HRX-OM-R016

See note 4 for other conditions. 11 Dimension between panels. Projection is not included. 12 Weight when the circulating fluid and facility water (for water-cooled type) is not included. The weight will increase by 1kg when option J [Automatic fluid filling] is selected.

IDG

(Refer to page 14-19-11.)

JXCx-OMT0001CN

PLC 11.

Compact 5-Port Solenoid Valve

J When J is selected for e, install the release valve or vacuum breaker in the middle of the vacuum piping.

LEH_C

-4 M30.5 0.9 6 LEHZ(J)16(L)K2-6 M40.7 1.4 6 LEHZ(J)20(L)K2-10 M50.8 3.0 8 LEHZ(J)25(L)K2-14 M61 5.0 10 LEHZ32K2-22 M61 5.0 10 LEHZ40K2-30 M81.25 12.0 14 17 - LEHF [Nm] LEHZ(J)10(L)K2-4 M30.5 0.9 LEHZ(J)16(L)K2-6 M30.5 0.9 LEHZ(J)20(L)K2-10 M40.7 1.4 LEHZ(J)25(L)K2-14 M50.8 3.0 LEHZ32K2-22 M50.8 3.0 LEHZ40K2-30 M61 5.0 [Nm] L[mm] LEHZ(J)10(L)K2-4 M40.7 1.4 6 LEHZ(J)16(L)K2-6 M40.7 1.4 6

Refrigerated Air Dryers

7, 11, 14, 19, 22, 25 for optional models.

Stopper Cylinder

13 7 9 11.5 12 17 11.5 12 17 9 9 13 13 9 9 9.5 10 15 17.5 18 23 15 7 11 19 7 15 12 12.5 17.5 18 18.5 23.5 15.5 9.5 16.5 10.5 15 21 11 17 12 12.5 17.5 22.5 23 28 20 9.5 21 10.5 15 25.5 11 21.5 5.5 6 11 30.5 31 36 28 3 29 4 8.5 33.5 4.5 29.5 Note) Adjust the auto switch after confirming the operating conditions in the actual setting.

Series IDG

) (C) (91) 59 (59) IN OUT 11 (D) 170 7 Purge air for dehumidification Purge air for dehumidification (Maintenance space 100mm or more) Port size: Rc 1/4, 3/8 (NPT, PF threads not available) Drain Drain Drain discharge Purge air discharge tubing port for dehumidification With drain guide Applicable tube O.D.: E J With float type auto drain H Model Option: P A B With drain guide J 238 224 170

Precision Air Slide Table Series MXP ø6, ø10, ø12, ø16, (ø8: new addition, see 8-8-23 ) 1

South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 24.3 17.1 14.4 40.8 MA 10.5 11 CX 11 8.5 D27.3 -X 34 20Data A 19 6.5 Operating port 2-M5 x 0.8 (Plug: M-5P) 30 4-M6 x 1 4-M5 x 0.8, depth 7 Bottom hole diameter 5.1 W 32 0.05 D B 8 0.05 47 13 Operating port 2-M5 x 0.8 J 8 Mounting base side B D 16.5 14.5 Across AA

Compressed Air Preparation Filter

With bowl guard C2SFm-CJ-D C3SFm-J-D C4SFm-J-D Polycarbonate, Stainless steel Normally closed (N.C.)

Vacuum System Peripherals:

When ordering the mixed specifications of single and double solenoids, Specify the wiring. 11 11 stations 2 to 19 stations Both sides ... ... When creating the mixed specifications, complete the stations table on the right. 19 19 stations When creating the special specifications, complete the stations table on the right.

XM, XY

H J K P.C.D L1 8 x 8.4 L2 XMC-50 XMC-63 XMC-80 70 88 90 29 36 44 P.C.D 92.1 10.5 9 9 486 Stainless steel High Vacuum Angle/In-line Valve XMC, XYC Series Dimensions XYC-25, 40/In-line type C D G C B J H 45 E A Fn (KF flange) (mm) Model A 85 115 B 48 66 C 1 2 D 23.5 38 E 40 55 Fn G 64 84 H J XYC-25 XYC-40 100.2 130 26 41 28 36 XYC-50 to 80/In-line type C D G Fd XLA C XL (K flange) XLQ

