Table of Contents

Elbow/Universal Type Air Flow/Effective Area Model AS121FM-M5 AS131FM-M5 AS221FM-01 AS231FM-01 AS221FM-02 AS231FM-02 RE A B 3.2, 4, 6 3.2, 4 6, 8 4 6 8, 10 Metric size Tubing O.D.

Vacuum System Peripherals:

R L B 01 1 Nil F G Rc 1 8 ... ...

EXxx-OMU0020CN

Valve diagnostics 1 . 5-4 Valve diagnostics 1 Bit 0 Valve 0, 1 diagnostics 01() 1 Valve 2, 3 diagnostics 01() 2 Valve 4, 5 diagnostics 01() 3 Valve 6, 7 diagnostics 01() 4 Valve 8, 9 diagnostics 01() 5 Valve 10, 11 diagnostics 01() 6 Valve 12, 13 diagnostics 01() 7 Valve 14, 15 diagnostics 01() 5.1.1.4.

Speed Controller: Standard Type Elbow Type (Metal Body) Series AS

Unified thread (10-32 UNF) NPT N G F AS1200-M3 AS1400-M3 M3 M3 x 0.5 Male thread comes with R thread. AS120-M5 M5 U10/32 01 02 03 04 M5 x 0.8 10-32 UNF 1/8 1/4 3/8 1/2 AS120-U10/32 AS220-01 AS220-02 AS320-03 AS420-04 522 Series AS Speed Controller: Standard Type Elbow Type (Metal Body) Note) The flow characteristics are representative values.

•

he Weat 01 s prvduCI duB lO !he use 01 !

CLA

l~ length 01 thread wnhoul boot With boot --l ~ 40 500 20-500 27 30 60 96 V. y, 44 16 32 10 85 15 26 54 10 10 M8X1.25 100 -750 20750 37 40 11 6 140 V. y, 92 30 52 14 124 21 31 76 25 19 M1 2Xl .75 50 600 20-600 32 35 70 108 Yo V. 52 20 40 10 95 17 27 59 13 12 M 8X 1. 25 63 -600 20-600 32 35 86 11 5 'I, 'I, 64 20 40 10 102 17 26 67 18 15 Ml 0Xl .25 80 750 20750 37 40 102 129 'I.

3 Port Solenoid Valve Metal Seal/Rubber Seal Base Mounted VQZ100/200/300

to 50C 10 to 50C Ambient and fluid temp.

Speed Controller with Residual Pressure Release Valve with One-touch Fitting AS  FE Series

AS23 1FE-01 AS22 1FE-02 AS23 1FE-02 AS32 1FE AS33 1FE AS42 1FE AS43 1FE Model 8 10 6 8 10 12 12 10 6 8 10 Tubing O.D.

VEX1

Symbol Parts name VEX11001 02 VEX12001 02 VEX13002 03 04 04 06 10 VEX150VEX17010 12 VEX19014 20 VEX3-32A VEX5-32A VEX7-32A VEX9-32A VEX1-18-1A G27-10-01 G36-10-01 B F G Bracket (with bolt and washer) Air operated External pilot solenoid G46-10-01 VEX1-18-2A Pressure gauge (1) Note 1) When requring the gauge except mentioned above, specify the model number.

VM

00 VM121-01-00 VM130-01-00 VM131-01-00 VM122-M5-00 VM123-M5-00 VM132-M5-00 VM133-M5-00 Basic Polyacetal roller Hard steel roller Polyacetal roller Hard steel roller Roller lever VM121-01-01 VM121-01-01S VM130-01-01 VM131-01-01S VM123-M5-01 VM123-M5-01S VM133-M5-01 VM133-M5-01S Mechanical operation Manual operation One way roller lever VM121-01-02 VM121-01-02S VM131-01-02 VM131-01-02S VM123

Modular Type Filter Regulator Series AW

Note 1) Bracket assembly Set nut AW20P-270AS AR20P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD27 AR30P-270AS AR30P-260S G36-10-01 GC3-10AS G36-2-01 GC3-2AS AD38 AD38NNote 5) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 5) AR40P-270AS AR40P-260S G46-10-02 GC3-10AS G46-2-02 GC3-2AS AD48 AD48NNote 5) Round Square embedded type Round Square embedded type 1.0MPa Note



32A VEX9-32A VEX1-18-2A VEX1-18-2A F Foot (With bolt and washer) G27-10-R1-X207 G27-10-01 G36-10-01 G46-10-01 G Pressure gauge AN120-M5 N Silencer for breed port (PE) The optional parts are shipped in the same package.

