Magnet: D (Built-in), Mounting: F (Front Flange), Bore Size: 40mm, Stroke: 100mm, Cushion: Rubber Bumper, Rod Boot: None, Lock Style: HL (Rear End Lock Locking Style), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Basic Style), Style: N (Non-lube Rubber Bumper), Bore Size: 32mm, Stroke: 100mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: L (Locking), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: L (Axial Foot), Style: N (Non-lube Rubber Bumper), Bore Size: 20mm, Stroke: 100mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: L (Locking), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: D (Built-in), Mounting: B (Basic Style), Style: N (Non-lube Rubber Bumper), Bore Size: 20mm, Stroke: 100mm, Rod Boot: w/o Rod Boot, Lock Position: H (Rear Lock), Release of Manual: L (Locking), Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: L (3m)

Magnet: Built-in, Mounting: Axial Foot, Style: Non-lube Rubber Bumper, Bore Size: 20mm, Stroke: 100mm, Rod Boot: w/o Rod Boot, Lock Position: Rear Lock, Release of Manual: Locking, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Auto Switch Mounting Bracket: -

Magnet: Built-in, Mounting: Basic Style, Style: Non-lube Rubber Bumper, Bore Size: 20mm, Stroke: 100mm, Rod Boot: w/o Rod Boot, Lock Position: Rear Lock, Release of Manual: Locking, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Auto Switch Mounting Bracket: -

Magnet: Built-in, Mounting: Basic Style, Style: Non-lube Rubber Bumper, Bore Size: 32mm, Stroke: 100mm, Rod Boot: w/o Rod Boot, Lock Position: Rear Lock, Release of Manual: Locking, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Auto Switch Mounting Bracket: -

Magnet: Built-in, Mounting: Front Flange, Bore Size: 40mm, Stroke: 100mm, Cushion: Rubber Bumper, Rod Boot: None, Lock Style: Rear End Lock Locking Style, Auto Switch: M9B--Solid State, Gen. Purpose, 2 Wire, Horizontal, Lead Wire or Prewired Connector: 3m, Number: -, Auto Switch Mounting Bracket: -

Series SY100 3 Port Solenoid Valve Rubber Seal

3 Port Solenoid Valve Rubber Seal Series SY100 Low power consumption: 0.5W (Standard, Without light) (Current draw: 21mA at 24V DC) SY Body width: 10mm Cv0.008 (Standard style) Cv0.012 (Large flow capacity style) SYJ Large flow capacity style:0.75W (Current draw: 31mA at 24V DC) VK VZ VT Exceedingly long life VT 100 million cycles (By SMC life test data) VP VG VP VQ VQZ VZ Vacuum Applications

Table of Contents

to 100 MGPL32 to 100 i !

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Description Bore size (mm) Stroke range Stroke range 20 to 100 5 to 95 Part no.: CBQ2B40-45DC-HL CBQ2B40-50DC-HL with 5 mm width spacer inside.

MG

to 100 MGPL32 to 100 i !

MGP

40 32 32 32 32 32 32 5 10 20 30 50 40 51 100 101 300 200 5 10 20 30 50 40 51 100 101 300 200 Stroke (mm) Stroke (mm) MGPL80, 100 MGPL80, 100 50 50 100 100 100 80 80 80 100 100 Load weight m (kg) Load weight m (kg) 80 100 80 10 10 80 5 10 100 20 29 30 49 50 300 200 5 10 100 20 29 30 49 50 300 200 Stroke (mm) Stroke (mm) Note: 1 kg = 2.2046 lb 1 in = 25.4 mm 10 Compact Guide Cylinder Series

MY1

) Backup plate Special resin Guide roller B Special resin Guide roller A Stainless steel (80, 100) MX #6 Special resin (63 to 100) #7 #8 #9 MTS End cover Nickel plated (80, 100) y Carbon steel (80, 100) (80, 100) Wear ring Special resin u i o !

MGP

5 20, 25 over 30 stroke under 100 stroke 12, 16 over 50 stroke @0 Under 50 stroke 20, 25 over 50 stroke Under 30 stroke 20, 25 over 100 stroke MGPM32 to 100 MGPL32 to 100 i !8 !7 u q y !1 !9 @3 !0 !2 @2 r o e !4 @4 @1 !0 w !3 y Over 50 Over 50 stroke t 32 to 63 over 50 stroke under 100 stroke 80, 100 over 50 stroke !

Clean Room Rodless Cylinder Series CYP ø15, ø32 1

[Nm] Class M3.5 [Class 100] 104 Tightening torque Model Screw size CYP15 0.3 M3 x 0.5 103 Class M2.5 [Class 10] CYP32 2.45 M6 x 1 102 Plate Class M1.5 [Class 1] 101 Stroke adjustment screw (inner cover) 100 0.01 0.1 1 10 Particle diameter (m) Flat head screwdriver Note 1) This chart indicates the level of cleanliness inside the measurement chamber.

Shock Absorbers and Rate Controls

6.4 22.2 M5 100 N/A fflf15xl.5 2fs63i Ofl Sorisr60.526.C 95.3 7 6.2 8.60 54.9 12.7 29.5 9.7 flA M8 370 I fl/A lMltb4x?

Rodless Cylinder for Vacuum Series CYV ø15, ø32 1

TB W Counterbore depth TC Inner cover holding screw Note) (mm) E 4 6 J M6 x 1 M10 x 1.5 LD 5.6 9.2 L 67 90 K 21 20 JK 10 12 HP 44 73.5 HL 37.6 63.3 HI 23 39 HA 23 39 H 45 75 G 10 9 F 12.5 25 EK 4 6 ED 9.5 13 C 6.4 10.2 B 10.5 16 A 8 12 Model CYV15 CYV32 +0.030 H9 0 +0.030 H9 0 Z 132 165 Y 2.5 3.5 W 69 115 TC 0.5 0.5 TB 15 22 TA 20 22.5 T 30 34 R 45 79.5 QW 48 83 Q 112 147 PC 10 12 PB 60 100

CYV

Table 1 100 Total operation cycles (10,000) 50 40 30 20 10 100 200 300 400 500 700 1000 Stroke (mm) Inner cover holding screw tightening torques [Nm] Tightening torque Model Screw size CYV15 0.3 M3 x 0.5 CYV32 2.45 M6 x 1 Plate Stroke adjustment screw (inner cover) Hexagon wrench Inner cover holding screw direction + direction 11 SMC'S GLOBAL MANUFACTURING, DISTRIBUTION AND SERVICE NETWORK

Rodless Cylinder for Vacuum Series CYV ø15, ø32

Impact acceleration [m/s] 5 0 50 100 150 200 250 300 Speed [mm/s] Relationship between speed and impact acceleration Features 1 in vacuum environments (1.3 x 10-Pa) Carefully designed for low particulate generation, low leakage, and low outgassing.