1 2 A A-1 1 LE-CP-1 L B B-2 6 1 1.5m B A-2 5 COM-A/COM B-3 3 3 3m COM-B/ A-3 4 5 5m Shield Vcc B-4 12 GND A-4 13 A B-5 7 A A-5 6 S B B-6 9 B A-6 8 3 14.2 2 1 8 14) B1 A1 17.7 6 5 2 1 18 B6 A6 16 15 L 11 30.7 11.2 [820m] A B-1 2 A A-1 1 LE-CP-1 L B B-2 6 B A-2 5 8 8m* COM-A/COM B-3 3 COM-B/ A-3 4 A 10m* Shield B 15m* Vcc B-4 12 C 20m* GND A-4 13 A B-5 7
Contents Contents 20 25 32 40 50 63 80 100 MGP63-B-PS MGP80-B-PS MGP100-B-PS MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Kits include items 21, 22, 23, 24, 32, 33, 41 and 42 from the table above. Items 32 and 33 are not included for bores sizes 80 and 100.
Bore size (mm) Bore size (mm) B DA DB DL DU DC DX DE DO DR DT DS DH DD A B A+ B+ 90 Z H10 (Aperture) 32 40 50 63 80 100 54 42 32 22 44 14 62 9 6.6 7 33 224 10 15 + 0.058 0 10 32, 40 MB-B03 45 25 160 63 42 32 22 44 14 62 9 6.6 7 33 235 10 15 + 0.058 0 10 75 53 43 30 60 20 81 10.5 9 8 45 271 11.5 18 + 0.070 0 14 50, 63 MB-B05 60 40 190 90 53 43 30 60 20 81 10.5 9 8 45 285 11.5 18 + 0.084 0
A specified earth leakage breaker is installed for option B [Earth leakage breaker], option B [Earth leakage breaker with handle] of each model.
port) 4-4.5 (For mounting) 9 SV + 45.6 13.4 SZ + + 2.5 2.5 12.5 15.2 2 123 [127.4] SY 107 [111.4] 10 18.5 23.5 One-touch fitting 6, 1/4" (A, B port) R P R R P R 16.5 16.5 A B A B A B A B A B 77.6 [79.8] 45 49 77 [79.2] SYJ 65 Applicable tubing O.D.: 4, 5/32", 6, 1/4" 82.8 16.5 SX Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200
wire electrical entry) P EB EA 31 50 67 81 37 37 43 6-Rc 3/4 61 103 (P , EA, EB port) 72 [ ] = A, B port Rc 3/4 Formula for manifold weight M = 0.911n + 1.621 (kg) n: Station 144 (72) 60 11 60 Non plug-in type: VV5FR5-10Station 1Bore size U side 2.3 (Electrical entry) Manual override (Non-locking) 21 R5.5 B B B B A A A A B B B n A A A B B B B A A A A 3 L2 L1 P = 51 11 11 71.5 (Pitch) P =
B B When D-F8 is used Size: 10 to 200 B A Reed switch Solid state switch Size 10 20 30 50 70 100 200 Rotation A B Actuation range A B Rotation range m Actuation range Rotation range m 36 50 66 68 78 91 115 10 190 90 10 90 40 54 60 72 82 95 19 21 27 31 37 41 48 61 17 23 27 33 37 44 57 190 80 10 80 10 10 65 10 190 65 10 10 50 190 50 10 190 45 10 45 Operating range at proper mounting position
SUP block plate VVQ2000-16A EXH block plate VVQ2000-19A Port plug Note 1) A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B A B C4 (N3) With 4 (5/32") One-touch fitting Side port Cylinder port sizes Fill out in case of mixed sizes (CM/LM/NM).
Single vane Double vane 90, 100D 270S 180S 90S 0 5 g e n a 2 0 Note 1) r 7 +4 0 0 n Note 1) +4 0 o g n e 0 a ti r 1 0 Note 1) 8 n a 9 0 o 1 +4 0 t ti e o a e g Note 1) t R +4 0 n o g a R r n n ra 0 o 9 ti n a e t io o g R at n a ot r R n (90) (90) o ti a t o R Chamfer Chamfer (45) Chamfer (45) B port Chamfer Note 2) A port B port A port B port (40) B port A port A port * For size 40 actuators
a maximum of 152mm. 6 Series MF Dimensions Curved Type 15 32 MF -45 (D) H H J I I G Note 1) G Note 1) J J I G Note 1) Y Y C Y C C E (A) E E (A) (A) B B 45 45 45 B X X X X C C C SMC G Note 1) G Note 1) I G Note 1) I J J F H F J (D) I (D) RG RT RS B 720 819 C 300 303 D 376 449 E R310 R445 F 60 87 G 93 129 B 780 851 C 301 300 D 369 418 E R390 R495 F 60 87 G 93 129 B 730 790 C 302 304 D 424
3 position pressure center Note) (A) 4 (B) 2 5 B C A 5 (R1) 1 (P) 3 (R2) A C B Note) Except VQZ1000 and metal seal type.
