Mechanically Jointed Rodless Cylinder Series MY2 ø16, ø25, ø40 1

300 L M9N Number of auto switches Guide type C Cam follower guide 2 pcs. 1 pc. n pcs.

5 Port Pilot Operated Solenoid Valve VFS1000/2000/3000/4000/5000/6000 Series

(Values at the initial period) Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.

e

200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 Speed (mm/s) Speed (mm/s) Speed (mm/s) Load Mass: E-MY2C E-MY2C/m1 E-MY2C/m2 E-MY2C/m3 60 60 60 50 50 50 30 30 30 20 20 20 Load mass (kg) Load mass (kg) Load mass (kg) E-MY2C25 E-MY2C25 10 10 10 E-MY2C25 E-MY2C16 5 5 5 E-MY2C16 E-MY2C16 4 4 4 3 3 3 2 2 2 1 1 1 100 200 300 400 500 1000 1500 100 200 300 400 500 1000 1500 100 200 300 400

IZx-OMT0049

to 2000 600 to 2000 100 to 175 50 to 1300 50 to 2000 50 to 2000 3 300 to 400 300 to 1500 350 to 2000 500 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 5 300 to 400 300 to 1500 300 to 2000 400 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 8 300 to 350 300 to 1400 250 to 2000 300 to 2000 75 to 150 50 to 1200 50 to 2000 50 to 2000 10 200 to 300 200 to 1400 200 to 2000 200 to 2000

VFS

(Values at the initial period) Note 4) Based on JIS C 0920. Note 5) Based on JIS C 4003.

Hygienic Design Cylinder Series HY

D C D C Mounting bolt part no.

Valve Single Unit

83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 10 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 SY D-sub connector: Conforms to MIL-C24308 Flat ribbon cable Terminal block (M3) 9 pins Terminal block

Magnetically Coupled Rodless Cylinder

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

Cylinder with Lock Series CNS

200 100 100 500 400 300 200 100 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 6 Graph 3 0.4MPaP<0.5MPa 0.4MPaP<0.5MPa 3000 3000 2000 2000 160 140 1000 1000 700 800 900 700 800 900 125 Load weight: m(kg) Load weight: m(kg) 600 600 160 500 500 400 400 140 320 125 300 300 200 200 280 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) Graph 7

Magnetically Coupled Rodless Cylinder Series CY3B/CY3R

C D 15, 20 (mm) Applicable switch model Bore size (mm) D-A9 D-F9, D-A9W A B C D A B C D 15 56.5 17.5 76.5 21.5 72.5 60.5 87.5 67.5 20 39.5 19.5 23.5 83.5 35.5 71.5 Note 1) Auto switches cannot be installed in Area C in the case of 15.

MY2

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A B A B A B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C D C D C D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

Mechanically Jointed Rodless Cylinder Series MY2

Proper Auto Switch Mounting Position (Detection at stroke end) C D A B D-A9, D-A9V D-M9, D-M9V, D-M9W, D-M9WV B B Series model A Series model A Operating range Operating range MY2C16 MY2C16 44 116 48 112 MY2H16 MY2H16 46 114 50 110 MY2HT16 MY2HT16 11 8.5 70 90 74 86 MY2C/H/HT25 MY2C/H/HT25 54 156 58 152 MY2C/H/HT40 MY2C/H/HT40 85 245 89 241 Series model C Series model C D D Operating range

Step Motor Driver （ Pulse input type ）

(Circuit example) The figure below shows the stopped state. 24 VDC 0V Reset switch for stop Ry stop switch Surge suppressor Ry U Power supply plug (The 1st driver) BK RLS EMG C 24V Ry 24V 0V Driver M 24V Power supply 0V Power supply plug (The 2nd driver) BK RLS EMG C 24V Ry 24V 0V Driver M 24V Power supply 0V Power supply plug (The 3rd driver) BK RLS EMG C 24V Ry 24V 0V Driver M 24V Power

Cylinder with Lock Series CLS

m(kg) Load weight: m(kg) 160 600 600 140 500 500 125 400 400 300 300 200 200 100 100 100 500 400 300 200 100 500 400 300 200 Maximum speed: V(mm/s) Maximum speed: V(mm/s) 31

High Vacuum Angle Valve

Heater: 8 XLC Series Dimensions XLC: Air operated (b) E C Size 16, 25, 40 E C E Fn (KF flange) (a) D Auto switch (Option) Heater (Option) (c) H J B A G A (b) C E Size 50, 63, 80 E C E Fn (KF flange) Fd (K flange) (a) D Heater (Option) Auto switch (Option) (c) H J K B A G A [mm] Model A B C D E*1 Fn Fd G H J K XLC-16-2 40 108 38 20 30 17 44 19 XLC-25-2 50 121 48 27 12 40 26 44 21 XLC-

0.4

B A C B A C B A C B A C B A C B A C B A C kit 34.3 47.1 67.9 94.1 (Single) 98.6 (Double, Dual 3 port valve) 107.6 (3 position) P kit 35 5.5 28.1 12.7 J kit T Triangle mark indicator position EXH outlet 2 x M4 DIN rail clamp screw 49.4 9 kit Release for switching connector direction Applicable connector: Flat ribbon cable connector (26P) (Conforming to MIL-C-83503) U side Stations D side n

AC Servo Motor Driver

[C][0].

LEYx-OMZ0015

Rod type / LEY Series 2.1 Specification LEY63 (Top/Parallel) LEY32 LEY32D Model LEY25 (Top/Parallel) / LEY25D(in-line) (Top/Parallel) (in-line) LEY63D (in-line) 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 30, 50, 100, 150, 200, 100, 200, 300, 400, 500, 600, 250, 250, 250, Stroke[mm] 700, 800 300, 350, 400, 500 300, 350, 400, 500 300, 350, 400 Horizontal Note 1) 18 50 50 30 60 60 30 60 60

4/5 Port Solenoid Valve

Note 2) The withstand voltage specification for the wiring unit section is JIS C 0704, Grade 1 or its equivalent.

45

83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 10 pins MIL with strain relief; Conforming to MIL-C-83503 Flat ribbon cable connector socket: 20 pins MIL with strain relief; Conforming to MIL-C-83503 SY D-sub connector: Conforms to MIL-C24308 Flat ribbon cable Terminal block (M3) 9 pins Terminal block