air-filter-e 2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Material Applicable model Note) Part No.
2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Material Applicable model Note) Part No.
Wiring Applicable valve model VFR40-F VFR41-D VFR41-E VFR44-G, VFR44-E VFR44-T, VFR44-D Collection rate of drainage and oil mist: 99.9% or more.
W W D E d M a MA Q C A K F NA NB B H S + Stroke M ZZ + Stroke With rod boot e 10 l f h + l ZZ + l + Stroke (mm) Bore size (mm) A a d B C F G GA GB K M MA NA NB R S Q V W T P J MM E D 0 0.018 0 0.021 0 0.021 0 0.021 0 0.025 0 0.025 0 0.025 0 0.062 0 0.062 0 0.074 0 0.074 0 0.074 0 0.074 0 0.087 40 17 45 23 10 60 17.5 M8 x 1.25 18 M14 x 1.5 7.5 8 44 18 9.5 13 11 25 20 1/4 14 30 22 37 106 5
J F C X B + Stroke L Z M A + Stroke E T 2-P (Port size) I Q Metal connector 15.5 M14 x 1 A B C D E F G H I J K Bore size (mm) 32 40 50 63 Standard stroke 50, 75, 100, 125, 150, 175, 200, 250, 300 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200,
J F C X B + Stroke L Z M A + Stroke E T 2-P (Port size) I Q Metal connector 15.5 M14 x 1 A B C D E F G H I J K Bore size (mm) 32 40 50 63 Standard stroke 50, 75, 100, 125, 150, 175, 200, 250, 300 131 90 27 16 45 49.5 64 M14 x 1.5 14 4.5 14 100, 125, 150, 175, 200, 250, 300, 400, 500 177 136 27 16 52 57 71.5 M14 x 1.5 24 5 14 200, 300, 500 193 144 32 20 64 71 85.5 M18 x 1.5 25.5 7 18 200,
q e r q e r q e r q e r w w w w 125 Process Gas Equipment / Diaphragm Valve Specific Product Precautions Be sure to read before handling.
with lock [kg] LEKFS40V8 Series Stroke [mm] 150 200 250 300 350 400 450 500 600 700 800 900 1000 1100 1200 Motor type 6.0 6.3 6.6 6.9 7.2 7.5 7.8 8.1 8.7 9.3 9.9 10.5 11.1 11.7 12.3 0.7 Additional weight with lock [kg] -8- 2.2 How to Order AC servo motor LECS* series L E K F S 32 R S3 B 200 N S 2 A2 Motor type Size Motor mounting Symbol Type Output(W) Size Compatible driver Nil In-line 25
, 300 12-CY3B15 15 1000 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 12-CY3B20 20 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800 Rc1/8 NPT1/8 G1/8 12-CY3B25 25 (Both sides) Non-lube 12-CY3B32 32 1300 Rc1/4 NPT1/4 G1/4 12-CY3B40 40 100, 150, 200, 250, 300, 350, 400, 450, 500, 600, 700, 800, 900, 1000 12-CY3B50 50 12-CY3B63 63 Note 1) Stroke exceeding the standard stroke but
8 e CXTM Carbon steel Aluminum alloy Hard anodized Hard chrome plated Cylinder tub !
o 0.62 322 1.28 14 oaa {4) 250 u-24 0.50 .621 .621 0.25 0.93 0.38 1t-1E .251 .250 0.75 0.25 0.34 0.75 o.75 o.1a cts16 0.75 120 o.62 3.19 3.8:t 343 t06 {17-l _312 6t-21 0.50 .621 .621 0.38 1 . 1 2 0.38 5t-i E .25r .250 0.75 0.25 o.3a 3.97 o.8a o_aao.24 qi-14 o.75 1.30 0.62 334 1.25 125 t 2 5 t 1 k ) 375 \-24 o.aE .749 .749 o.11 r.32 0.50 .251 o.25 0.41 rt.4 1.06 r.06 0.25 sa-l6 0.46 r.62 0.78
Relief flotv characledstics suppry pressurc: i .0 r pa Pressure characteiistics sei plessu:0.4 Mpa Flow characteristics supp y pGssure: 1.0 M Pa 1 0.9 0.8 d : 0 . 7 0 6 0 .s 'rt E o.+ 0 0.1 0.0 0.0" " " o 50 100 150 200 250 300 o 1 0.6 0.8 1 1.2 Supply pfessure (lvlPa) 50 100 150 200 250 Frow rale (4min (ANB)) Series lTV205n Hysteresis Linearity Repeatability 0.9 0.8 o.7 ii 0.6 3 o.s : 0.4
, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.
, 300, 350, 400, 450, 500 Replacement Parts: Seal Kit 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600 50, 63 Bore size (mm) Contents Kit no. 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350, 400, 450, 500, 600, 700 80, 100 40 50 63 80 100 CA2Y40-PS Rod seal 1 pc.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
J F L X C B + Stroke Z M E A + Stroke T 2-P Q I (Port size) Metal connector Made by TAJIMI R04-J8M7.3 15.5 M14 X 1 38 (mm) A B C D E F G H I J K Bore size (mm) Standard stroke 50, 75, 100, 125, 150, 175, 200, 250, 300 100, 125, 150, 175, 200, 250, 300, 400, 500 32 131 90 27 16 45 49.5 64 M14 X 1.5 14 4.5 14 40 177 136 27 16 52 57 71.5 M14 X 1.5 24 5 14 50 63 200, 300, 500 193 144 32 20 64
(b) XLC50, 63, 80, 100, 160/ Air operated D E C E C E XLA Fn (KF flange) Fd (K flange) (a) XL XL XLQ (c) XM XY J DK XSA H B XVD A XGT G CYV A (mm) J A B C D E Note 1) Fn Fd G H K Model XLC-50 XLC-63 XLC-80 XLC-100 XLC-160 70 183 80 31 10.5 75 52 77 29 10.5 95 88 209 100 39 11 87 70 76.5 36 9 110 90 250 117 45.5 11 114 83 105 44 9 130 108 317.5 154 55 11 134 102 139 58 9 180 138 339 200 65
J F C X B + Stroke L Z M A + Stroke E T 2-P (port size) I Q Metal connector Made by TAJIMI R04-J8M7.3 15.5 M14 x 1 38 (mm) G A C D E F H J K B I Bore size (mm) 32 40 50 63 Standard stroke 64 131 27 16 45 49.5 M14 x 1.5 4.5 14 90 14 50, 75, 100, 125, 150, 175, 200, 250, 300 71.5 177 27 16 52 57 M14 x 1.5 5 14 136 24 100, 125, 150, 175, 200, 250, 300, 400, 500 85.5 200, 300, 500 193 32 20 64
Cylinder stroke (mm) Rubber bumper only Model Cushion Bore size (mm) 20 25 32 40 20 25 32 40 Action Standard stroke (mm) Auto switch mounting Port size Lubrication Model Rubber Air 10-/21-CM220 10-/21-CM225 10-/21-CM232 10-/21-CM240 11-/22-CM220 11-/22-CM225 11-/22-CM232 11-/22-CM240 1/8 Relief type Vacuum suction type 25, 50, 75, 100, 125, 1/4 Non-lube Double acting, Single rod 150, 200, 250