MQQ

G5-S CV MVGQ CC RB J D-X 20Data 10-5-19 19 Series MQM Dimensions Basic style: MQMLB 6 Mounting nut M12 x 1 Rod end nut 2-M5 x 0.8 15 M4 x 0.7 13 4 11 16 15 8 21 4.5 11 66 + Stroke 27.5 93.5 + Stroke 10, 16, 20, 25 Mounting nut Rod end nut G1 G2 NN 2-P I NA D J N2 N1 A F MM F S + Stroke H ZZ + Stroke Bore size (mm) NN A P D MM F G1 G2 S ZZ I H J N1 N2 NA 10 M12 x 1 15 M5 x 0.8 4 M4 x 0.7

Fluoropolymer Piping Equipment

E E H J K L1 L1 L2 L2 M Min. port size t W1 W2 LQ3P1A 1/8" 10 9 11 6 14.5 23.5 22.5 58 56 14 2 8 16 17 LQ3P2A 1/4" 17 16 16 7 20.5 28 27 69 67 20 4 8 21 24 LQ3P3A 3/8" 22.5 19.5 21 7 24.5 39 36 89 83 25 6.4 8 26 28 LQ3P4A 1/2" 24.5 22.5 24 9 30.5 44.5 42.5 100 96 29 9.5 8 32 36 LQ3P5A 3/4" 26.5 24 32 9 36.5 50.5 48 117 112 37 16 13 41 43 LQ3P6A 1" 30 26 41 10 48.5 60 56 136 127.5 49 22 13

Environment

(MB) MA MC MD Section XX 11LEJS XB XA H9 XA 25ALEC [mm] Size Stroke range [mm] A B C D EH EV FH FV GH GV H J K L M O1 LEC S 25 15 to 100 130.5 116 13 20 44 45.5 57.6 56.8 66.2 139.5 M8 x 1.25 24 17 14.5 34 M5 x 0.8 101 to 400 155.5 141 LEC SS-T 32 20 to 100 148.5 130 13 25 51 56.5 69.6 78.6 76.2 173.5 M8 x 1.25 31 22 18.5 40 M6 x 1.0 101 to 500 178.5 160 LEC Y Size Stroke range [mm] R OA

Integrated Controller

13 14 Cable/Right angled connector mounting view5 ML + Stroke 24.5 Required Space5 [mm] 4 Cable connector type J Straight 115 3 H9 (+0.025 0 ) 3 XX (2:1) 1 The range of movement of the rod according to the movement instructions.

CE2

RE A B Mounting bracket nut Unit holding tie-rod Bore size (mm) Nut Width across flats REC Socket Width across flats Socket JIS B 4636 2 point angle socket 10 10 40 JIS B 1181 Class 3 M8 x 1.25 JIS B 4636 CX 13 2 point angle socket 13 JIS B 4636 2 point angle socket 13 50 13 CY JIS B 4636 2 point angle socket 13 JIS B 4636 JIS B 1181 Class 3 M10 x 1.25 63 17 13 2 point angle socket 17 MQQ

A

37.5 70 65.5 50 54 54 8.5 10 .5 70 2.3 52.5 NAR5000 90 168 48 90 75.5 70 66 65.8 11 13 90 3.2 52.5 NAR6000 95 204.5 48 95 78 70 66 65.8 11 13 90 3.2 D I M E N S I O N S NAR2001 ~ NAR4001 Bracket Port Size Model Part Size A B C D E Bracket Dimensions N F G H J K L M NAR2001 1/8 1/4 40 95 17 40 35 30 34 44 5.4 15.4 55 2.3 33.5 NAR25O1 1/4 3/8 53 102.5 25 48 32 30 34 34 44 5.4 15.4 55 2.3

C76

0.65 J Auto Switch Mounting, Minimum Possible Cylinder Stroke Band Mounting Type (mm) No. of auto switches Auto switch model 2 pcs. n pcs. 1 pc.

C76

1.2 J Auto Switch Mounting, Minimum Possible Cylinder Stroke Band Mounting Type (mm) No. of auto switches Auto switch model 2 pcs. n pcs. 1 pc.

ZPT/ZPX

Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Buffer mounting (Male thread) Buffer mounting (Male thread) Mounting Male thread Female thread Female thread Vacuum entry port Female thread Common Female thread Female thread Female thread P. 13-11-91 to 92 P. 13-11-86 to 88 P. 13-11-86 to 88 P. 13-11-89 to

IDU/IDF

63 L 20 Drain tube K H 4-13 [200 to 240VAC specification] Power cord outlet Model Port size A J B C D E F G H K L IDU3D IDU4D 246 496 509 87 125 344 23 175 151 206 356 44 67 Rc 3/8 242 591 606 31 170 469 13 171 179 202 446 44 67 : Power source 200 to 240VAC 3 Refrigerated Air Dryer Series IDU Small IDU6D, 8D Compressed air inlet Compressed air outlet (315) 600 (60) 220 (141) (445) (85) Illuminated

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

Decimal display Hexadecimal display 10 A 11 b 12 c 13 d 14 E 15 F Note 4) Applicable to non-magnetizing lock. 576 Programless Controller LECP1 Series Controller Details e r No.

