Model Selection 1

4 P. 17-5-117 Elbow LQ2L 5 VXA 2 VN 3 Female LVC 4 P. 17-5-118 5 LVA 2 LVH 3 Male LVD 4 P. 17-5-119 Run tee LQ2R 5 LVQ 2 LQ 3 Female LVN 4 P. 17-5-120 5 TI/ TIL 2 PA 3 Male PAX 4 P. 17-5-121 Branch tee LQ2B 5 PB 2 3 Female 4 P. 17-5-122 5 2 3 Union elbow LQ2E 4 P. 17-5-123 5 2 3 Union tee LQ2T 4 P. 17-5-123 5 Note) Basic size With reducer 17-5-95 24 Series LQ 1 2, LVN, TL/TIL Port size Tubing

High Vacuum Angle Valve

XLA (Size 16: None) P.416 to P.419 Single acting (N.C.) XLAV (With solenoid valves) 10-6 to atmospheric pressure Particle free cleaned Bellows seal 10-10 10-11 XLC (Size 16: None) P.420 to P.424 Double acting XLCV (With solenoid valves) Production discontinued XLF Manual Electromagnetic Air operated (Size 16: None) P.426 to P.435 Single acting (N.C.)

Thermo-con/Rack Mount Type

Option symbol P High-Pressure Pump Mounted P HECR Applicable model HECR002-A5-P HECR004-A5-P HECR006-A5-P HECR008-A5-P HECR010-A2-P HECR008-W5-P HECR012-W2-P High-pressure pump mounted Possible to choose a high-pressure pump in accordance with users piping resistance.

Dedicated Controller

Dedicated Controller/LC1 P.73 Controller setup software P.80 Dedicated teaching box P.82 Options P.85 Dedicated Regenerative Absorption Unit/LC7R P.86 Non-standard Motor Compatible Drivers P.89 73 2 Series LC1 Controller Single Axis Type Built-in AC Servo Driver Series LTF: Standard Motor Compatible How to Order 2V LC1 F 1 H 1 L 3 Number of axes Mounting bracket 1 3 5 1 axis M3

PF2A/PF2W

Unit switching Real-time switch output ( ) ZSE ISE For Air Hysteresis mode Display Real-time flow rate l/min Accumulated flow l ON PSE YES CFM x 102, CFM x 101 ft3 x 101 OFF P-1 P-2 High flow rate Z I SE3 CFM = ft3/min P Window comparator mode H: Hysteresis High Flow Rate Type (For Air) PS H H Display Real-time flow rate l/min Accumulated flow l, m3, m3 x 103 ON Z I SE1 2 NO OFF P-1 P-

ISO Standard Hydraulic Cylinder

CY CX Air release NA F K A NB RR L S + Stroke H C B ZZ + Stroke Stroke range Bore size (mm) B CD MM NA NB P PJ RR K L GB CY D C CX MA E F G GA H A J 32 7 25 to 800 45 33.2 32 M6 x 1 M14 x 1.5 56 12 46 23 17 1/4 19 18 12 16 15 30 35 12 18 14 43 40 25 to 800 63 41.7 43 M8 x 1 M16 x 1.5 73 14 51 32 3/8 17 18 9 19 22 20 19 34 37 12 19 47 22 50 25 to 800 75 52.3 60 M12 x 1.25 M20 x 1.5 74 20

5 Port Solenoid Valve Metal Seal/Rubber Seal Series SQ1000/2000 1

P. 2-3-44 P. 2-3-46 P. 2-3-47 P. 2-3-48 C6 L6 P R D side SMC AN200 U side Individual EXH spacer SSQ1000-R-3Special wiring specifications (-K) Back pressure check valve (-B) SSQ1000-BP Built-in silencer (-S) P. 2-3-49 P. 2-3-45 P. 2-3-46 P. 2-3-47 C6 L6 D-sub connector Terminal no.

CNS

500 400 300 200 100 100 500 400 300 200 100 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa P < 0.5 MPa 0.4 MPa P < 0.5 MPa CLS 3000 3000 CLQ 2000 2000 MLGP 160 140 RLQ 1000 1000 Load weight: m (kg) Load weight: m (kg) 700 800 900 700 800 900 125 MLU 600 600 160 500 500 ML1C 400 400 140 320 125 300 300 D200 200 -X 280 20100 100 100 500 400 300 200 100

