AMPSeries

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

AMP

screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90 106 2 2.3 3.2 6 7

XL-OMY0002

C D (KF) KF (K) KF G I H H V Fn Fd A C C U U M E V V A L E B K S H J M G A A A B C D E Fn Fd G H J K XLD-25 50 123 48 1 12 40 26 41 16 7.5 XLD-40 65 170 66 2 11 55 41 63 20 15 XLD-50 70 183 79 2 11 75 52 68 20 17.5 XLD-63 88 217 100 3 11 87 95 70 72 20 20 XLD-80 90 256 117 3 11 114 110 83 98 20 26.5 XLD-100 108 321 154 3 11 134 130 102 133 20 38 XLD-160 138 335 200 3 11 190 180 153 114

Air Cylinder/End Lock Series MBB ø32, ø40, ø50, ø63, ø80, ø100

Bore size (mm) 32, 40 50, 63 80, 100 Bore size (mm) 32 40 50 63 80 100 Mounting bracket BT-03 BT-05 BT-06 (1) MB-L03 MB-L04 MB-L05 MB-L06 MB-L08 MB-L10 Foot A set of following stainless steel mounting screws is attached. (A mounting bracket itself is not attached. Please order it separately.)

Exhaust Cleaner for Clean Rooms AMP Series

hole F Applicable screw M5 hexagon socket head cap screw M6 hexagon socket head cap screw M8 hexagon socket head cap screw Model AMP220 AMP320 AMP420 E OUT Maintenance space (mm) C B Bracket related dimensions Element service indicator related dimensions Port size (nominal size B) Model A D E I 66 80 90 J K L M N O P Q R S F 80 120 180 G 123 169 237 H AMP220 AMP320 AMP420 76 90 106 76 90

Digital Flow Switches Series PF2A

Pin description Load is an analog input equipment such as a voltmeter, ammeter. 1 DC(+) PF2A7H-(-M) 68 69 2 Analog output 3 DC() Accumulated pulse output wiring examples 4 OUT1 4-I thread with depth J 40 Max. 30 V 80 mA or less OUT1 Load Black H 0 V or Blue 50 msec 50 msec PF2A7H-(-M) 28 29 A B C D E F G H I J Model Brown PF2A703H PF2A706H PF2A712H 55 160 40 92 67 55 Rc1, NPT1, G1 36 M5 x

Digital Flow Switch Series PFA For Air Series PFW For Water

40 Max. 30V 80mA or less OUT1 Black Load ON H OFF Blue 50msec PFA7H-(-M) 28 29 B C D E F G H I J A Model Brown PFA703H PFA706H PFA712H 55 160 40 92 67 55 Rc 1, NPT 1, G 1 36 M5 x 0.8 8 OUT1 80mA Load Black 65 180 45 104 79 65 Rc 1 1/2, NPT 1 1/2, G 1 1/2 46 M6 x 1 9 ON OFF 75 220 55 114 89 75 Rc 2, NPT 2, G 2 56 M6 x 1 9 50msec PFA7H-(-M) 68 69 Analog output 1 to 5VDC 4 to 20mADC 5 20 Analog

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 0 (Meter-out), Thread Type: R, Port Size: M5 (M5 x 0.8), Applicable Tubing O.D.: 06 (ø6), Seal Method: w/o Sealant, Option: Electroless Nickel Plating, Lock Nut Option: J (Round Lock Nut)

Body Size: 1 (M5 x 0.8, 10-32UNF), Control Type: 1 (Meter-in), Thread Type: R, Port Size: M5 (M5 x 0.8), Applicable Tubing O.D.: 06 (ø6), Seal Method: w/o Sealant, Option: Electroless Nickel Plating, Lock Nut Option: J (Round Lock Nut)

Body Size: 2 (M5 Basis), Thread: M5 Metric/10-32UNF/R(PT), Port Size: M5X0.8, Applicable Tube OD: 06 (Ø6 mm), Sealant: None, Lock Nut: J (Round)

Type: Speed Controller, Body Material: [Resin] PP, Control Method: Meter-Out, Format: [Elbows] Cylinder direct-connected elbow type, Environment, Applications: Standard / Clean circumstance, Thread Portion Material: [303/304 Stainless Steel] Stainless Steel 304, Knob Type: Standard, Lock Nut Option: Hexagon Shape Lock Nut, Joint Type: Male thread + One-Touch Couplings, Connection Dia.: 5

Body Size: 1 (M5 Basis), Control Method: 0 (Meter Out), Material: G (Stainless Steel (SUS304)), Port Size: M5X0.8, Applicable Tube OD: Ø4

Body Size: 3 (1/8 Basis), Thread: Metric Thread (M5)/R(PT), Port Size: 01 (1/8), Applicable Tube OD: 06 (Ø6 mm), Sealant: S (Sealant), Lock Nut: J (Round)

Body Size: 40, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 06 (3/4), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: 2J (2 + J), Semi-Standard 2: Standard

Body Size: 40, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 06 (3/4), Option: B (Bracket), Semi-Standard 1: 2J (2 + J), Semi-Standard 2: Standard

Body Size: 40, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 06 (3/4), Option: B (Bracket), Semi-Standard 1: J (Drain Guide: 1/8 for Body Size 20; 1/4 for Body Size 30 & 40), Semi-Standard 2: Standard

Body Size: 50, Thread: None (Rc: for Body Size 20, 30, 40, 50, 60; M5: for Body Size 10), Port Size: 06 (3/4), Option: w/o Bracket; w/o Auto Drain, Semi-Standard 1: 8J (8 + J), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 06 (3/4), Option: Standard, Semi-Standard 1: 6J (6 + J), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 06 (3/4), Option: Standard, Semi-Standard 1: 8J (8 + J), Semi-Standard 2: Standard

Body Size: 40, Thread: Rc: Size 20, 25, 30, 40; M5: Size 10, Port Size: 06 (3/4), Option: Standard, Semi-Standard 1: 8J (8 + J), Semi-Standard 2: R (Flow Direction: Right to Left)