SMC Corporation of America
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to 300 301 to 1500 13 10 (13) 1/8 13 10 (10) 1/8 30 27 54.5 19 26 16 50 8 47 M6 x 1 6 14 4 7 30 51 (60) 3 54 71 4 M14 x 1.5 50 Up to 300 301 to 1500 14 12 (14) 1/4 14 12 (14) 1/4 35 32 70.5 27 32 20 58 11 58 M8 x 1.25 7 18 5 10 40 55 (67) 4.5 66 86 5 M18 x 1.5 63 Up to 300 301 to 1500 14 12 (14) 1/4 14 12 (14) 1/4 35 32 82.5 27 38 20 58 11 72 M10 x 1.5 7 18 5 12 45 55 (67) 4.5 82 106 5 M18

Note 2) Drain guide is G 1/4 (applicable to AW30K and AW40K). Nil Rc Note 5) Without a valve function. Note 6) For NPT thread type. N Note 1) NPT F Note 2) G This product is for overseas use only according to the new Measurement Law. (The SI unit type is provided for use in Japan.)

range Usable range 5 5 5 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 1 0 1 2 3 4 5 6 7 8 9 10 11 12 13 7 8 9 10 11 7 8 9 10 1112 13 14 15 Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) Distance from cylinder shaft center L0 (cm) 100 REBR32 REBR25 10 REBR15 1 0.1 100 200 300 400 600 500 Maximum speed U (mm/s) 62 Series

without indicator light Note 1) Operating load is an induction load.

From the formula on the front matter 9, the average suction flow rate Q1 is as follows: Q1 = (1/2 to 1/3) x Ejector max. suction flow rate = (1/2 to 1/3) x 5 = 2.5 to 1.7 L/min (ANR) (2) Next, find the maximum flow rate Q2 of the piping. The conductance C is 0.22 from the Selection Graph (3).

5 !4 !7 w #3 !6 e #1 @9 #0 i !0 !3 !1 !

Usable range Usable range RHC 10 10 10 5 5 5 MK(2) RS Q G 1 1 0 2 3 4 5 6 7 8 9 101112131415 1 1 0 2 3 4 5 6 8 9 10 11 13 1 1 0 2 3 4 5 6 7 8 9 101112131415 7 12 RS H A Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) RZQ 50 63 1000 1000 MI W S Recommended driving force Fn (N) Recommended driving force Fn

without indicator light Note 1) Operating load is an induction load.

( ) 3/8" (Side) 1/4" (Side, Bottom) VV801 1240 1/8" 330 1 (P) 5 (R1) 3 (R2) 3-position pressure center Note 1) Mass for each wiring part is not included.

5 5 5 6 Since this is a guideline including hysteresis, not meant to be guaranteed.

without indicator light Note 1) Operating load is an induction load.

D-A7 D-A80 D-A73C D-A80C 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 3 2 1 35 10 5 45 10 5 40 15 10 45 5 5 30 5 5 55 15 10 40 15 10 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 3 (Same side) 3 (Different sides) 2 (Same side) 2 (Different sides) 1 90 55 50 15 10 105 60 60 15 10 105 65 65 15 10 D-C7 D-C80

Port Size Ejector system Vacuum pump system Metric Inch Metric Inch PV 6 1/4" 6 1/4" V 6, 8 1/4", 5/16" 6, 8 1/4", 5/16" EXH (Port exhaust) 8 5/16" If the sound absorbing material is clogged, it will cause a reduction in the ejector performance.

MGPL25-30 is selected. 5 Less than 40mm stroke V = 200mm/s 1 3 l = 50mm V = 200mm/s 20 50 100 100 80 10 80 25 50, 63 50, 63 20 32, 40 32, 40 10 5 25 16 20 5 Load weight m (kg) Load weight m (kg) 25 12 20 16 1 12 16 1 12 0.1 10 20 30 40 50 51 100 300 200 0.1 10 50 100 200 Eccentric distance l (mm) Stroke (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 4 Compact Guide Cylinder Series MGP Operating

Fail Action Fail to Close, Fail to Open 5 Valve Travel 85.2 % 5 Positioner Information 5 Dead Angle (a0) 0.0 % [0..99%] 6 Temperature 24.7 C 6 Units 6 Performance Level A(1)-Aggressive, b(1)-fast, C(1)-Optimum, d(1)-Stable, E-Max. stability, (1) = Capac.

JIS Symbol How to Order VR 12 1 06 0 F Body size Applicable tubing diameter Metric size Inch size 1 2 1/8 standard 1/4 standard 23 04 06 08 10 3.2 01 03 07 09 11 1/8" 5/32" 1/4" 5/16" 3/8" 4 6 8 10 Shuttle valve With One-touch fittings For 3.2, use 1/8" tubing. 5-7-5 63 Series VR1210F/1220F Example of Operating Circuit OR circuit Self-hold circuit Interlock circuit When either A or B is

(B) 2 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) 3 (R2) 1 (P) 5 (R1) Note) Except VQZ1000 and metal seal type.

available on the standard model Common IN (188 X n) + 43 1 4 1 8 ARM2000 136 Individual IN (187 X n) + 45 1 8 1 8 Space saving How to Order Option ARM 1000 A1 5 01 G 1 1 Set at 0.2MPa Pressure gauge for 1MPa is used.

B-1 A-1 B-3 A-3 Connection of shield material Circuit Brake (+) Brake () Sensor (+) Note) Red Black Brown Black 4 5 1 2 Sensor () Note) Note) This is not used for the LES series. 29 Series LECP6 Series LECA6 Options [I/O cable] Controller side PLC side LEC CN5 1 (Terminal no.) 8.9 B1 A1 A1 Cable length (L) 1 3 5 (22.4) A13 B1 1.5 m 3 m 5 m (14.4) L B13 B13 A13 Dot color Dot mark Cable color