Series KV2 Fittings

p p p m m m m m m m p p p p p p p p m m m m m M m M m R p m p p p m m m M m R m p R M p m p p m p m p M m m m m M m p p M m M p p m m m m p m M M m R m m m p m m p m m p p m p m p m p m m R p m m p m p m m M M m m m m p m m p M m p m p m m m m p m M p p m m R p p p p p p p p R p p p m m p m m R p m p m p m m p M p m m m m p p m p p m p m m p R m p p p R m p p p R p p m m p m m p p p p p p

CLS

-www.stevenengineering.com 100 500 400 300 200 100 100 500 400 300 200 100 CNA Maximum speed: V (mm/s) Maximum speed: V (mm/s) CNS Graph (6) Graph (3) 0.4 MPa ) P < 0.5 MPa 0.4 MPa ) P < 0.5 MPa CLS 4000 4000 250 CLQ 3000 3000 200 MLGP 2000 2000 180 160 RLQ 250 Load weight: m (kg) Load weight: m (kg) 140 1000 1000 700 800 900 700 800 900 125 200 MLU 180 600 600 160 400 500 500 ML1C 140 400

CXWM/CXWL

MY CY MG Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com CX DRB0805 RB1006 RB1411 Shock absorber model -X CXWM32-25, 50 Applicable slide unit CXWM -25 10 16 CXWM -25 20 25 CXWL32-25 20Thread O.D.

REA/REB

LD Piping port P Operating direction A 7 Piping port P Operating direction B W K G With switch rail Q + Stroke Z + Stroke Piping port P (plug) Operating direction B HS CR HR Plug 22 8 Piping port P Operating direction B Piping port P (plug) Operating direction B 8 Piping port P Operating direction A 16 19.5 16 Plug REBR15 REBR15 (mm) A B C CB CR D F G GP GW H HA HB HC HP HR HS HT Model REBR15

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

VKF (A) 2 (A) 2 VQZ 1 (P) 3 (R) 1 (P) 3 (R) VZ VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 1 (P) 3 (R) 1 (P) 3 (R) Component Parts Description Material Note No.

Rotary Actuator Rack & Pinion Style Series CRA1 Size: 30, 50, 63, 80, 100 1

Q1 = M L2 = L2 + (3 x P) 3. L1 + (3 x P) L2 + (3 x P) 4. L2 = Q2 = M Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com L1 = 5. Q2 = M 6.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

VQZ (A) 2 (A) 2 VZ 3 (R) 1 (P) 3 (R) 1 (P) VS VFN r e w q r e w q N.O. N.O. (A) 2 (A) 2 3 (R) 1 (P) 3 (R) 1 (P) Component Parts No.

REA/REB

F2 D 1.6 x ---P F3 D 1.6 x ---P F1 D 1.6 x ---P WB Inclined operation W + WB WV P PV W + WB > WV P > PV Allowable Driving Force (Fn) (n = 1, 2, 3) Determination of allowable load weight & pressure F1 = x (W + WB) x 9.8 Horizontal F2 = (W + WB) x 9.8 x (cos + sin) Inclined (For vertical operation, refer to page 10-2-18.)

Conforming to ISO Standard Solenoid Valve (with M12 Connector) Series EVS7-6/7-8/7-10 (Size 1) (Size 2) (Size 3) 1

than above (50 VDC or less) 9 (A) 4 (B) 2 Bottom-ported 1/4 Bottom-ported 3/8 FJG Bottom-ported 1/2 1 (P) 5 (R1) 3 (R2) Option Bottom-ported 3/4 Nil Z (A) 4 (B) 2 None Light/Surge voltage suppressor FIG Sealing type 5 (R1) 1 (P) 3 (R2) Nil R Metal seal (B) (A) Rubber seal 2 4 FPG 3 5 1 (R2) (R1)(P) Available for 7-6 and 7-8 only A02 VS7 1 Sub-plate Size 1 2 3 Specifications Size 1 Size

ISA2

With control unit Centralized wiring/Supply port left Individual wiring/Supply port right Centralized wiring air catch sensor ISA2-HE41P Terminal box Individual wiring air catch sensor 2 port solenoid valve 2 port solenoid valve ISA2-GE41 Regulator 3 0 3 0 3 0 3 0 3 0 3 0 Supply port Supply port P P P P P P T T T T T T U U U U U U E E E E E E L L L L L L S S S L L L S S S L L L 6 9 6 9 6

C95

Thus the allowable load is 800 kg.

E-P HYREG ® Series VY1 1

AV AU AF P port pressure (MPa) P port pressure (MPa) AR Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com IR VY130 0 1 VY11 /120 0 1 0 1 VEX A port pressure (MPa) A port pressure (MPa) AMR Set point Set point Set point Set point Set point Set point ITV IC VBA VE P port