High Vacuum Angle Valve Inrush Current Flow Time (Reference) 200 V Current 100 V 0 5 15 10 20 25 30 Time [Second] 2 Mounting position of the heater Heater symbol XL-25-2 XL-40-2 XL-50-2 XL-63-2 XL-80-2 H4 (100C) (a) (a) (b), (c) (a), (b), (c) H5 (120C) (a) (b), (c) (b), (c) (a), (b), (c) (b), (c) (b) (a) (c) Heater (Option) 17 Aluminum High Vacuum Angle Valve: With Heat-resistant Auto Switch XLm Series Made to
Auto switch model Bore size (mm) 20 25 32 40 50 63 80 100 D-M9(V) D-M9W(V) D-A9(V) BMA3-020 (A set of a, b, c, d) BMA3-025 (A set of a, b, c, d) BMA3-032 (A set of a, b, c, d) BMA3-040 (A set of a, b, c, d) BMA3-050 (A set of a, b, c, d) BMA3-063 (A set of a, b, c, d) D-M9A(V) Note 2) BMA3-020S (A set of b, c, d, e) BMA3-025S (A set of b, c, d, e) BMA3-032S (A set of b, c, d, e) BMA3-040S
83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 10 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 SY D-sub connector: Conforms to MIL-C24308 Flat ribbon cable Terminal block (M3) 18 pins Terminal block
D-sub connector conforming to MIL-C-24308 (Refer to page 39.) Dedicated connector (Refer to page 39.) D-sub connector conforming to MIL-C-24308 (Refer to page 39.)
A: Acceleration time B: Constant velocity time C: Deceleration time D: Resting time (0.4sec.)
Electrical entry 24, 12 VDC/ 100, 110, 200, 220 VAC 24, 12, 6, 5, 3 VDC 24, 12, 6, 5, 3 VDC/ 100, 110, 200, 220 VAC Gasket assembly part no.
Cooling method Nil None C With inverter for compressor M Deionized water (Pure water) piping P With inverter for pump A Air-cooled refrigeration Power supply 20 3-phase 200 VAC (50 Hz) 3-phase 200 to 230 VAC (60 Hz) When multiple options are combined, indicate the symbols in alphabetical order.
HRS 100/150 Applicable model Dimension [mm] A B C HRSH250/300-A--A 916 536 1838 HRSH100/150/200-A--A 830 401 1538 HRSH100/150/200/250-W--A 570 1353 HRSH 090 HRSH HRSH HRSE HRZ HRZD HRW C HECR HEC 118 HEB A B HED HEA Option symbol With Earth Leakage Breaker B IDH HRSH 20 B With earth leakage breaker A leakage breaker is built in to automatically stop the supply power when it has short-circuit
200 Usable range CE2 100 100 Usable range ML2B 30 40 50 50 40 30 C J G5-S 20 20 CV 10 1 0 2 3 4 5 6 7 8 9 101112131415 10 1 0 2 3 4 5 6 7 8 9 101112131415 MVGQ Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CC RB 100 80 REA63 REA50 50 40 30 J REA40 REA32 DLoad weight W (kg) 20 REA25 -X 10 20Data 1 100 200
200 Usable range CE2 100 100 Usable range ML2B 30 40 50 50 40 30 C J G5-S 20 20 CV 10 1 0 2 3 4 5 6 7 8 9 101112131415 10 1 0 2 3 4 5 6 7 8 9 101112131415 MVGQ Distance from cylinder shaft center Lo (cm) Distance from cylinder shaft center Lo (cm) CC RB 100 80 REA63 REA50 50 40 30 J REA40 REA32 DLoad weight W (kg) 20 REA25 -X 10 20Data 1 100 200
R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.
L: L type plug connector with lead wire L: O type plug connector without connector T Y P E O F S E A L C O I L V O LTA G E 0 Metal 1 Rubber 3 110VAC (50/60Hz) 5 24VDC 6 12VDC M: M type plug connector without connector P I L O T VA LV E S P E C I F I C AT I O N S Note ) The C kit is applicable to 200/220VAC.
5 300 200 LEY32 Motor mounting position: Top/Parallel 200 W /60 (Motor rotation speed) (3600 rpm) (2400 rpm) A 16 1000 640 B 8 500 320 C 4 250 160 LEY32D Motor mounting position: In-line 200 W /60 (Motor rotation speed) (3750 rpm) (2400 rpm) A 20 1000 800 600 500 B 10 500 400 300 250 C 5 250 200 150 125 LEY63 Motor mounting position: Top/Parallel, In-line 400 W /60 (Motor rotation speed
CM2 Bore size (in) Model no. 150 (1.5") 200 (2") 250 (2.5") 325 (3/25") 400 (4") D-A5, D-F5 D-A6, D-J5 NBT-150 NBT-200 NBT-200 NBT-325 NBT-325 CG1 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com MB MB1 Connector type M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 CA2 2 1 Pin
CM2 Bore size (in) Model no. 150 (1.5") 200 (2") 250 (2.5") 325 (3/25") 400 (4") D-A5, D-F5 D-A6, D-J5 NBT-150 NBT-200 NBT-200 NBT-325 NBT-325 CG1 MB MB1 Connector type M8-3 pin M8-4 pin M12-4 pin 1 2 1 4 CA2 2 1 Pin arrangement CS1 3 4 4 3 3 C76 JIS C 4524, JIS C 4525, IEC 947-5-2, NECA 0402 300 m/s2 Applicable standards Impact resistant IP degress of protection Insulation resistance Withstand
Cylinder model C D Mounting bolt part no. Cylinder model C D Mounting bolt part no.
Port size 1/8, C6, C8 A, B port Applicable flat ribbon cable connector Socket: 26 pins MIL type with strain relief (Conforming to MIL-C-83503) (MIL-C-83503 compliant) Internal wiring In common between +COM and COM (Z type: +COM only) Rated voltage 24, 12 VDC Note) The value is for manifold base and individually operated 2 position type.
200 300 400 500 AMG Outlet air flow rate (l/min (ANR)) Outlet air flow rate (l/min (ANR)) AFF IDG50 (Type B products group) IDG60 (Type A products group) AM 0 P1 = 0.3 MPa P1 = 0.3 MPa 0 Outlet air atmospheric pressure dew point (C) Outlet air atmospheric pressure dew point (C) Misc. 10 10 P1 = 0.5 MPa P1 = 0.5 MPa 20 20 P1 = 0.7 MPa P1 = 0.7 MPa 30 30 40 40 50 50 0 200 400 600 800 0 200
Nil L C CL CN Grommet type N 15 Connector type NPN open collector, double output No analog output, 3 turn-set NPN open collector, double output No analog output, 200 degree set NPN open collector, single output With analog output, 3 turn-set NPN open collector, single output With analog output, 200 degree set PNP open collector, single output No analog output, 200 degree set Manual override