Series IDG

165 13 (B) Purge air for dehumidification Drain Drain 9 (Maintenance space 100mm or more) With fittings for purge air discharge (Option: P) Purge air discharge tubing port for dew point indicator F Applicable tube O.D.: 8 5/16 inch Port size: 1/4, 3/8 (59) IN OUT With float type auto drain H (D) Model Option: P B With drain guide F D J 361 206 293 337 IDG30M, 30HM, 30LM IDG50M, 50HM, 50LM

MVGQ

MVGQM, MVGQL Common Dimensions ML2B Applicable solenoid valve B C DA G GA H J K L MM ML NN Q R S T V W X YY YL Z Bore size (mm) Standard stroke (mm) TA TB U Over 10 st 10 st C J G5-S 12 6 29 50 13 18 58 39 22 56 2 5 36 40 14 7 12 29 5 48 20 30 16 M4 x 0.7 10 M4 x 0.7 M4 x 0.7 10, 20, 30, 40, 50, 75, 100 16 CV 8 33 54 64 15 22 43 25 62 2.5 5.5 38 42 16 8 13 33 7 52 23 30 18 M5 x 0.8 13 M5

MXW

-www.stevenengineering.com CX 38 5 22 12 D(Y) -X (Y) 25 40 84 L 20Data 10 13 13 K A 30 24 15.8 A 3 Z NN-M4 x 0.7 thread depth 8 Bottom through-hole 3.3 (N 1) x H G H 6 Bottom through-hole 3.3 N-M4 x 0.7 thread depth 8 GG HH depth 4.5 5H9 +0.030 0 5H9 +0.030 depth 4.5 0 F E (mm) F G Model E J GG H HH NN K L N Z MXW8-75 106 64 71 92 19 30 1 31 45 5 228 MXW8-100 112 98 106 115 34 32 1 56

7ND9071en

13 6 M20x1.5 M20x1.5 30 140 A1 (G1/4) A3 (1/4 NPT) AR (Rc 1/4) 55 G (1/2 NPT) 49 23.5 (35.4) M6/10 19 G1/4 6 (3 pcs) 5/16 UNC/13 77 26 30 6 26.8 52 45.5 77.5 31 33 33 (35.4) 26.8 135 28.25 14.5 F05-50 39.5 30 12 1/2 NPT 42 24.5 G1/4 or 1/4 NPT VDI/VDE 3845 Option J 100 73 ND9200, ND7200 ND9200/D, ND9200/I, ND9200/K and ND9200/B min. 60 ND9200, ND7200 Linear actuator 28 The feedback lever

CHKD/CHKG

Dimensions CHKDB--XC61 F with effective thread depth G Width across flats f C D d a Width across flats E b e g H h + Stroke X with thread depth Y Note) J C B + Stroke Rod end male thread A + Stroke A B C D d E F G H J X Y Bore size (mm) 20 53 43 10 12 11 10 M6 x 1 8 5.5 6.5 M6 x 1 12 25 56 45 11 14 13 12 M8 x 1.25 10 6.5 7.5 M6 x 1 12 32 63 51 12 18 15 13 M10 x 1.5 12 7 8.5 M8 x 1.25 16 40

Vacuum Pad

A B D Weight [g] ZP3P-T25PTSFK10-B5 33 69 23 28.5 ZP3P-T25PTSFK20-B5 43 107 51 42.2 ZP3P-T35PTSFJM-B01 ZP3P-T35PTSFKM-B01 ZP3P-T35PTSFJ10-B01 ZP3P-T35PTSFK10-B01 ZP3P-T35PTSFK20-B01 ZP3P-T35PTSFJ20-B01 Width across flats 13 Rc1/8 Width across flats 13 Width across flats 13 Rc1/8 Width across flats 13 K: Non-rotating D-D J: Rotating D-D B B Width across flats 19 Width across flats 19 D D D

Basic Type/Direct Mount Type

A (Operating direction) CY3RG20 (mm) B 6.5 8 9.5 9.5 11 11 14 14 F 6.5 8 9 8.5 10.5 13 17 18 HP 11 14.5 20 25 32 35 HR 24 30 36 41 51 62 80 90 HS 5 8.5 7.5 6.5 7 8 9 9.5 HT 28 33.5 41 50 56 63.5 L 38 53 62 70 76 90 110 118 C 3.2 4.2 5.2 5.2 6.5 6.5 8.2 8.2 G 4 5 6 6 7 7 8.5 8.5 K 9 14 11 15 13 15 25 24 CB 2 2 3 3 3 5 5 5 GP 27 33 39 44 55 65 83 95 J x E M4 x 0.7 x 6 M5 x 0.8 x 7 M6 x

CXS

side: Same) 2-M5 x 0.8 depth with 4.5 (Piping port) (Opposite side: Same) 3 8 6 22.5 11 Z (10 + 1/2 ST) (13) 4 (mm) Z S SS ZZ Stroke Model 10 15 23 55 68.5 CXS6-10 20 20 33 65 78.5 CXS6-20 30 25 43 75 88.5 CXS6-30 40 30 53 85 98.5 CXS6-40 50 35 63 95 108.5 CXS6-50 15 Series CXS Dimensions: 10, 15 Stroke ZZ SS 9 J D B M Y (Hexagon socket head set screw) L Z I 1 1 G 0.2 (G) H A P 6.3 5 X (

C95Series

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