Magnet: Built-in, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 80mm, Thread: Rc, Stroke: 175mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: Spring/Air Pressure Lock, Auto Switch: -, Lead Wire or Prewied Connector: -, Number: -
Electric Slide Table / High Precision Type 《 AC servo motor 》 rev) Encoder [LECSC-T]Absolute 18-bit encoder (Resolution: 262144 p/rev) Power Horizontal 45 65 consumption [W] *5 Vertical 145 175 Horizontal 2 Standby power consumption when operating [W] *6 Vertical 8 Max. instantaneous power consumption [W] *7 445 724 Type *8 Non-magnetizing lock specifications Lock unit Holding force[N] 131 255 157 308 197 385 Power consumption [W] at 20C *9 6.3 7.9
Specification Display Item P-ch MOS-FET ( open drain ) EX9-OET1 N-ch MOS-FET ( open drain ) EX9-OET2 Specification P-ch MOS-FET ( open drain ) EX9-OEP1 EX9-OEP2 2. EX9-PE1 1. EX9-OET1/EX9-OET2/EX9-OEP1/EX9-OEP2 Settings for display PWR PWR PWR Turns on: Power is supplied from external power supply.
D-F9BA No. of auto switches 15 20 25 10 10 5 2 10 15 20 25 5 5 1 Consult P/A for shorter stroke lengths than indicated in the table.
250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.
Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.
R P R 26.6 22 Approx. 300 (Lead wire length) 48.8[51] L1 2-3.5 (For mounting) L2 3.5 Manual override Manual override (Pitch) P = 10.5 Approx. 300 (Lead wire length) 12.5 5 M5 x 0.8 (P, R port) 2-3.5 (For mounting) 48.8[51] P R 26.6 P R 13 22 (Station n) (Station 1) 11 (Pitch) P = 10.5 12.5 4.5 41.5[48.5] + + + + + (Station 1) (Station n) 26.1 A A 13 10 41.5[48.5] (Pitch) P = 10.5 13.5 M3
VALVE TYPES AVAILABLE To operate a solenoid pilot valve in a vacuum s y s t e m , a s e p a r a t e p r e s s u r e s u p p l y m u s t b e s u p p l i e d t o t h e v a l v e t o m o v e t h e s p o o l o r p o p p e t a s d e s c r i b e d a b o v e .
Body type Plug-in type ARBF2000-00-P-1 Non plug-in type ARBF2000-00-P-2 P port regulation Body type Plug-in type VVFS2000-10A Non plug-in type Part no. Rc 1 4 VVFS2000-P-02-1 VVFS2000-P-02-2 Accessory One pair of gasket and mounting thread is attached to every option parts assembly.
N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.
, Description (Pressure Switch for Vacuum) p. 22 Pressure Switch for Vacuum with Energy Saving Function Specifications, Internal Circuit and Wiring Example p. 23 Port Layout Standard Products p. 24 Option -D p. 26 Option -L p. 29 Construction p. 31 Replacement Parts for Single Unit / How to Order p. 32 Exploded View of Manifold p. 33 Dimensions p. 35 Electrical Wiring Specifications
Bore size (mm) NN P S X Y ZZ 20 M22 x 1.5 1/8 81 20 9 151 25 M24 x 1.5 1/8 81 20 9 156 32 M30 x 1.5 1/8 87 23 9 172 40 M33 x 2 1/4 108 25 11 198 49 Round Type Low Pressure Hydraulic Cylinder: 3.5MPa Series CHM Front flange type: CHMF Width across flats B2 Width across flats B1 N GA GB Rc P N Rc P 4-FD H1 H2 2-NN I IA D FY B MM Effective thread K F NB Width across flats NA NC FT A FX H S +
P p p 2-wire 12 V M9BW P P P p p Diagnostic indication (2-color indicator) Relay, PLC 24 V Grommet Yes 3-wire (NPN) 5 V, 12 V M9NA p p P p p IC circuit 3-wire (PNP) M9PA p p P p p 2-wire 12 V M9BA p p P p p Water resistant (2-color indicator) Grommet Yes 3-wire (NPN equivalent) 5 V A96 P P IC circuit Reed auto switch 2-wire 24 V 12 V 100 V A93 P P P P Relay, PLC No 5 V, 12 V 100
Combination of different fittings is possible. + + + + P EB EA Type 20P SY3 20 SY5 20 SY7 20 Bar stock type Flat ribbon cable P. 47 Body ported Base mounted A 26 pins MIL connector permits One-touch wiring of external cables in a bundle. P EB EA In common Type 23 Stacking type Individual wiring SY9 20 + + + + P. 43 EA P EB Manifold stations can be increased.
MT-S16 16 Weights MT-S20 20 (g) MT-S25 25 End lock additional weight 50 157 222 400 547 1,000 1,533 Standard stroke (mm) MT-S32 32 Model 200 699 912 1,495 2,208 25 52 138 186 350 487 918 1,420 175 649 851 1,412 2,095 5 36 150 599 790 1,330 1,983 10 40 125 549 729 1,247 1,870 15 44 100 194 294 500 669 1,165 1,758 20 48 75 175 258 450 608 1,083 1,645 30 56 MT-S40 40 MTS8 MTS12 MTS16 MTS20
Axial piping type (25): MXQ25L-P 17 40 11.5 79 Operating port 2-Rc 1/8 32 Other dimensions are the same as basic style. 20 8-5-39 40 Series MXQ External Dimensions of Adjuster Rubber Stopper (AS/AT) Extension End (mm) Body mounting section Stroke adjustment range (mm) Body mounting section Table mounting section A Applicable size Model P B C F G M D E P 1) H J K Q 1) A D MXQ-AS6(L) 5 16.5
1.5 M26 x 1.5 M20 x 1.5 M10 x 1.25 M8 x 1.25 26-0.033 0 16 13 13 1/4 1/8 1/8 26-0.033 0 M10 x 1.25 32-0.039 0 8 10 M32 x 2 M14 x 1.5 With air cushion 2-NN WC GB Cushion valve (Width across flats 1.5) Relief port M5 x 0.8 WA GA GC Width across flats B2 2-P (Rc, NPT, G) WB Width across flats B1 H1 H2 I 2-Eh8 D MM AL A K H F 1.5 N1 1.5 N2 F NA ZZ + Stroke S + Stroke (mm) ZZ S P N2 I E D A 22
p to r8 soenoids poss ble --!p to 24 soenords poss ble A, B port size (inch) A, B port size (metric) o3/8 Onelouch iitl ng o5l16' One touch fit n o3l8 Onerouch litl ng NPTF ] Manifold D-sub Connector Series Mounti OIN railmounl P . Tie-rod base | sssv fr roro E-EE .
Applicable Auto Switches /Refer to p.5.3-2 for further information on auto switch.