SV

Refer to Precautions 2 on page 1-2-9.

Cylinder with Lock

1 !7 @1@0 @2 @6 @3 @5@8 @4@9 #5 #7 #9 #8#6#4 #0#1 $1 $0 t !9 #3 #2 @7 Component Parts Component Parts No. Description Material Qty.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

27 COM3 18 COM3 18 N.C. 1 N.C. 1 8 8 COM3 19 COM3 19 N.C. 1 N.C. 1 COM3 38 COM3 38 28 28 COM4 20 COM4 20 N.C. 1 N.C. 1 9 9 COM4 39 COM4 39 N.C. 1 N.C. 1 29 29 COM4 40 COM4 40 1 Cannot be connected 1 Cannot be connected I/O 2 Input Signal I/O 2 Output Signal Name Details Name Details BUSY1 Busy signal for axis 1 +COM3 +COM4 Connects the power supply 24 V for input/output signal BUSY2 Busy

ZP

From the formula on the front matter 9, the average suction flow rate Q1 is as follows: Q1 = (1/2 to 1/3) x Ejector max. suction flow rate = (1/2 to 1/3) x 5 = 2.5 to 1.7 L/min (ANR) (2) Next, find the maximum flow rate Q2 of the piping. The conductance C is 0.22 from the Selection Graph (3).

Rubber seal Series 10-SYJ3000/5000/7000 4/5 port solenoid valve

To order connector cable only Conventional type Connector dimensions (Ground) 4 (Orange) Manual override Brown: 1Blue: 3 + B 9 A 1 3 Black: 4 Interface 33.9 L 35 10 Cable length (L) Part no. Pilot valve (10-SY114) Adapter plate 300mm V100-49-1-2 V100-49-1-1 500mm 1000mm 2000mm 5000mm V100-49-1-3 V100-49-1-4 V100-49-1-7 22 33.9 14 704

VQZ1000/2000/3000

port F G M3 x 0.5 (VQZ2000) M5 x 0.8 (VQZ3000) Note 1) 3(R2), 5(R1) port of VQZ2000 is only G 1/16.

VQC

Connector wiring diagram (mixed wiring) Connector type manifold 6 A 4 A 3 A 1 A 5 B 2 B Output 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 1 2 3 4 1 2 3 4 5 6 7 8 9 10 1 2 3 4 5 6 7 8 9 10 The use of multi-pin connectors to replace wiring inside manifold blocks provides flexibility when adding stations or changing

CNG

For details, refer to page 9-15-65. With pre-wire connector is available for D-G5NTL, G5NBL type, too. For details, refer to page 9-15-66. 9-5-22

Air Cylinder

14 12 (14) 1/4 14 12 (14) 1/4 35 32 76 27 32 20 30 2 9 9 58 58 11 58 M8 x 1.25 7 63 Up to 300 301 to 1500 14 12 (14) 1/4 14 12 (14) 1/4 35 32 92 27 38 20 32 2 11 9 70 58 11 72 M10 x 1.5 7 80 Up to 300 301 to 1500 20 16 (20) 3/8 17.5 16 (17.5) 3/8 40 37 104 32 50 25 40 3 11 11 82 71 13 89 M10 x 1.5 10 100 Up to 300 301 to 1500 20 16 (20) 1/2 17.5 16 (17.5) 1/2 40 37 128 41 60 30 50 3 14 14

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

1, !2, and !9 are set. Note) When ordering spare parts, write 1 piece for 1 set of the parts for one actuator.

Rotary Actuator

9 #0 #1 @1 @0@6 @5 @9 @4 @3 @7 !5 !1 i !0 q w !6 o r t e @2 @8 #3 #2 Without air cushion With auto switch With air cushion $1 $0 $2 #4 #6 #8 #9 #7 #5 Component Parts Component Parts No.

CM2

, #11 SCM225A, #11, #9 SCM225A, #11, #9, #19 CM2T32SCM232A, #11 SCM232A, #11, #9 SCM232A, #11, #9, #19 CM2T40SCM240A, #11 SCM240A, #11, #9 SCM240A, #11, #9, #19 1.4-46 Series CM2 Integrated Clevis (E) CM2E Bore size Stroke S T (mm) Bore E CD I A CI K AL CX L B1 D MM F N G PR H U H1 NA NN P 0 0.033 0 0.033 0 0.033 0 0.039 1/8 1/8 1/8 1/4 13 5 8 28 18 20 5 15.5 12 12 8 M8 X 1.25 13 15 20 8

VFS

02 2 stations 6 For bottom ported, Rc 1/8 is only available.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Station 1 SOL.B 2 SOL.A 1021-VV5Q21 3 Station 2 SOL.B 15 14 3 2 1 4 SOL.A 17 16 5 25 24 Station 3 13 SOL.B 6 23 18 12 4 SOL.A 7 26 22 19 Station 4 SOL.B 11 5 21 20 8 SOL.A 10 9 8 7 6 The total number of stations is tabulated starting from station one on the D-side. 9 Station 5 SOL.B 10 SOL.A 11 Station 6 SOL.B 12 SOL.A 13 Station 7 SOL.B 14 SOL.A 15 Air Preparation Equipment Pressure Control

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

Station 1 SOL.B 2 SOL.A 1021-VV5Q21 3 Station 2 SOL.B 15 14 3 2 1 4 SOL.A 17 16 5 25 24 Station 3 13 SOL.B 6 23 18 12 4 SOL.A 7 26 22 19 Station 4 SOL.B 11 5 21 20 8 SOL.A 10 9 8 7 6 The total number of stations is tabulated starting from station one on the D-side. 9 Station 5 SOL.B 10 SOL.A 11 Station 6 SOL.B 12 SOL.A 13 Station 7 SOL.B 14 SOL.A 15 Air Preparation Equipment Pressure Control

VFR

Cable Color List of Each Terminal No. 3 5 7 Red 9 Blue 11 13 2 4 6 8 Red Yes 10 Blue Yes 12 1 Terminal no. Lead wire color Dot marking 1 9 Gray 10 11 12 2 3 Red 4 5 6 Pink 7 Blue 8 Terminal no.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

1, !2, and !9 are set. Note) When ordering spare parts, write 1 piece for 1 set of the parts for one actuator.

Electric Actuator with Integrated Guide

CN2 11 15 14 2 12 PF SG CR PP PG NP NG SD V24 SON LSN LSP ALM SG 3 12 13 9 10 7 8 20 17 11 LG 19 P5 4 OP 1 V+ 20 12 7 6 P5 LG MR MRR MD MDR SD 7 8 1 2 4 5 9 P5 LG MR MRR MD MDR SHD SG 7 8 1 2 4 9 P5 LG MR MRR MD MDR SHD Note 3) Detector 17 16 Plate 5 Note 2) Note 6) Be sure to connect the shielding wires to the ground plate inside the connector. 12 SG Note 1) Do not orient diodes incorrectly

Stopper Cylinder

#3 $4 $3 $5 #0 $1 $2 @5 @3 @4 @6 #1 $6 #7 #5 #6 #8 @7 #2 #4 Only one roller is provided for 32. $0 #9 RSQ RSQ Component Parts No.

XL

Conversely, by applying pressure to actuation port [2]-(7), the piston (8), sealed by the cylinder seal (13) and the piston seal (9), is operated closing the valve (15) which is sealed by the valve seal (14) (actuation port [1]-(7) is released).