5 Port Solenoid Valve Series SQ1000/2000

600 750 150 300 SQ2000 0.82 0.65 450 600 750 Cylinder speeds marked with a are controlled by a fixed orifice.

Series 12-REA ø25, ø32, ø40, ø50, ø63 Sine Rodless Cylinder

Fittings & Tubing Air Cylinders Rotary Actuators 0 L0.1 4 x MM Thread depth J 2 x P (Piping port) A G E H G B NN Effective thread length T (R) D X Mounting nut Width across flats C F N ZZ + Stroke S + Stroke W K N F I NA TT 6 T Model MM L K J I H G F E D C B A S NN NA 34 N R 12-REA25 12-REA32 12-REA40 8 46 32 26.4 2 13 7.5 20.5 8 10 70 15 M5 x 0.8 18.5 30 M26 x 1.5 111 10 8 60 32 33.6 2 16

Series 12-REA Sine rodless cylinder

1.0 x8 M6 x 1.0 x10 12REA 50/63 0 -0.2 L NA 33 2-Rc, NPT, G 1/4 14 14 E(h8) E(h8) X D I 4-TC 14 14 Effective thread depth R 23 22 K W 23 25 2 4-M8 x 1.25 25 8-Q 14.5 C 0.1 + Effective thread depth 12 Effective thread depth R B S + Stroke 2 ZZ + Stroke Q x R S TC x R Model L 122 110 K 38 32 C 70 60 X ZZ NA E D B 72.2 58.2 I 70 60 W 12-REA63 12-REA50 100 86 66 53 30-0.033 69 55 M10 x 1.5 x

Regulator for 2 MPa ARX 20

F C D E Setting the Indicator Needles Move the indicator needles with your fingers. If it is done with a small screw driver, etc., take care not to bend the indicator needles or scratch the gauge dial. There are 2 green indicator needles, to be set at the upper and lower limits of the pressure range.

Centering Unit

This is not a clean room series product. 4 MACM Series Dimensions W (Workpiece loadable range) 4 x D At maximum offset (A + 2 x S) S F DB DA C X114 X115, X116 U B W A H T H Q PB E PA PD P (Unlocking port) PE P (Locking port) P (Relief port) (Option V only) MACM4, MACM6 MACM2, MACM10 PC PC PC PC PE P (Relief port) (Option V only) PD [mm] Dimensions Model A B C D DA DB E F H P PA PB PC PD

Ionizer Nozzle type IZN10 Series IZS

With L-bracket B1 With pivoting bracket B2 With DIN rail mounting bracket B3 Output specification Refer to page 450.

Hydraulic

U D-A79W D-F7WV D-F7V D-F7BAVL A B A B Proper auto switch mounting positions (mm) D-A7H, D-A80H D-A73C, D-A80C D-F7 D-F7V D-F7W, D-F7WV D-J79 D-J79C, D-J79W D-F7BA D-F9 D-F9V D-F9W D-F9WV D-A7 D-A80 D-A9 D-A9V D-A79W D-F7NTL D-F7F D-F9BAL Bore size (mm) A B A A A A B A A A B B B B B B 20.5 11.5 21 18 25 26 12 9 16 17 20 27 20 27.5 24.5 31.5 26 19 30 29 32.5 20.5 17.5 24.5 23 22 25.5 32

ISO Cylinder

Auto Switch Mounting Height [mm] [mm] Band mounting Rail mounting Auto switch model Auto switch model D-M9l*1 D-M9lV D-M9lW D-M9lWV D-M9lA D-M9lAV D-A9l*2 D-A9lV D-F7l D-J79 D-F7lW D-J79W D-F79F D-F7BA D-A7lH D-A80H D-H7l D-H7lW D-H7BA D-H7NF D-C7l D-C80 D-M9l D-M9lW D-M9lA D-A9l*1 D-M9lV D-M9lWV D-M9lAV D-A9lV*1 D-F7lV D-F7lWV D-F7BAV D-J79C D-A7l D-A80 D-A73C D-A80C *2 D-A79W D-H7C D-C73C

Table of Contents

DZ/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

C85

8 10 12 7.5 9 4 4 5 15 Data Hs D-A7H/A80H D-A73C/A80C D-F7/J79 D-F7W/J79W D-F7V D-F7WV D-J79C/A72 D-F7BAL D-F79F 5 16 20 25 8 10 12 8 9.5 2 2 3 (mm) C85 Auto Switch Mounting Height D-A7 D-A80 D-A7H/A80H D-F7/J79 D-F7W/J79W D-F7BAL D-F79F D-F7V D-F7WV D-F7BAVL D-C7/C80 D-H7 D-H7W D-H7BAL D-H7NF D-C73C D-C80C D-A73C D-A80C D-H7C D-A79W D-J79C D-H7 D-H7C D-H7W D-H7BAL D-H7NF Bore 3 16 Hs Hs

Free Mount Cylinder

, D-A9V D-M9, D-M9V D-F9W, D-F9WV 5 5 5 1 pc. 10 5 10 2 pcs.

