CL

Applicable bore size (mm) B C D d H Dd9 L d Part no. 0.040 0.076 0.040 0.076 0.050 0.093 14 0.050 0.093 0.040 0.076 0.040 0.076 0.040 0.076 CD-G02 CD-G25 CD-G03 CD-G04 NT-02 NT-03 NT-G04 20 25 32 40 20 25, 32 40 21 25.6 41.6 7.6 9.6 9.6 IY-G02 IY-G03 IY-G04 M8 x 1.25 5 6 8 20 25, 32 40 13 17 19 15.0 19.6 21.9 12.5 16.5 18 8 10 12 8 10 10 43.4 48 59.4 71.4 7.6 9.6 11.5 13.4 M10 x 1.25 M14

SV

R C US US C R R R R R R R US C US C US C US C US C US C SERIAL NO.

Vacuum

Y, Z directions 3limes each 12.6FS or lesis at 25'C 01: Rl/8. [.r5 x 0 8, Tl: NPT1/8, M5 x 0 8.

CLA

ack) 0-A54, D-B54, D-A44(C), D-A34(C) 0-A67 Zener <;Siode Reed SWitch , Blue b_ ~ue a, (black) <'ad) H Surge ab$Ol'bef D-A56 D-A33(C) :R~ ~tC h ---R;~~~r-: I-) ~: ( ';' ) L 0 ' , ' : Zener diode : ,--_.

Cylinder with Lock

+ 55 (n 2) 2 (n = 2, 4, 6, 8)*1 25 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 D-A59W 1 15 25 2 (Different surfaces, same surface) 15 25 n (Same surface) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 25 + 55 (n 2) 2 (n = 2, 4, 6, 8)*1 D-F5NT 1 10 25 D-Y59 D-Y7P D-Y7W D-Z7 D-Z80 2 (Different surfaces, same surface) 1 15 n 15 + 40 (n 2) 2 (n = 2, 4, 6, 8)*1 *1 When n is an odd number, an even number that is

Table of Contents

(mm) Proper tightening torque (Nm) Cylinder stroke (mm) Model 5 10 15 20 25 30 40 50 6, 10 16 20, 25 32 M3 M4 M5 M6 1.08 10% 2.45 10% 5.10 10% 8.04 10% 22 (27) 25 (35) 28 (38) 31 (41) 34 (44) 37 (47) C(D)U6-D 36 (41) 40 (50) 44 (54) 48 (58) 52 (62) 56 (66) C(D)U10-D 50 (75) 56 (86) 62 (92) 68 (98) 74 (104) 80 (110) C(D)U16-D 95 (128) 106 (143) 117 (154) 128 (165) 139 (176) 150 (187)

VQ4000

Note Conductor resistance /km, 20C 65 or less 1.5 m 3 m 5 m AXT100-DS25-015 Cable 25 cores x 24AWG 10 AXT100-DS25-030 Voltage limit VAC, 1 min. 1000 AXT100-DS25-050 L For other commercial connectors, use a 25 pins type with female connector conforming to MIL-C-24308. Note) The minimum bending radius for D-sub connector cables is 20 mm.

C76

D-H7W D-H7BAL D-H7NF D-A73C D-A80C D-H7C D-A79W D-F7 D-F7W D-J79 D-J79W D-F7BAL D-F79F D-J79C Auto Switch Mounting Position (mm) D-A7H/A80H/A72 D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C/F7BAL D-F79F D-H7 D-H7C D-H7W D-H7BAL D-H7NF D-C7 D-C80 D-C73C D-C80C D-A73 D-A80 D-A79W Bore B A B A B A B A B A 32 8 (6) 7 (5) 8.5 (6.5) 14.5 (11.5) 9 (7) 8 (6) 7 (5) 6 (4) 6 (5) 12 (9) 40 10 (11) 12 (9) 7.5

C76

D-A80H D-C73C D-C80C Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com D-H7 D-H7W D-H7BAL D-H7NF D-A73C D-A80C D-H7C D-A79W D-F7 D-F7W D-J79 D-J79W D-F7BAL D-F79F D-J79C Auto Switch Mounting Position (mm) D-A7H/A80H/A72 D-A73C/A80C D-F7/J79 D-F7W/J79W D-J79C/F7BAL

MY1

D-Y69A, D-Y69B, D-Y7PV D-Y7NWV, D-Y7PWV, D-Y7BWV ( ) MY1CW 25, 32, 40, 50, 63 B A Solid state switch D-Y59 , D-Y69 , D-Y7P(V) D-Y7NW(V), D-Y7PW(V), D-Y7BW(V) A B A B Reed switch D-Z73, D-Z76, D-Z80 D-Y7BAL 63 50 40 32 25 Mounting position 40 32 25 Mounting position 25 Mounting position 32 40 50 63 A 323.5 278.5 157.5 127.5 97.5 157.5 127.5 97.5 97.5 127.5 157.5 278.5 323.5 A A B 136.5 121.5

