SY

(D Side Mount Type) SUP/EXH Block Assembly e Part Nos.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

How to Order w y e r t u o !

Vacuum System Peripherals:

e Valve Model SX340 is for internal pilot.

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

Fine Lock Cylinder Double Acting, Single Rod 40, 50, 63, 80, 100 Series CLA2 How to Order CLA2 L E 50 100 JN 50 100 E JN M9BW CDLA2 L With auto switch With auto switch (Built-in magnet) Auto switch Mounting Port thread type Made to Order For details, refer to page 2.

CL

only No. q w e r t y u i o !

0.4

Yes None (Non-polar) Nil E Note) Note) A combination of Function [N] (Negative common) and [E] is unavailable. Since [E] has no polarity, it can also be used as a negative common.

C76

9 @0 q w e r t y u i o !

42

: Double, 3-position/With light (For B side) E: Single, Double, 3-position/ Without light (A/B side common) V118-A B E V118-A B E 4 Pilot valve assembly 4 Pilot valve assembly Coil type Coil type Nil Standard (0.95 W) Y Low wattage type (0.4 W) Nil Standard (0.95 W) Y Low wattage type (0.4 W) 528 Construction VQ5000 Series Plug Lead Unit Metal seal type Rubber seal type e q w q w e SV SYJ

C76

9 @0 q w e r t y u i o !

CNG

0 0.05 BZ D E BC I H1 4-TC TB TA AL A F K 0.1 C 0.1 C 8-J BN BC NA S + Stroke H ZZ + Stroke F e f 8 l ZZ + l + Stroke h + l With rod boot Stroke range without rod boot Standard Long stroke 20 25 32 40 Stroke range with rod boot Standard Long stroke Bore size (mm) A AL B1 BC BN BP BZ C D E F GA GB GC GK GL GR GQ H1 I 18 15.5 13 38 93 1/8 44.5 14 8 12 2 85 10 (12) 18 5.5 6 4 8 5 26 Up to 200

Thermo-chiller

Effective in preventing foreign matter from entering the customer equipment and chiller Step e Press the key to stop operation.

Controller/Driver LEC/JXC Series <Single Axis Controllers> Step Data Input Type Page 560 Gateway Unit Page 572 Programless Type Page 576 Step Motor LEC-G Series Step Motor Servo Motor (Servo/24 VDC)/ (Servo/24 VDC)/ (24 VDC)/ LECP6 Series LE

2 w e !3 !4 r t y u i !5 !6 No.

Rodless Cylinder for Vacuum Series CYV ø15, ø32

9 #4 #8 E @7 o !0 i @8 !8 !6 $2 #2 !3 #3 !7 !2 @5 @4 r @3 e @6 @1 @2 #1 t y $1 u w q E' Section E-E' CYV32 t !9 $0 @1 @2 y @4 @3 u @6 #9 @5 Description Material Note Parts list Description Material Note No. No.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Mechanically Jointed Rodless Cylinder with Brake, Hy-rodless Cylinder Series ML1C ø25, ø32, ø40 1

Standard stroke Maximum manufacturable stroke (mm) Standard stroke (mm) Bore size (mm) Suffix for stroke adjusting unit 25 32 40 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 100, 200, 300, 400, 500, 600, 700, 800, 900, 1000 2000 2000 2000 Nil S 2 pcs. 1 pc.

Bag Filter

E (When the valve is opened.) E (When the cover is lifted.)

MXQ

2 e !3 !5 MX MTS t !6 r u y w !

0.4

Note 2) A combination of Function N (Negative common) and E is unavailable. Since E has no polarity, it can also be used as a negative common.

MVGQ

CC MVGQM (Slide bearing) A, DB, E Dimensions MVGQL (Ball bushing bearing) A, DB, E Dimensions RB A A E E Symbol Symbol DB DB Bore size (mm) Bore size (mm) Stroke Stroke J Up to 50 st Over 50 st 30 st or less 30 st or less Over 30 st Over 30 st Up to 50 st Over 50 st 12 12 39 0 8 43 4 16 6 55 D16 16 43 0 10 49 6 22 8 65 20 20 0 14.5 12 10 57 47 61.5 27 10 74 -X 20Data 10-16-7 8 Valve Mounted