3 Port Solenoid Valve Metal Seal Series VZ200 1

0 NBR Piston Polyacetal Platinum silver Aluminum die-casted Sub-plate 01 02 NBR Mini Y seal !1 Sub-plate Assembly Part No.: VZ400-S!2 Mounting bolt and gasket are not attached. Carbon steel Round head combination screw !4 !5 !6 Pilot valve assembly !

JXCx-OMT0061CN

(OUT05)OFF 11INPOFF ... 12BUSY ON 0mm 50mm 60mm 100mm 5 13DRIVEOFF 14No.2 ON (OUT1ON) 15INPON 16BUSYOFF 10mm 57 - 13.2 100mm/s 100mm (No.1 ) 100mm ,10mm/s 50% 5mm (INPON )50mm/s 50mm (No.2 ) No. 1 2 2 2 mm/s mm mm/s mm/s mm mm mm mm/s 0 1 ABS 100 100.00 1000 1000 50 40 10 100 0 0 5 2 ABS 50 50.00 1000 1000 0 0 0 100 0 0 0.1 () 1No.1(IN0ON) / 2DRIVEON (2)(5)(10)(13) No.1

3 Port Air Operated Valve Series SYJA300

SYJA524-01 SYJA712-01 SYJA722-01 SYJA714-01 SYJA714-02 0.76 0.69 0.69 0.66 0.63 0.64 0.51 0.42 0.34 0.33 0.45 0.48 2.5 2.4 2.7 2.6 2.3 2.3 0.77 0.72 0.71 0.74 0.70 0.68 0.43 0.38 0.32 0.31 0.21 0.31 2.8 2.7 2.9 3.0 2.8 2.7 N.C. N.O. Rc 1/8 Body ported 80 Rc 1/8 Rc 1/4 Rc 1/8 Rc 1/4 M5 x 0.8 130 (Without subplate 80) N.C. Base mounted (with sub-plate) SYJA724-01 SYJA724-02 N.O.

Nozzle Type Ionizer

Blow Velocity Distribution (Supply Pressure: 0.3 MPa) qEnergy saving static neutralization nozzle IZN10E-01 wHigh flow rate nozzle IZN10E-02 0 0 100 100 Distance [mm] Distance [mm] 200 200 4 m/s 14 m/s 300 300 11 m/s 3 m/s 400 400 8 m/s 2 m/s 500 30 30 20 10 0 10 20 500 30 30 20 10 0 10 20 Distance (Horizontal) [mm] Distance (Horizontal) [mm] 8 IZN10E Series Flow Rate Characteristics qEnergy

Rubber seal 5 Port Solenoid Valve Series SYJ5000

-01 AS3001F-06 AN101-01 24 Series SYJ5000 How to Order Light/Surge voltage suppressor Electrical entry for G, H, L, M, W Electrical entry for D Type of actuation Nil S Z Without light/surge voltage suppressor With surge voltage suppressor (Non-polar type) Nil S Z R U Without light/surge voltage suppressor With surge voltage suppresor With light/surge voltage suppressor With surge voltage

V

W I T C H S E R I E S ZSE1 ZSE1--55 ZSE1 L Switch Type 55L E L E C T R I C A L E N T R Y Grommet (24) L Grommet (120) C w/Plug Connector (24) CL w/Plug Connector (120) CN Plug Type (w/o Lead) C O N N E C T I O N 00 NZM Ejector Mounting 01 1 8 PT T1 1/8 NPTF ACCESSORIES V A C U U M S W I T C H S E R I E S ZS S W I T C H T Y P E Interface plate for ZM Ejector P31806-01 (blank) P31806-02 (use

Sine Cylinder Series REC

Load (kg) Load (kg) 10 10 30 10 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 REA REB Stroke Stroke Speed REC CY Time Time Stroke P=0.5 MPa,M=10 kg P=0.3 MPa,M=10 kg M=10 kg M=30 kg V=300 mm/s V=100 mm/s CX MQ Model Recommended Speed Controllers Caution RHC RZQ Model Elbow type Straight type In-line type REC20 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC25 AS2201F

Sine Cylinder Series REC

Load (kg) Load (kg) 10 10 30 10 100 300 Speed (mm/s) Speed (mm/s) Speed (mm/s) 300 300 REA REB Stroke Stroke Speed REC CY Time Time Stroke P=0.5 MPa,M=10 kg P=0.3 MPa,M=10 kg M=10 kg M=30 kg V=300 mm/s V=100 mm/s CX MQ Model Recommended Speed Controllers Caution RHC RZQ Model Elbow type Straight type In-line type REC20 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC25 AS2201F

Series VQ Metal Seal/Rubber Seal Body Ported

VS7 S kit (Serial transmission) Kit F kit (D-sub connector) T kit (Terminal block) P kit (Flat cable connector) U S F 15 pin U S P 26 pin U S A S U S P 20 pin U S P 16 pin U S P A B C 10 pin F 25 pin T2 T1 Model Max. number 16(1) 14 8 8 16 16 16(1) 14 16(1) Note 1) Due to the limitation of internal wiring.

