A I f a p re s s u re g re a t e r t h a n t h e s e t p re s s u re i s re a c h e d , t h e u n i t w i l l o p e n , c l o s i n g w h e n p re s s u re i s l e s s t h a n s e t pressure.
A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .
A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .
Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A
2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Material Applicable model Note) Part No.
2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Material Applicable model Note) Part No.
Wiring Applicable valve model VFR40-F VFR41-D VFR41-E VFR44-G, VFR44-E VFR44-T, VFR44-D Collection rate of drainage and oil mist: 99.9% or more.
W W D E d M a MA Q C A K F NA NB B H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a d B C F G GA GB K M MA NA NB R S Q V W T P J MM E D 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 17.5 M8 x 1.25 18 M14 x 1.5 7.5 8 44 18 9.5 13 11 25 20 1/4 14 30 22 37 106 5
J F C X B + Stroke L Z M A + Stroke E T 2-P (Port size) I Q Metal connector 15.5 M14 x 1 A B C D E F G H I J K Bore size (mm) 32 40 50 63 Standard stroke 50, 75, 100, 125, 150, 175, 200, 250, 300 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200,
J F C X B + Stroke L Z M A + Stroke E T 2-P (Port size) I Q Metal connector 15.5 M14 x 1 A B C D E F G H I J K Bore size (mm) 32 40 50 63 Standard stroke 50, 75, 100, 125, 150, 175, 200, 250, 300 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200,
q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
with lock [kg] LEKFS40V8 Series Stroke [mm] 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 Motor type 6.0 6.3 6.6 6.9 7.2 7.5 7.8 8.1 8.7 9.3 9.9 10.5 11.1 11.7 12.3 0.7 Additional weight with lock [kg] -8- 2.2 How to Order AC servo motor LECS* series L E K F S 32 R S3 B 200 N S 2 A2 Motor type Size Motor mounting Symbol Type Output(W) Size Compatible driver Nil In-line 25
, 300 12-CY3B15 15 1000 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 12-CY3B25 25 (Both sides) Non-lube 12-CY3B32 32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B50 50 12-CY3B63 63 Note 1) Stroke exceeding the standard stroke but
8 e CXTM Carbon steel Aluminum alloy Hard anodized Hard chrome plated Cylinder tub !
o 0.62 322 1.28 14 oaa {4) 250 u-24 0.50 .621 .621 0.25 0.93 0.38 1t-1E .251 .250 0.75 0.25 0.34 0.75 o.75 o.1a cts16 0.75 120 o.62 3.19 3.8:t 343 t06 {17-l _312 6t-21 0.50 .621 .621 0.38 1 . 1 2 0.38 5t-i E .25r .250 0.75 0.25 o.3a 3.97 o.8a o_aao.24 qi-14 o.75 1.30 0.62 334 1.25 125 t 2 5 t 1 k ) 375 \-24 o.aE .749 .749 o.11 r.32 0.50 .251 o.25 0.41 rt.4 1.06 r.06 0.25 sa-l6 0.46 r.62 0.78
Relief flotv characledstics suppry pressurc: i .0 r pa Pressure characteiistics sei plessu:0.4 Mpa Flow characteristics supp y pGssure: 1.0 M Pa 1 0.9 0.8 d : 0 . 7 0 6 0 .s 'rt E o.+ 0 0.1 0.0 0.0" " " o 50 100 150 200 250 300 o 1 0.6 0.8 1 1.2 Supply pfessure (lvlPa) 50 100 150 200 250 Frow rale (4min (ANB)) Series lTV205n Hysteresis Linearity Repeatability 0.9 0.8 o.7 ii 0.6 3 o.s : 0.4
, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.
, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust