VDW

1 e w r e Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com u r u t t y y q q Component Parts Description Material No. Option Standard Stainless steel Body C37 q w e r t y u i o !0 !

CJ5-S

3 w With air cushion Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !2 !1 i r !3 y o q u e !0 w Component Parts No. q w e r t y u Description Material Description Material No.

IR1000/2000/3000

1 y Diaphragm (B) e Exhaust w Bleed w r Diaphragm (C) Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SUP(1) OUT(2) SUP(1) OUT(2) SUP(1) OUT(2) Exhaust Valve u !0 !0 !2 t r !

Thermo-chiller

Required installation space 8 e r o m r o m m 0 0 Required installation space for ventilation and maintenance 400 mm or more 800 mm or more 800 mm or more 400 mm = 15.7 inch 800 mm = 31.5 inch 800 mm or more Piping Caution 78.7 inch (2000 mm or more) 1.

CL

Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !9 @0 @1 @2 @3 @4 @5 No. Description q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

Multistage Ejector Series ZL112/212 1

0 ZM ZH o ZU Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com ZL ZY e u r y ZQ ZF ZP Description Part no. Part no. Note Component Parts Replacement Parts ZCU Description Material Sound absorbing material A No. No.

Compact Cylinder

2 y q e !3 o !0 With auto switch (Built-in magnet) 32 to 63 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com !2 r t i !4 y q e !3 o w u !0 !1 M: Rod end male thread Component Parts Replacement Parts: Seal Kit No. Description Material Note Bore size (mm) Kit no.

REC

8 1 1 Cylinder tube Aluminum alloy Piston seal NBR Hard anodized e !

RSH/RS1H

9 u #0 #6 t #8 Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com q y $0 $1 20 r !1 e @2 !2 #7 #3 #1 32 w 50, 63, 80 Double acting (DL, DM) @3 !3 !5 #6 o @5 @4 i @1 @6 !0 @7 @9 !6 t u !7 !

Cylinder with Lock

D E D B B1 C BH1 H K A BN N1 F AL H1 MM H1 ZZ + (2 x Stroke) S + Stroke H + Stroke A K AL MB B B1 C B C F N MA With rod boot e e * For one side rod boot type, a rod boot is mounted on the lock side (left side of the drawing above).

CV/MVGQ

Description No. q w e r t y u i o !0 !1 !2 !3 !4 !5 !6 !7 !8 !

3 Port Solenoid Valve Metal Seal/Rubber Seal, Base Mounted Series VQZ100/200/300 21

Description Body Resin q SY Spool valve Aluminum/HNBR w Pilot valve assembly e SYJ Port plug Resin/NBR VVQZ100-CP r VK VZ Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com VQZ200/300 Metal seal type Rubber seal type VT VP r e w q r e w q VG VP S070 VQ N.C. N.C.

3 Port Solenoid Valve Metal Seal/Rubber Seal, Body Ported Series VQZ100/200/300 1

r e w q r e w q VG VP S070 VQ VKF N.C.

Ejector Valve Unit Series ZYY/ZYX 1

0 r t Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com e !2 Section A-A' (Ejector) !3 i w u o y q Section B-B' (Solenoid valve) Component Parts Replacement Parts Note Description Material Description Part no. No. No.

HRS100/150

Required installation space 800 mm or more Required installation space for ventilation and maintenance 400 mm or more 800 mm or more 800 mm or more 800 mm or more Piping 2000 mm or more Caution 1. Regarding the circulating fluid and facility water pipings, consider carefully the suitability for temperature, circulating fluid and facility water.

Modular F.R.L. Unit

OUT IN OUT IN e q r r w w AR50, 60 AR30, 40 t q t q e e IN OUT IN OUT r w w r Parts list Material Color No.

energy saving effect

For installation indoors, ventilation ports and a ventilation fan should be equipped as needed. 800 mm or more Required installation space for ventilation and maintenance 400 mm or more 800 mm or more 800 mm or more 800 mm or more 4.

Modular F.R.L. Unit

F E E F B C Cross interface E: 4-Rc E A F: Without thread D Model Port size A B C D Applicable model Y14-M5 M5 23 16 14 25 AC10 Y24-01 1/8 40 40 22 40 AC20 Y24-02 1/4 Y34-01 1/8 49 43 28 48 AC25, AC30 Y34-02 1/4 Y44-02 1/4 60 48 36 54 AC40 Y44-03 3/8 Cautions in Mounting When mounting a cross interface directly on the IN side of the lubricator, be sure to use a series AKM check valve between

CXS

8 Piston rod B Rod seal e Aluminum bearing alloy NBR !

S070

1 o Note) Order is accepted in 10 units. 16 Series S070 Exploded View of Stacking Type Body Ported Type/SS073M01-C Exploded View of Stacking Type D side end plate assembly Valve U side end plate assembly w Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com e q r < U