Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

Series CJ2Y ø 10, ø 16 Smooth Cylinder Double Acting, Single Rod

Auto Switch Mounting Height (mm) Auto switch model Band mounting D-C7m/C80 D-H7m/H7mW D-H7NF D-H7BA D-M9mV D-M9mWV D-M9mAV D-A9mV D-M9m D-M9mW D-M9mA D-A9m D-C73C D-C80C D-H7C D-A7m D-A80 Hs Hs Hs Hs Hs Hs Bore size 10 17 18 17 19.5 20 16.5 16 20.5 21 20.5 23 23.5 19.5 (mm) Auto switch model Rail mounting D-M9m D-M9mV D-M9mW D-M9mWV D-M9mA D-M9mAV D-A9m D-A9mV D-A7mH/A80H D-F7m/J79 D-F7mW

Rotary Table Vane Style Series MSU Size: 1, 3, 7, 20 1

Series Size Rotating angle Vane type Applicable auto switch Angle adjustment screws 1 D-9, D-T99 D-9A, D-S99, S9P 90 High precision type MSUA 3 Single vane 7 Table unit D-R73, D-T79 D-R80, D-S79, S7P 180 Auto switch capable 20 1 D-9, D-T99 D-9A, D-S99, S9P Single vane Since switches can be moved anywhere on the circumference, they can be mounted at positions which accommodate the specifications

MGP

D (mm) B 0.2 MGC B 0.2 MGF CY1 A 0.2 A 0.2 Hex socket head mounting screw 140 214 50 66 116 170 M12 X 1.75 M16 X 2 Hex socket head mounting screw 50 56 72 82 98 106 130 142 180 210 D(mm) Bore (mm) A (mm) B (mm) C (mm) Bore (mm) A (mm) B (mm) C (mm) MY1 MGPM MGPL 32 47 M4 X 0.7 M5 X 0.8 M5 X 0.8 M6 X 1.0 M8 X 1.25 18 22 24 30 34 40 46 58 54 62 41 46 54 64 78 86 110 124 156 188 10 12 14 18

Rotary Table/

D. (mm) I. D.

o

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

o

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

51

D-H7W D-H7NF D-H7BA D-C7/C8 D-H7 D-H7C D-H7W D-H7BA D-H7NF D-G5/K5 D-G5W D-K59W D-B5/B6 D-B59W D-G5NT D-G59F D-H7C D-G5BA D-M9V D-M9WV D-M9AV D-A9V D-C7/C8 D-C73C D-C80C D-M9(V) D-M9W(V) D-M9A(V) D-C73C D-C80C D-B5 D-B6 D-B59W D-A9(V) A B A B A B A B A B A A B B 28.5 29 30.5 31 42.5 42.5 Hs 25.5 28 31.5 36 41.5 48.5 Hs 24.5 27 30.5 35 40.5 47.5 Hs 27 29.5 33 37.5 43 50 Hs 27.5 30

3 Port Solenoid Valve Metal Seal Series VZ200 1

length 2-2.8 mounting hole VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VT VP VG VP S070 Pilot EXH Locking type manual override VQ VKF VQZ 1 2 DIN terminal: VZ2 2-D(Z)-M5 1 2 L plug connector: VZ2 2-L(Z)-M5 VZ 300 (Lead wire length) VS VFN With light/surge

CLQ

Minimum Stroke For Auto Switch Mounting (mm) D-A7 D-A80 D-A73C D-A80C D-A9V D-A7H D-A80H D-F7 D-J79 D-F9W D-F7W D-J79W D-F7BAL D-F79F D-F9BAL D-F7WV D-F9WV D-F7BAVL D-F7V D-J79C D-M9V No. of auto switches mounted D-A9 D-M9 D-A79W 1 pc. 2 pcs. 5 5 5 10 10 15 15 15 15 20 20 20 10 10 Other than the applicable auto switches listed in How to Order, the following auto switches can be mounted.

