CNS

hole BC element 4-J CL 2-MA Thread effective depth R MLU AL FA A K H GA F GB Rc BP Unlocking port GR GL T G G 2-Rc P Cylinder port (For NPT port) MM ML1C Q DD EA RY E LY LH V -X 4-LD Width across flats KA 20VA BN S + Stroke N RT N X X Y Y LT LX C B Data LS + Stroke ZZ + Stroke Bore size (mm) Stroke range (mm) A AL B BN BP BQ C CL D E EA F FA G GA GB GL GR J 125 140 160 16 Up to 1400 50 47

Bag Filter

T2 T1 I 8 x D FGD FGE H G FGG P.C.D B E F FGA C A (mm) Applicable model G H I Part No.

SQ1000/2000

Also, indicate the option symbol "-K" for mixed wiring. w How to order applicable valves A B C A B C A B C A B C A B C SQ 1 1 4 1 C6 5 L A B C D E F G H I Series SQ1000 Switching type Electrical entry A E 1 2 3 4 5 A B C L type plug connector with lead wire L 2 position single 2 position double (latching/double solenoid) 3 position closed center 3 position exhaust center 3 position pressure

Series AK1000

22 Hastelloy C-22 Hastelloy C-22 PCTFE 80 0.55 316 SS PCTFE (Option: Vespel) 70 0.48 Delivery pressure (MPa) Delivery pressure (psig) 60 0.41 Dimensions inch (mm) 50 0.34 AK1400T 40 0.28 30 0.21 2.12 (53.8) 20 0.14 10 0.07 Max. 5.6 (142.2) Max. 6.0 (152.4) (When selecting option code P or BP) 0 0.00 0 100 200 300 400 500 600 700 800 Flow rate (slpm, N2) AK1400T 80 psig (0.55 MPa) Inlet pressure

Booster Regulator/Air Tank

ends. *1 When option G (pressure gauge) is selected VBAT38AN1-E-X105/VBAT38A1-E-X105 VBAT38SN1-E-X105/VBAT38S1-E-X105 Connected to VBA22A, 42A Connected to VBA20A, 40A, 43A Inspection port 3/4 (With plug) Tank IN port 1/2" Booster regulator IN port C Booster regulator IN port C Inspection port 3/4" (With plug) Safety valve (Supplied with product) Safety valve port 1/4" EXH: C EXH: C (B)

Magnetically Coupled Rodless Cylinder

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

MY2

38 EA 8.5 13 EC 9 13.5 EY 36 56.5 S 67.3 73.2 T 12 15 TT 7.1 (MAX 18.6) 10 (MAX 26) E 17.5 25 16 Series MY2C Side Support Side support MYC-SA G 2-H C B A F E D H 3.4 4.5 6.6 E 15 25 45 A 60.6 95.9 121.5 F 26 38 64 B 64.6 97.5 121.5 G 4.9 6.4 11.7 C 70.6 107.9 134.5 D 77.2 115.5 145.5 Model MYC-S16A MYC-S25A MYC-S40A Applicable cylinder MY2C16 MY2C25 MY2C40 Guide for Using Side Supports kg

Square Tube Type Air Cylinder Series MB1

Seal kits consist of items 14, 15, 16 and 18 contained in one kit, and can be ordered using the order number for each respective tube bore size. 4 Series MB1 Standard Type Basic type/(B) Cushion valve W V Port 2-Rc(PT)P MM G G With rod boot E e E D MB Effective thread 13 16 2 x 4-J 9 f l S + Stroke H A K F N N C h B ZZ + Stroke Without air cushion Bore size (mm) Bore size (mm) S ZZ S ZZ

LEF-OM002xx

Speed Speed Acceleration Deceleration Position In pos ON INP output ON OFF 25 - Step No. 1: Positioning operation a b c d e f g h i j k Step data No.

0.4

Yes None (Non-polar) Nil E Note) Note) A combination of Function [N] (Negative common) and [E] is unavailable. Since [E] has no polarity, it can also be used as a negative common.

Industrial Filters

Differential pressure indicator Differential pressure indication switch Applicable model FGDC, E FGDT, F CB-62H CB-63H CB-60H CB-61H 27 C FGD Series Specifications FGDCA/FGDEA FGDCB/FGDEB FGDTA/FGDFA FGDTB/FGDFB Model Max. operating pressure (MPa) 1.0 0.7 Operating temperature (C) 0 to 80 Differential pressure indicator operating pressure Differential pressure indication switch operating

0.4

N.O. 2 B A 2-position double (Rubber) 4-position dual 3-port valve (C) VQC 1/2 VQC 1/2 2(B) 4(A) 2(B) (A)4 Note) C VQC 4/5 (R1)5 1 (P) 3(R2) C Turn locking type (Manual) 1(P) 5(R1) 3(R2) N.C. N.O.

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

E E D C Center of F.R.L. body Center of F.R.L. body B C B EE (Except Y300T-D) Part no.

CXS

A A a B B s j C f g t C0.5 C0.2 C0.2 b d e 45 45 Section A-A p k C0.5 45 C n h i l (d) C0.5 q m O Section B-B r (l) View C (mm) +0.2 0 l i o j k m n p q r s t b e g a c d f h Model 0 0.2 0.05 0.15 + 0.1 0 +0.2 0 3.5 +0.013 +0.001 CXS 6 2.75 M2.5 x 0.45 4.5 3.5 4.75 C0.5 2.8 0.5 4 3.5 3 3.5 16 0.1 M3 x 0.5 4 1 5.5 6 +0.2 0 0.05 0.15 0 0.2 + 0.1 0 +0.2 0 5 +0.016 +0.001 CXS10 4 M3 x 0.5 8 5

AC

27.5 N Gauge P C Q IN OUT AR2001/2501/3001: Max. 3.5t AR4001: Max. 5.0t Port size B H J Bracket (Optional) K M G L E F Bracket mounting dimensions N Q Model Port size A B C D E P F G H J K L M 30 34 44 5.4 15.4 55 2.3 1/8, 1/4 40 3.3 95 17 AR2001 40 35 33.5 25 30 34 44 5.4 15.4 55 2.3 1/4, 3/8 53 4.3 102.5 25 AR2501 48 32 33.5 25 41 40 46 6.5 8 53 2.3 1/4, 3/8 53 0.8 127.5 35 AR3001 53

CM2

f 1 to 50 51 to 100 1 to 50 1 to 50 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 51 to 100 101 to 150 151 to 200 201 to 300 301 to 400 401 to 500 Bore 20 68 81 93 106 131 156 12.5 25 37.5 50 75 100 48 61 73 86 111 136 36 18.2 25 72 85 97 110 135 160 185 12.5 25 37.5 50 75 100 125 52 65 77 90 115 140 165 36 18.2

2/3 Port Valve

VXZ2230 VXZ2232 VXZ2240 VXZ2242 VXZ2350 VXZ2352 VXZ2360 VXZ2362 A J Q B T K R C U S D V E W F X H Y N.O.

240

3 e u !