Air Cylinder Series CG1 ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

I J 25.3 37 26 5 14 8 12.5 15.5 Up to 350 18 13 12 2 12 12 35 M4 x 0.7 depth 7 20 40 31 28.3 10 12.5 6 16.5 19.5 Up to 400 22 17 14 2 12 12 40 M5 x 0.8 depth 7.5 25 38 43 12 6 31.3 12 19.5 20 Up to 450 22 17 18 2 12 12 40 M5 x 0.8 depth 8 32 47 8 38.3 52.5 15 27 26 16 Up to 800 30 19 25 2 13 13 50 M6 x 1 depth 12 40 44.5 58.5 58 11 32 20 16.5 32 Up to 1200 35 27 30 2 14 14 58 M8 x 1.25 depth

A

38 12 14 EXH Port Size 12 14 38 38 12 INSTALLATION Pilot EXH Port Size 18 The Booster Regulator should be installed with its piston in a horizontal position.

HRX-OM-O021

The weight will increase by 1kg when option J [Automatic fluid filling] is selected. 12 For option J [Automatic fluid filling port]. 13 Copper, bronze and brass is not included when option M [DI water piping] is selected. 14 In case of option B [Earth leakage breaker], the breaker is changed to an earth leakage breaker. 15 For water -cooled type.

CRQ2

IC circuit Reed switch Solid state switch A96 A96V 5 V Grommet Yes Relay, PLC A93 A93V 12 V 2-wire 24 V 100 V 3-wire (NPN) M9N M9NV 5 V, 12 V IC circuit 3-wire (PNP) M9P M9PV 2-wire M9B M9BV 12 V Relay, PLC 3-wire (NPN) F9NW F9NWV 5 V, 12 V 24 V IC circuit Grommet Yes Diagnostic indication (2-color) 3-wire (PNP) F9PW F9PWV F9BW F9BWV 12 V 2-wire Water resistant (2-color) F9BA Although it

Prevents Micro-Bubbles

Symbol 00 06 07 08 10 11 10 11 12 13 12 13 19 12 13 19 Tubing size Plug Tubing size Plug Body class Body class Symbol 2 3 4 5 Body class 2 3 4 5 2 to 5 2 to 5 LVC 6 1/4" 6 1/4" LVA 2 2 8 8 10 3/8" 10 3/8" Base type LVH A Stacking type 10 3/8" 10 3/8" Manifold stations LVD 3 3 12 1/2" 12 1/2" 02 2 stations LVQ 12 1/2" 12 1/2" 05 5 stations 4 4 LQ 19, 3/4" 19, 3/4" 12 1/2" 12 1/2" LVN 5

HRX-OM-R016

Projection is not included. 12 Weight when the circulating fluid and facility water (for water-cooled type) is not included. The weight will increase by 1kg when option J [Automatic fluid filling] is selected.

Cylinder

58 63 1 68 J 73J 83 , 66 71 76 81 1 91 i 10 . . " ISore size A' ~i I D O'( A B e GA GB K MM CX E NN CK CU OC~ CH ' ,o j ' 1 Cr H I J (mni) .~ , ~ 6 7 9 14 16.5 3 1 0.5 11 M3 XO .S M10 X 1.0 6 17 , 6 18.5 20.4 3 16 4 12 1.6 18 3.4 8 26 ~-13 ( 10 10 20 5 M4XO.7 MlaXl.0 6.5 1.6 24 6 I 17 8 20,5 1 239 4.5 20 I 7 33 R l l~ . 5 L29 13.5. 12 24.5 6 15.5 6 18.5 M5 XO .8 M14 X 1.0 17 2.9 42 14 I

LEC-OM02704CN

AC DC 2. 12 3 12 (2) ()40 10(555) (12.1) A P (12.1) KT [m2] [W] [] [56] A P T K (12.1),P 12.1A 12.1 40() () () 12.2 12 4 12 12.3 (AE6)OFF 10 11000 (EMG) (EMG) 12.3.1 (1) 12.3 (12.2) ((2)(a)(b)) ON (EMG) (EMG) OFF V0 te 12.3 t 1J Lmax V L 0 (12.2) e 60 J M Lmax VO JM JL te [mm] [mm/min] [kgcm 2] [kgcm 2] [s] [s] 7kW10ms11k22kW (50ms) 12 5 12 (2) (12.2) (a) 200V 25 73

MXW

Z MXW12-50 88 58 50 35 84 205 MXW12-75 103 63 55 40 89 230 Note) Adjuster bolt (Y) shown in the section above is attached only on type B (with shock absorber). 8-7-12 13 Long Stroke Slide Table Series MXW Dimensions: MXW12 Stroke 100, 125, 150 mm Operating port 2-M5 x 0.8 Width across hexagon socket hole 2.5 J 12 6.5 MX MTS MY Width across flats 8 5H9 +0.030 depth 4.5 0 CY 6-M4 x 0.7 thread

LEC-OM07605CN

PA03] 1 0:() 1:() 12 3 12. 12.3 15PN ONON 12.4 12 4 12. 12.4 (1) CN4 (2) LEC-MR-BAT6V1SETCN4 LEC-MR-BAT6V1SET LEC-MR-BAT6V1SET 12 5 12. 12.5 (MR Configurator2) Monitor"-"ABS Data Display" 12 6 13.