KJ

(inch) Connection thread M R Model H (Width across flats) L A M Min. port size KQ2H01-M5 KQ2H07-M5 KQ2H01-M5 M5> Weight (g) D Note) Applicable tubing KQ2H01-M5 2 9 16 6 11 12 3.3 10 15 M5 x 0.8 13.6 18 7 16.7 22 12.7 KQ2H01-01S 1 8 1 8 10 15.5 2.5 1 4 KQ2H01-02S 19.5 13.5 14 2.5 M5 x 0.8 KQ2H05-M5 10.3 20.5 18 15 15.3 18.5 17 10.7 11 14 11 24 22 21 18.4 22.5 23 16.5 1 8 3 16

Possible to transfer a workpiece at low-speed.

5 y q r 312 CRQ2X Series Low-Speed Compact Rotary Actuator Rack & Pinion Type Dimensions Size 10/15 3H9 effective depth 2 CRB2 TA 0.6 CRB1 30 MSU BU CRJ CRA1 2 x M5 x 0.8 through (Opposite side 7.6 counterbore depth 4.2) B CRQ2 MSQ With double shaft DD W D MSZ CRQ2X MSQX CRQ2X MSQX H 2 10 2 x M5 x 0.8 (Port) MRQ (US) M (UW) BD Q BC ab BA BB BA D (AU) Max.

MK

Mounting bolt M5 X 75l M5 X 85l M5 X 80l M5 X 90l M5 X 90l M5 X 100l M5 X 80l M5 X 90l M6 X 105l M6 X 135l M8 X 105l M8 X 135l D 75 85 80 90 90 100 80 90 105 135 105 135 Part No.

CLQ

CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l

SZ3000

G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V Power supply { Transmission line Transmission line G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V G D 0 V 24 V Black White Brown Blue Crimp connector SL-J1A Main transmission line Transmission line 24 V 0 V Power supply { 24 V 0 V Power supply { 24 V 0 V D G D G 24 V 0 V 24 V 0 V D G D G 24 V 0 V The above is

Compact Cylinder with Lock Series CLQ

CLQB/Without built-in magnet Mounting bolt Mounting bolt Mounting bolt Mounting bolt Model C Model C Model C Model C D D D D M5 x 55l x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l M5 x 60l x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l M5 x 65l x 70l x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 140l x 165l M5 x 75l x 80l x 85l x 90l x 95l x 100l x 105l x 110l x 115l x 150l

Stopper Cylinder

D-M9A Auto switch Auto switch B A (22) 22 B A Hs Hs 24.5 ( ): For D-A96 type 16 16 A B A B Hs Hs D-C7 D-C8 D-C73C D-C80C D-H7 D-H7W D-H7NF D-H7BA D-H7C B A Hs B Hs A Auto Switch Proper Mounting Position Auto Switch Mounting Height Auto switch model (mm) (mm) RSQ D-H7BA D-H7W D-H7 D-H7C D-H7NF D-H7 D-H7W D-H7NF D-H7BA D-C7/C8 Auto switch model D-C7 D-C80 D-C73C D-C80C D-M9V D-M9WV D-M9AV

NVJ100, NVJ300, NVJ3000 3,5 Port Solenoid Valve/Rubber Seal Type

M5 : With 10-32 Nom. (M5) s Port 5 A ] I "4;f D q-ttFor subplate/type 41, S41,46S46 manibld.

Auto Switch Guide

(mm) Applicable bore size (mm) 40 50 63 80 100 C H' T T' HW H Z Auto switch model -X D-A3C-4, D-A44C-4 D-A3C-5, D-A44C-5 D-A3C-6, D-A44C-6 D-A3C-8, D-A44C-8 D-A3C-10, D-A44C-10 58 (67.5) 59 (68.5) 61.5 (71) 65 (74.5) 68 (77.5) 50.5 (60) 51.5 (61) 53 (62.5) 54.5 (64) 57.5 (67) 7.5 8.5 10.5 12.5 15.5 44 52 64 78 92 6.5 6.5 7.5 9.5 9.5 69 77 91 107 121 M5 x 0.8 x 16 20M5 x 0.8 x 20 Data M5

Series CQS 10-/21- 11-/22- ø12, ø16, ø20, ø25 Compact Cylinder

Nil S n 2 pcs. 1 pc. n pcs. 10 11 Relief type Vacuum suction type D 12 5 D M9B 10 C Q S B 21 C Q S B D 12 5 D M9B Auto switch (With auto switch) Nil With auto switch No D With auto switch (Built-in magnet) Without auto switch (Built-in magnet cylinder) Nil For auto switch part numbers, refer to the next page.