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to 1 00 Double rcd o12, a16/5 b 30 o2O, a25/5 b 50 o32,a4ol51o IOC) o50 to 61 00/1 0 to 1 0O Singleacting Spring return/extend s 1 2 1 0 6 4 U 5 , 1 0 o50h0.20 Ion.rotating rod Double acting Singl rod o12, @16/5 lD 30 o20, @295to 50 o32, o4ol510 1OO o50, 0631 0 to 1 00 Double rod s12, s1615 lo 30 o20 lo o40l5 to 50 o50, a6310lo 50 @Actuation Doude acting Srngle acting spnng refurn Single

Electric Actuator High Rigidity and High Precision Slider Type Circular arc grooves allow for high rigidity and high precision. Moment resistance*1 *2 61% Improved by up to Table displacement*1 50% Reduced by up to With internal battery-less absolute e

Lead 20: LEKFS40EA Lead 30: LEKFS40EH 20 10 10 0 0 0 100 200 300 400 500 600 0 200 400 600 800 1000 1200 Speed: V [mm/s] Speed: V [mm/s] 5 Model Selection LEKFS Series Battery-less Absolute (Step Motor 24 VDC) SpeedWork Load Graph (Guide) For Battery-less Absolute (Step Motor 24 VDC), Motor Parallel Type * The following graphs show the values when the moving force is 100%.

Free Mount Cylinder

T S T S T S T S T S T C(D)UK6C(D)UK10C(D)UK16C(D)UK20C(D)UK25C(D)UK32For the auto switch weight, refer to page 68 to 72.

Thermo-chiller/Rack Mount Type

0 !1 w !2 y u !3 !4 i !5 !9 !6 !7 @0 @1 !8 No.

Air-hydro Unit

1 2 3 0 1 2 3 0 1 2 3 2 0 1 2 3 0 1 2 3 0 1 2 3 2 0 1 2 3 0 1 2 3 2 0 1 2 3 0 1 2 3 2.9 3.4 3.6 3.5 3.5 3.4 3.6 3.5 3.5 3.4 3.6 3.5 3.5 4.5 5.0 5.2 5.1 5.1 5.0 5.2 5.1 5.1 5.0 5.2 5.1 5.1 5.6 6.8 7.2 7.0 7.0 6.8 7.2 7.0 7.0 23.4 24.6 25.0 24.8 24.8 24.6 25.0 24.8 24.8 1 63 S 2 3 0 1 S 2 100 3 0 1 L 2 0 1 160 L 2 Air-hydro Converter Weight (kg) Effective oil level stroke CCT40 CCT63 CCT100

CJ2-Z 10-/11- Series 21-/22- ø10, ø16 Air Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators GC GA NN MM Piping port 3 x M5 x 0.8 9 CA F A T NB 0 80.3 0 BA0.3 Z + Stroke S + Stroke NA H 10, 16 NDh8 Mounting nut Y Section Y detail GB GC GA Relief port M5 x 0.8 Rod end nut NN Piping port 2 x M5 x 0.8 Piping port M5 x 0.8 CA CB MM D BA 0 0.3 BB 0 0.3 BA 0 0.3 BB 0 0.3 Head cover port location Axial (R) Z + Stroke S + Stroke NB H NA F

C76

TW 34.5 42.5 WH 38 45 Eh8 EE G 9 12 H 58 69 HR N 17(19) 22(25) NB 34.5 42.5 S 68 89 XB 47 57 XC ZZ 140 174 SW 17 19 TC M8 x 1 Bore 30 0 0.033 +0.036 0 10 32 40 97 122 M30 x 1.5 G 1/8 23.8 12.2 M10 x 1.5 38 0 0.039 +0.043 0 12 M38 x 1.5 G 1/4 28.3 14.2 M12 x 1.75 M10 x 1 ( ): In the case of air cushion With Rod Boot (mm) Item h 1 to 50 77 88 AM C e f K KK Stroke Bore 51 to 100 101 to 150

C76

258-9200-www.stevenengineering.com KK TDH9 4-TC 1.5 KW 1.5 TW N AM N FA KV S + Stroke FB H Rail mounting type (A) Band mounting type (B) or non-magnet ZZ + Stroke C76KE Non-rotating, Piston rod KA Rod cross section (mm) XB WH TDH9 TW TC SW NB N KW KV KK KA K HR H G FB FA Eh8 EE D C BE AM Bore 30 0 0.033 38 0 0.039 10+0.036 0 12+0.043 0 32 47 38 34.5 M8 x 1 17 34.5 17 7 38 M10 x 1.5 12.2

LG1H

of gravity (mm) a = 3000 2000 m L1 0 10 20 30 Transfer load m (kg) L2 600 L2 (mm) 400 Mer Rolling Yawing m 200 L2 Mer 0 10 20 30 Transfer load m (kg) m 4000 a = 1000 L3 (mm) L3 a = 3000 a = 2000 2000 m Mey a 0 10 20 30 Transfer load m (kg) Refer to page 183 for deflection data. 148 3 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650)

Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

3 e $2 q $0 #9 !8 u i o y !0 @8 @3 !1 $1 #0 r MY2H16 MY2HT16 $5 !4 @5 !9 @3 !5 #1 @4 $4 !2 $3 #3 #5 #6 @0 #4 #7 !7 #2 @6 @7 Component Parts Note No.