CE2

G5-S CV MVGQ CC RB Rod side flange, Head side flange Rod side flange Single clevis, Double clevis Double clevis Center trunnion Bore size (mm) 40 50 63 80 100 J CD H10 Z TZ TX CZ BB Z B FX U FD FV RR FZ FT CX L TDe8 FY 224.5 117 15 10 15 85 29.5 299.5 71 80 16 9 60 10 100 12 30 42 76.5 + 0.058 0 + 0.3 + 0.1 0.032 0.059 D248.5 127 18 12 15 95 38 328.5 81 90 19 9 70 12 110 12 35 50 88.5 +

Table of Contents

Exploded view: VQ1000-Plug-in Unit (F, P, J, L, Skit) . Exploded View: VQ2000-Plug-in Unit (F, P, J, L, G, S kit) . Exploded View: VQ0-Plug Lead Unit (F, P, C, S kit) .

Fluoropolymer Piping Equipment

E H J L N M W (T) X Min. port size LQ1F41 12 28 30 53 60 21 33.1 34 12 10 9.4 LQ1F42 10 58 7.4 LQ1F51 19 32 36 58 65.2 26 40 41 14 16 15 LQ1F52 12 63.2 9.4 LQ1F61 25 39.5 36 69 81.5 49 51 14 22.5 21.2 LQ1F62 19 15 3 SMC (W) (M) N J SMC 3/4 19 X H (E) (T) Class 4, 5 JIS 10K flange W Note) H Inch sizes Model Applicable tubing O.D.

Series VQ Base Mounted Metal Seal/Rubber Seal

Name Material Number VVQ2000-80A-1 VVQ2000-80A-2 VVQ2000-80A-3 VVQ2000-80A-4 Gasket Packing Clamp screw Clip 12 12 12 12 Note) A set of parts containing 12 pcs.each are enclosed. NBR NBR Carbon steel Stainless steel !0 !1 !2 !3 !4Fitting Assembly No. (For cylinder port) VVQ100051A !5Fitting Ass'y No.

Vacuum System Peripherals:

) Diaphragm reed switch (100 VAC) 1 point setting M21 Note) Low wattage type is,12, 24 VDC.

Compressed Air Preparation Filter

With bowl guard C2SFm-CJ-D C3SFm-J-D C4SFm-J-D Polycarbonate, Stainless steel Normally closed (N.C.)

Cylinder with Lock

8, 12, 16)2 65 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 70 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 75 + 30 (n 4) 2 (n = 4, 8, 12, 16)2 2 (Different surfaces, same surface) 1 70 75 80 85 95 D-A9 n 70 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 75 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 80 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 85 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 95 + 40 (n 4) 2 (n = 4, 8, 12, 16)2 2 (Different surfaces

MXW Series Long Stroke Slide Table

25 138 328 6 95 81 2 141 176 149 MXW8150 32 32 45 168 378 7 120 106 2 145 MXW Series Long Stroke Slide Table Dimensions MXW 12 Stroke: 50, 75 Operating port 2-M5 x 0.8 (mm) Width across hexagon socket hole 2.5 J 12 Scale: 30% 6.5 Width across flats 8 5H9 +0.03 depth 4.5 0 Operating port M5 x 0.8 Operation direction A 6-M4 x 0.7 thread depth 6 (Helisert) 6 (Plug : M-5P) 58 46 27 24 5 26

Slider Type/Ball Bushing Bearing

C Q + Stroke Shock absorber Shock absorber RB0805 Side plate Section IF (CY1L6) (mm) A B D d C EA FA EB Model G HP J JK FB GP H HB HG HI HO HS HT HA CY1L6 CY1L10 7.6 8 3 6.5 7 M4 x 0.7 6 26 6.5 36 27 10 11 9 25 14 16 5 12 10 4 8 8.5 M5 x 0.8 6 3 12 7.5 33 9.5 5 50 34 17.5 14.5 13.5 33 21.5 18 6 PA (N) (NA) (NB) RW Q Z W tb ta T PB MM NN M L QW LD Model CY1L6 CY1L10 TT PW 12 54 68 56 10

High Vacuum Angle Valve

A XLFV: Air operated, With solenoid valve J N M Port 1(P) K L Port 3(R) Solenoid valve [mm] Model J K L M N XLFV-16-2 41 18.5 8.5 2.7 3 XLFV-25-2 45.5 22.5 8.5 2.7 3 XLFV-40-2 54.5 35 8.5 2.7 3 XLFV-50-2 71 35.5 12 4 2 XLFV-63-2 80.5 44 12 4 2 XLFV-80-2 90.5 60 12 4 2 13 Aluminum High Vacuum Angle Valve Double Acting, O-ring Seal RoHS XLG Series How to Order q w e r t y u XLG 2 M9N 16 A XLG