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

of P and R port Type 40R Applicable solenoid valve SYJ514R-SYJ524R-How to Order SS3YJ5-40R-05 -01 R port 1/8 X port (External pilot type) Applicable blanking plate assembly SYJ500-10-3A P, R port thread type P port 1/8 R Stations A port size + + + + M5 x 0.8 02 : 20 2 stations : 20 stations P port 1/8 M5 01 M5 x 0.8 Nil Rc G NPT NPTF P A A X F N T 1/8 R P A port M5 x 0.8, 1/8 R port 1/8

Tamper Proof Speed Controller with One-touch Fitting Series AS


1F-T Elbow Type/Universal Type 1

Metric size Inch size Control 3.2 23 01 1/8" 5/32" 3/16" 1/4" 5/16" 3/8" 1/2" Meter-out Meter-in 0 1 04 06 08 10 12 03 05 07 09 11 13 4 6 8 10 12 With One-touch fitting Use 1/8" tube. 15-9-92 2 Tamper Proof Speed Controller With One-touch Fitting, Elbow Type/Universal Type Needle Valve/Flow Characteristics AS121F AS131F AS221F-01 AS231F-01 AS221F-02 AS231F-02 Inlet pressure: 0.5 MPa Inlet

Series H, DL, L, LL Self-align Fittings

A L1 L2 M 1 8 4 L04-01 33 10 21.8 30.9 15 3.5 32.7 10 14 10 1 4 1 8 L04-02 L06-01 40 36 14 10 34.9 30.9 34.7 33.8 1 4 3 8 1 8 6 L06-02 L06-03 L08-01 43 55 46 14 17 12 34.9 36.9 31.9 16 9 21.8 35.8 37.5 36 12 10 14 1 4 3 8 1 4 8 L08-02 L08-03 L10-02 52 61 68 14 17 14 16 19 23.3 35.9 37.9 36.9 38 39.7 40.7 14 12 17 3 8 1 2 1 4 3 8 1 2 Reference dimensions after R(PT) thread installation. 10

44

1/2 10 14 10 14 10 14 19.4 23.8 19.4 23.8 20.9 25.3 23.3 26.7 28.1 29.7 30.1 33.5 29.7 30.1 33.5 31.3 31.7 35.1 31.3 31.7 35.1 33.1 36.3 16.3 19.1 16.3 19.1 17.8 20.6 20.2 22 23 8 14 8 14 10 16 18 24 36 34 41 67 33 40 66 33 40 66 30 38 63 51 67 4 2.5 1.8 1.6 d 8 5 KQB2 Applicable tubing 4 3 2.3 2.6 H1 H2 KS KX 6 4 3.3 6 10 5.8 M A L KM 14 8 6 14 6.6 5.3 17 Connection thread 17 KF 17 25 10

LEC-OM02704CN

]) [0][2] [0][0] 4 14 12 14 [3][5] 00 16 01 02 03 04 05 06 07 08 09 0A 0B 0C 0D 0E 1 0F ABS 10 11 80 12 81 82 83 84 85 86 87 88 89 8A 8B 8C 8D 8E 1 8F ABS 90 91 14 13 14 (6) ([4][0]) [4][0] [0][1][F][F] (16)10 8 (7) ([5][0]) [5][0] [0][1][F][F] (16)10 8 (8) ([5][4]) [5][4] [0][1][F][F] (16)10 8 (9) ([5][8]) [5][8] [0][1][F][F] (16)10 8 (10)(DWELL)([6][0]) [6][

HRX-OM-W004

Setting range: MT.01 to MT.05 (Initial value: MT.01) Contact output signal 3 Select function 16. Press the [] key.

F

-03 9.6 10 17.5 33 21.5 15.5 2.5 4 6 KQL04-06 10.4 10 18 33 21.5 16 4.2/4.2 4 8 KQL04-08 10.4 10 18 35 22 16 4.2/4.2 1/8 4.8(3/16) KQL01-05 9.6 10 17.5 33 21.5 15.5 2.5 6 8 KQL06-08 12.8 10 20 36.5 24.5 17 11.4/11.4 5/32 4.8(3/16) KQL03-05 10.4 10 18 33.5 22.5 16 3 6 10 KQL06-10 12.8 10 20 38.5 24 17 11.4/11.4 5/32 6.3(1/4) KQL03-07 10.4 10 18 34 22.5 16 3 8 10 KQL08-10 15.2 12 23 39.5 26

Series SV

-59-2A SV1000-59-1A 10 SV1000 A L D Applicable fitting size d Model SX3000-77-1A SX3000-77-1A 16 KQ2P-04 16 32 6 4 SV2000-59-2A SV2000-59-1A 10 SV2000 KQ2P-06 18 35 8 6 SV2000-59-3A SV2000-59-3A 16 KQ2P-08 20.5 39 10 8 SV3000-59-1A SV3000-59-1A 10 SV3000 KQ2P-10 22 43 12 10 SY9000-61-2A SY9000-61-2A 10 SV4000 KQ2P-12 24 44.5 14 12 1mm2 = 1in = 25.4mm KQ2P-01 16 31.5 5 1/8" Manifold Specification