B SOL. B (+) () () (+) 2 2 SOL. A SOL. A (+) () () (+) 3 3 Flat ribbon cable connector assemblies (optional) Station 2 Station 2 SOL. B SOL. B (+) () () (+) 4 4 SOL. A SOL. A Cable length (L) Part no. (+) () () (+) 5 5 Station 3 Station 3 SOL. B SOL. B 20P AXT100-FC20-1 AXT100-FC20-2 AXT100-FC20-3 26P AXT100-FC26-1 AXT100-FC26-2 AXT100-FC26-3 (+) () () (+) 6 6 SOL. A SOL.
31 32 8 10 40 11 12 6.6 41 54 10 24 9 22 28 35 36 10 11 50 15 12 9 50 65 12 33 11 30 32 45 45 12 12 63 15 16 9 52 67 14 37 11 35 40 50 50 12 15 80 18 16 11 66 86 18 47 12.5 40 50 60 63 14 15 100 18 20 11 76 96 20 55 13.5 50 60 70 71 15 19 Mounting type CR Rear clevis with ball joint A B C D EN ER F G E L M N P H R (mm) 0.2 maxi JS15H7 -0.1 maxi H11 H13 H13 0.5 0.5 0.5 32 32.5 10.5 22 10
9 0.5 to 45 0.5 to 45 9 0.5 to 45 0.5 to 45 9 0.5 to 45 Particle filter filtration accuracy (Accessory) m 5 5 5 5 5 5 CH1 : Rc1 (Symbol FG1,Symbol NNPT1) Circulating fluid outlet, Circulating fluid return port CH2 : Rc1/2 (Symbol FG1/2,Symbol NNPT1/2) Tank drain port CH1 : Rc3/4 (Symbol FG3/4,Symbol NNPT3/4 CH2 : Rc1/2 (Symbol FG1/2,Symbol NNPT1/2 CH1 : Stainless steel, Copper (Brazing filler
-10-FG-D-M0 EVS7-10-F G-D-M0 H J I 232 232 124 124 45 (12 port) 45 (14 port) 45 (12 port) 45 (14 port) 22 (4 port) 22 (2 port) 22 (4 port) 22 (2 port) 2 12 14 4 14 4 2 12 50 80 95 SMC SMC A B SMC 50 80 SMC B A 95 Manual override 5 1 3 Manual override 2-8.5 mounting hole 8 5 1 3 71 65 8 2-8.5 mounting hole 65 71 Indicator light 84 79 Indicator light 84 79 M12 connector M12 connector 150.5
Slide Bearing Felt Holder Ball bushing Spacer Aluminum alloy Replacement Parts: Seal Kit Bore size (mm) Contents Kit no. 20 25 32 40 50 MGP20-B-PS MGP25-B-PS MGP32-B-PS MGP40-B-PS MGP50-B-PS Set of nos. above @1, @2, @3, @4, #2, #3, $1, $2 Seal kit includes @1 to @4, #2, #3, $1, $2.
S F 35 ML2B CCVS02-G-S 45 80 86 35 25 1 36 17.5 88.2 72 45 1/2 148.5 103.9 101 CCVS1-G-S 45 80 86 35 18 35 25 2 36 17.5 72 98 57 1/2 148.5 121.8 101 M5 x 0.8 5.4 to 7.5 C J G5-S CCVS2-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CCVS3-G-S 45 80 86 35 18 35 25 1 36 17.5 88.2 72 98 57 1/2 148.5 103.9 101 CV CCVS0-S 45 80 86 35 25 36 17.5 88.2 72 98 57
(M): SYJ5140-lMll-01 VFS 2-4.3 (Mounting holes) 2-4.3 (Mounting holes) (Mounting holes pitch) VS A B (Mounting holes pitch) 24 B A VS7 A B R P 24 B A 37.5 (Mounting holes pitch) 42.7 4 R P 37.5 4 (Lead wire length) (Mounting holes pitch) 59.9 42.7 300 63.9 [65.2] 73.5 300 (Lead wire length) 62.6 [69.1] 45 51.5 [58] 45 48.6 8.5 48.6 8.5 32.5 39.1 32.5 21.5 21.5 6 6 6 6 10 10 4-Rc(PT)1/8