REC

(Refer to p.4.9-5) Caution Model Recommended SMC speed controller Caution Model Elbow Straight In-line REC20 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC25 AS2201F-01-06-X214 AS2001F-06-X214 AS2301F-01-06-X214 REC32 AS3201F-01-08-X214 AS3001F-08-X214 AS3201F-01-08-X214 REC40 AS3201F-02-08-X214 AS3001F-08-X214 AS3301F-02-08-X214 4.9-3 Be sure to read before handling.

F

E R I E S (N)AS1000-4000 S Y M B O L S NAS 3 000 A R E A C O D E Japan, Asia, Australia, UK N Canada, USA P O R T T H R E A D P A N E L M O U N T V E R S I O N R(PT) N NPT B O D Y S I Z E P O R T S I Z E 1 M3, M5 2 1/8, 1/4 Standard 3 3/8 Standard 4 1/2 Standard M3 M3x0.5 M5 M5x0.8 01 1/8 (10-32Nom) 02 1/4 03 3/8 04 1/2 T E C H N I C A L SPECIFICATIONS D I M E N S I O N S S E R I E S (N)AS4000

E-P HYREG ® Series VY1 1

0.35 0.55 0.75 1.5 2 4 Hysteresis (2) 1% F.S. 2.5% F .S. 3% F .S. 5% F .S.

ARM10/11

(The SI unit type is provided for use in Japan.) 14-4-35 18 Series ARM11A/B Common Supply Block ARM11A 1 S 01 3 Z A 1 2 3 4 5 6 1. IN piping position 4. Option 2.

ARM10/11

(The SI unit type is provided for use in Japan.) 14-4-35 18 Series ARM11A/B Common Supply Block ARM11A 1 S 01 3 Z A 1 2 3 4 5 6 1. IN piping position 4. Option 2.

SV

Applicable related components Total stroke time (s) SV Solenoid valve Tubing Speed controller Solenoid valve Tubing Speed controller Silencer Silencer 0.0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1.0 0.0 0.2 0.4 0.6 0.8 1.0 1.2 1.4 1.6 1.8 2.0 SZ 200 400 CM2 20 MB 32 10% 30% 50% 70% 10% 30% 50% SY 150 300 Stroke (mm) 70% Stroke (mm) AS2201F -01-06 AS2200-01 AS2201F -01-08 AS2200-01 70% 100 SYJ

Secondary Batteries

Suffix for stroke adjusting unit Nil S Piping Both sides One side Standard type Centralized piping type Nil G Note) S is applicable for stroke adjusting units L and H.

HRX-OM-T004

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers.

HRX-OM-R028

Refer to 4.3.2 Setting and checking,5.3.2 Setting and checking. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Fig 3.3-2 RS-232C connector connection 3.3 Connected explanation HRSH Series 3-2 HRX-OM-R028 Chapter 4 MODBUS communication function Chapter 4 MODBUS communication function MODBUS protocol is a communication protocol developed by Modicon.

Ionizer Nozzle type IZN10 Series IZS

Also, regularly check there is no deterioration due to ozone. 444 Technical Data IZN10 Series Blow Velocity Distribution (Supply Pressure: 0.3 MPa) IZS (1) Energy saving static neutralization nozzle/IZN10-01 (2) High flow rate nozzle/IZN10-02 IZN IZN IZF ZVB IZD IZE IZH 0 0 100 100 200 200 Distance [mm] Distance [mm] 3 [m/s] 14 [m/s] 300 300 2 [m/s] 11 [m/s] 400 400 1 [m/s] 9 [m/s] 500 30

Gun Type Ionizer

0.5 s 1 s 1.5 s 2 s 2.5 s 50 50 100 100 150 150 200 200 1500 0 150 300 450 600 750 900 1050 1200 1350 1500 0 150 300 450 600 750 900 1050 1200 1350 Distance [mm] Distance [mm] 3) Supply pressure: 0.2 MPa Flow rate consumption: 188 L/min (ANR) 4) Supply pressure: 0.3 MPa Flow rate consumption: 253 L/min (ANR) 200 200 150 150 2.5 s 2 s 100 100 50 50 0.5 s 1 s 1.5 s 2 s 0.5 s 1 s 1.5 s 50 50