V100

) (D, Y) VS N.C.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

Note EVS Manifold block assembly VZ1000-1A-1 q D side For D side, with D-sub connector and P/R port with One-touch fitting for 6 SUP/EXH block assembly SUP/EXH block assembly VZ1000-2A-1D w VFN For U side, with D-sub connector and P/R port with One-touch fitting for 6 DIN rail VZ1000-2A-1U e End block assembly End block assembly For D side For U side Without D-sub connector For indicated

High Vacuum Angle Valve

D-G

Compact Hydraulic Cylinder

Auto Switches: Proper Mounting Positions and Mounting Heights for Stroke End Detection D-M9 D-M9W D-M9AL D-A9 D-M9V D-M9WV D-M9AVL D-A9V CHQ CHQ CHK 32 to 100 20 CHN Approx. U CHM 25 CHS CH2 Approx. U B A CHA B A Related Products D-F7 D-F7W D-J79 D-J79W D-A7 D-A7H D-A8 D-A8H D-F7V D-F7WV D-F7BA D-F7BAV D-F7NT D-F79F D-J79C D-A73C D-A80C 32 to 100 DApprox. U B A Approx.

SX

M Special specifications Mixed M D D side In the case of mixed specifications (M), indicate separately on the manifold specification sheet.

Compact Cylinder

Auto Switch Internal Circuit D-A90(V) Contact protection box OUT () Brown Reed switch Unit: g Weight CD-P11 OUT () Blue CD-P12 D-A90 D-A90V D-A93 D-A93V D-A96 D-A96V Auto switch model Lead wire length: 0.5 m 6 6 6 6 8 8 D-A93(V) Lead wire length: 3 m 30 30 30 30 41 41 LED diode Brown OUT (+) Brown Contact protection box Resistor Unit: mm Dimensions Reed switch Zener diode CD-P11 D-A90/D-A93

Aluminum High Vacuum Angle Valve

Symbol Nil A B C D-M9N(M)(L)(Z) D-M9P(M)(L)(Z) D-M9B(M)(L)(Z) D-A90(L) D-A93(M)(L)(Z) M9N(M)(L)(Z) M9P(M)(L)(Z) M9B(M)(L)(Z) A90(L) A93(M)(L)(Z) M9// Solid state auto switch Reed auto switch (Not applicable to flange size 16) Without auto switch (with built-in magnet) Standard lead wire length is 0.5 m.

MTS

30 25 20 15 10 5 D-A9 x x x (2) 2 pcs. on same side Standard piping type(1) D-M9, D-F9W x x (2) D-A9V x x x D-A9 (2) x 1 pc. each on 2 sides D-M9, D-F9W (2) 2-port size D-A9V x D-A9 (2) x x x 2 pcs. on same side Axial piping type D-M9, D-F9W (2) x x D-A9V x x x D-M9V, D-F9WV x x D-F8 D-A9 x (2) 1 pc. each on 2 sides D-M9, D-F9W (2) D-M9V x 2-port size D-M9V, D-F9WV D-F8 Note 1) With the

Cylinder with Lock Series CNS

Hs Proper auto switch mounting positions Auto switch mounting height (mm) (mm) Auto switch models D-A3 D-G39 D-K39 D-A44 D-A5 D-A6 D-A59W Auto switch models D-F5 D-J5 D-F5W D-J59W D-F5BAL D-F5F D-F5NTL D-F5W D-J59W D-F5BAL D-F5 D-J5 D-A5/A6 D-A3 D-A44 D-G39 D-K39 D-A59W D-F5NTL D-F5F Bore size (mm) Bore size (mm) A B A B A B B A B Hs Hs Ht Hs Ht A Hs 125 125 0 0 2 2 4.5 4.5 8.5 8.5 9.5 9.5