MB

E1 L1 R1 E1 L1 MM NDH10 NX U1 NDH10 NZ A A1 R1 U1 MM NX CA2 30 40 50 65 65 100 32 40 50, 63 80 100 125 32 40 50, 63 80 100 125 20 22 28 40 40 46 I-03M I-04M I-05M I-08M I-10M I-12M Y-03M Y-04M Y-05M Y-08M Y-10M Y-12M +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 0.10 0.30 +0.058 0 +0.058 0 +0.070 0 +0.084 0 +0.084 0 +0.084 0 +0.30

HRX-OM-W002

0 0 0 0 0 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 10 20 30 40 0 0 10 20 30 40 0 0 0 0 10 20 30 40 0 10 20 30 40 [] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] Circulating fluid temperature[] [] 0 10 0 10 20 30 40 Circulating fluid temperature[] Circulating fluid temperature[] 60Hz 60Hz Circ 60Hz 50Hz Circulating fluid temperature

0.4

(D-sub connector) y u @0 i o !

ZP

A10 U C ZPT32 -0-A10 U C ZPT20 -0-A10 ZPT25D10-0-A10 20 23 1.7 40.5 90.5 91.5 23 14 23 4 ZPT25D20-0-A10 25 28 1.8 50.5 128.5 129.5 51 ZPT25D30-0-A10 32 35 14.5 23.5 4.5 2.3 60.5 138.5 139.5 ZPT25D40-0-A10 70.5 174.5 175.5 Dimensions by Stroke 77 ZPT25D50-0-A10 80.5 184.5 185.5 20, 25 32 Model F F H E E G: 4 G: 6 G: 4 G: 6 U C ZPT 10-0-A10 35 85 86 34.5 84.5 85.5 23 ZPT 20-0-A10 U C ZPT 30

VQ4000

800) 258-9200-www.stevenengineering.com 0 5 VQ43 0 Metal seal 0.23 45 or less 47 or less 5.9 1.5 47 or less 6.3 0.18 1.6 0.28 (0.34) Closed center 0 5 VQ43 1 Rubber seal 0.34 50 or less 52 or less 7.0 1.9 52 or less 6.4 0.42 1.9 VQ4000 Rc 3/8 0 5 VQ44 0 Metal seal 0.18 45 or less 47 or less 6.2 1.5 47 or less 6.9 0.17 1.7 Exhaust center 0.28 (0.34) 0 5 VQ44 1 Rubber seal 0.38 50 or less 52

V

S TA N D A R D T Y P E F O R E X T E R N A L P I L O T T Y P E A S S TA N D A R D S P O O L 0 Metal 1 Rubber Courtesy of Steven Engineering, Inc. !

Series AK1000

4 inch NPT) B Code Material PCTFE (Standard) Vespel 3) PEEK PTFE 4) 5) 0 2P 3P 4P 4PL 5PC No code VS PK TF V3 1 2 10 40 -30 in.Hg to 30 psig -30 in.Hg to 100 psig 0 to 200 psig 0 to 1000 psig 0 to 4000 psig -0.1 to 0.2 MPa -0.1 to 0.7 MPa 0 to 1.5 MPa 0 to 7 MPa 0 to 28 MPa Refer to the following porting configurations.

Non-rotating Double Power Cylinder/ Double Power Cylinder (without non-rotating mechanism) Series MGZ/MGZR ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100 1

to 450 Graph (1) Graph (2) Graph (3) Graph (4) Graph (5) Graph (6) Graph (7) Graph (8) Selection Graph (1) to (3) (Vertical upward load) Graph (1) up to 300 mm/s Graph (2) up to 500 mm/s 600 500 80 80 500 400 Load weight m (kg) Load weight m (kg) 400 63 63 300 300 200 50 50 200 40 40 32 25 20 100 32 25 20 100 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1 0 0.1 0.2 0.3 0.4 0.5 0.6 0.7 0.8 0.9 1

MB1

This may cause damage to the machinery. ) m m ( e z i s e r o B e v l a v n o i h s u C s t a l f s s o r c a h t d i W h c n e r w n o g a x e H 0 5 , 0 5 , 2 3 7 4 2 1 C 0 1 2 3 B M 5 . 2 5 . 2 y e k h c n e r w n o g a x e H 0 0 1 , 0 8 , 3 6 0 5 2 1 C 0 1 3 6 B M 4 4 y e k h c n e r w n o g a x e H Mounting & Piping 2. Be certain to activate the air cushion at the stroke end.

RHC

C J G5-S 100 CV 250 = 0.7 200 MVGQ 0.5 0.1 0.3 150 CC 100 50 RB 0 1,000 2,000 3,000 J Maximum speed Vmax (mm/s) : Cylinder load ratio Vmax: Maximum speed (Refer to page 10-6-5.) D-X 20Data 10-6-19