Cylinder with Lock Series MNB

81 22 55 25 100 to 1000 40 41 16 114 189 89 30 20 19 37.5 26 116 20 17 177 37 1/4 170 96 26 Bore size (mm) LD T N P S V LH LS LT LX LY LZ K MM Q H VA W X Y ZZ J 32 34 27 1/8 154 6.5 7 30 198 3.2 32 57 50 6 M10 x 1.25 37 47 13 6.5 22 9 232 M6 x 1.0 40 39.5 27 1/4 161 8 9 33 209 3.2 38 64.5 55 6 M14 x 1.5 41.5 51 16.5 9 24 11 247 M6 x 1.0 50 47 31.5 1/4 183 9 9 40 237 3.2 46 77.5 70 7 M18 x

MRHQ

= 2/t (: Angular speed at the end) : Rotation angle (rad) 1/2 x 0.05 x (2 x (3.14/2)/0.2)2 = 0.0062 0.0062 J < Allowable energy OK Refer to Moment of Inertia Calculation and Allowable Kinetic Energy on page 12-11-12. t: Rotation time (s) 12-11-6 7 Rotary Gripper Series MRHQ Gripping Point Gripping Point Range Limit Graph (1) External gripping External Gripping Internal Gripping MRHQ10 MRHQ10

15

Motor flange Body side hub [Built-in parts] Spider [Built-in parts] Size: 25 Hub Mounting Dimensions [mm] Size: 32 Hub Mounting Dimensions [mm] Size: 40 Hub Mounting Dimensions [mm] Motor type MM TT PD FP NZ M2.5 x 10 1.00 8 11 NY M2.5 x 10 1.00 8 11 NX M2.5 x 10 1.00 8 5.5 NM1 M3 x 4 0.63 5 11 NM2 M2.5 x 10 1.00 6 11 Motor type MM TT PD FP NZ M3 x 12 1.5 14 17.5 NY M4 x 12 2.5 11 17.5 NX

Series MXP/MXPJ6 11- ø6, ø10, ø12, ø16 22- Air Slide Table

port Y J 3 M3 x 0.5 Vacuum suction port Z Max. 9.5 (Rubber stopper) 2.4 3.5 depth 2 2.5 +0.030 0 7 +0.030 0 depth 2 2.5 Q QL Without magnet and switch rail 2 2 x M2 x 0.4 depth 2.2 12 11-/22-MXP6-10 Metal stopper Max. 10.5 F 4 x M3 x 0.5 depth 3 12 2 x M2 x 0.4 depth 3 (mm) E F H J M Q QL S W Y Z AA Model 23 25 38 33.5 37 28 8 5 42 23.5 45 2 11-/22-MXP6-51 30 35 53 48.5 47 37 11 10 42 30

11- Series MXP/MXPJ6 Air slide table 22- ø6, ø10, ø12, ø16

2-M3 x 0.5 (Plug: M-3P) 6 (fitting seat surface dimension) 170.05 M3 x 0.5 Vacuum suction port Stroke: S M 1 Mounting base side B D Piping port 2-M3 x 0.5 A 5 5.5 A 3.2 J 2.4 Z Section AA 3.5 Depth 2 2.5 +0.030 0 7 +0.030 0 Depth 2 2.5 Q QL 11-/22-MXPJ6-10 4M3 x 0.5 depth 3 F (mm) E F H J M Q QL S Z Model 23 25 38 27 37 28 8 5 44 11-/22-MXPJ6-51 30 35 53 42 47 37 11 10 59 11-/22-MXPJ6-10

REC

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com RHC MK(2) RS Q G RS H A RZQ MI W S CEP1 CE1 CE2 ML2B Velocity curve C J G5-S CV Sine cylinder Speed Conventional cylinder MVGQ Time CC RB J D-X Allows high speed transfer of work with dramatically reduced shock/impact.

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.

Vacuum

Model A c o E F G H J K L M N 2F810105 26 53 54 22.5 12.5 24 17 -5 1 5 50 15.514.4 12.8 8,5 zFB101-07 242 17.7 114" zFB201-07 52 28 24.51 13.s1 27.21 19.71 t6 G1 17.5116.6115.21 1t4" 9.5 zFB301-11 30 70 27 14.5go.221.7 17 21.5 s 18.53A 11 zFuol-13 64.5 34 8?.