valve/

Piping adapter Spacer with Bracket Mounting Position Dual residual pressure release valve (-X538) Dual residual pressure release valve with soft start-up function (-X555) (Max. 10) 201.8 82.9 (14) (14) 201.8 (Max. 10) 82.9 IN OUT IN OUT d c b a d a b c Model a b c d Note Model a b c d Note VP544-5DZ1-03-X538 33.9 57.2 95.7 220.7 AW30-03G-A Y300T-A E300-03-A VP544-5DZ1-03-X555 33.9 57.2 129.2

5 Port Air Operated Valve

center 3 4 5 VFA5 44(-P) 02 03 04 1/4, 3/8, 1/2 [4 (A), 2 (B) port] 36 (39.5) 27 (31) 14 (15.5) 20.5 (24.5) 1/8 [Pilot port: Lateral (-P)] 2 x 5.3 (2 x 6.5) (For mounting) 82 (87) 5 (6.5) 51.5 (55.5) 2B 4A 42 (45) 52 (58) B A PE 6.5 5EA 3EB 1P 2 x M5 x 0.8 (Breathing hole) 22.5 (26.5) 1/8 (Pilot port: Upward) 20 (16) 93 (97) 32.5 (28.5) 138 74 (78) 28.5 (32.5) 30 (31) 30 (31) 14 (15.5) 1

EX600-DX_DY_DM_eng

1 FE - 3 2 1 0 3 2 1 1 0 25 24 23 22 21 20 19 18 17 16 15 14 25 24 23 22 21 20 19 18 17 16 15 14 Digital I/O unit Digital output unit EX600-DM E EX600-DM F EX600-DY E EX600-DY B EX600-DY F Configuration Configuration Configuration Configuration Configuration 3 4 1 2 5 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 4 1 2 3 4 1 2 3 4 1 2 3 4 1 2 3 4 2 1 3 5 4 7 6 9 8 11 10 13 12 2 1 3 5 4 7 6 9 8 11 10