10

) 55 n (Different surfaces) 35 + 30 (n 2) (n = 2, 3, 4) D-A44 n (Same surface) 55 + 50 (n 2) (n = 2, 3, 4) 1 10 D-F5l D-J59 D-F5lW D-J59W D-F5BA D-F59F 2 (Different surfaces, same surface) 15 25 25 n (Same surface) 15 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 25 + 55 (n 2) 2 (n = 2, 4, 6, 8) Note 1) 1 10 25 25 2 (Different surfaces, same surface)

IDG

(1) IDG60L 5 to 50 Ambient temperature (C) Outlet air atmospheric pressure dew point (C) Inlet air flowrate (l/min(ANR))(2) Standard performance JIS Symbol 40 100 150 227 320 400 Outlet air flowrate (l/min(ANR)) Purge air flowrate (l/min(ANR))(3) 75 110 170 240 300 25 40 57 80 100 Inlet air pressure (MPa) 0.7 Inlet air temperature (C) 25 25 25 1 l/min (ANR) {In the case of Inlet air pressure

Rotary Actuator

Single round shaft: ClRA1BT Double shaft (round shaft, with four chamfers): ClRA1BJ Double round shaft: ClRA1BK D D D H H H H UU UU M N 0 0.2 G D L 0 0.2 [mm] [mm] [mm] Size D (g6) H Size D (g6) G H M N UU L Size D (g6) H UU 30 8 25 50 15 36 63 17 41 80 20 50 100 25 60 30 8 6 25 10 8 75 7.8 50 15 11 36 20 15 118 14 63 17 13 41 22 17 139 16 80 20 15 50 25 20 167 19 100 25 19 60 30 25 202 24

MB1

B A+B+90 32, 40 50, 63 80, 100 25 40 30 45 60 55 160 190 175 7 Standard Type Double Acting: Single Rod Series MB1 Accessory Dimensions 30 Rod end nut (standard equipment) Knuckle joint pin Clevis pin Dd9 d 2-d D C L l m H B Bore size (mm) Clevis Knuckle Part No.

MNB

(different sides or same side) Reed switch Solid state switch D-A5, D-A6 15 20 1 pc. 2 pcs. (different sides or same side) 20 D-A59W 25 15 1 pc. 2 pcs. (different sides or same side) 15 25 D-F5, J5 10 1 pc. 2 pcs. (different sides or same side) 15 25 D-F5NTL 10 1 pc. D-F5W D-J59W D-F5BAL D-F5F D-F5LF 2 pcs.

CJ2

D-F7, J79, D-F79F, D-A7H, A80H D-F7W, J79W D-F7BAL 2 15 1 15 2 25 D-F7LF 1 25 Accessory/Refer to p.1.3-12 for details.

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) L2 L1 27 P = 10.5 13.5 28 (5.25) Applicable connector: D-sub connector (25P) (Complies with MIL-C-24308) 63.5 <67.5> (12) 13 Indicator light Manual override 1.5 4.8 66 40.7 25 9.3 (5.5) (35) B A B A B A A A A B A 93.5 <100.4> 40.5 M4 mounting hole 2 35 [25] 61 Stations 8 7 6 5 4 3 2 1 n D side U side [ ]: 25 pins (top entry) C8 [3(R) EXH port] C8: 8 One-touch fitting DIN rail clamp

Series VQ1000/2000 10- 21- 5 Port Solenoid Valve

(L4) (L3) L2 L1 27 P = 10.5 13.5 28 (5.25) Applicable connector: D-sub connector (25P) (Complies with MIL-C-24308) 63.5 <67.5> (12) 13 Indicator light Manual override 1.5 4.8 66 40.7 25 9.3 (5.5) (35) B A B A B A A A A B A 93.5 <100.4> 40.5 M4 mounting hole 2 35 [25] 61 Stations 8 7 6 5 4 3 2 1 n D side U side [ ]: 25 pins (top entry) C8 [3(R) EXH port] C8: 8 One-touch fitting DIN rail clamp

Shock Absorbers and Rate Controls

l o E g ::.: # 2A 1 0 0 : 0 0.2 0.4 0.6 0.8 I 1.2 1.4 1.6 TOTAL ENEFIGY (in bs/c) (Ihousaids) TOTAL ENEFGY (inrbs,t) .,,' 9 . . ' . r n I c { d E o 8 E , d o . i E i d TOTAL ENEFIGY (iN]bS/C) (Thousands) TOTAL ENERGY (rnlbsc) |o c{ N 0 E o. 5 5 m TOTAL ENERGY (in'lbebJ rTho!sands) l{ote Minimum impact velocity fol PRO modls is 10 in./sec.

%silltr

A S A N E X A M P L E : A C C O R D I N G T O I S O , T H E R E I S N O D I F F E R E N C E I N S Y M B O L B E T W E E N A C O N V E N T I O N A L D O U B L E A C T I N G C Y L I N D E R A N D A T W I N B O D C Y L I N D E R , A L T H O U G H S O M E M A N U F A C T U R E R S H A V E I N T R O D U C E D T H E I R O W N S Y M B O L S F O F C L A R I F I C A T I O N .