Electric Actuator/Slider Type

How to Order q w e r t y u i o !

5

96 83 106 0.5 71 61 76 W W 0.7 59 50 62 0.3 135 119 147 T 0.5 101 89 111 0.7 84 74 91 Foot: L Rod flange: F Head flange: G L, F 0.3 301 267 330 0.5 231 207 253 W W W 0.7 193 172 212 0.3 144 126 156 G 0.5 109 94 118 0.7 90 78 97 Foot: L Rod flange: F Head flange: G L, F 0.3 433 386 476 0.5 334 297 367 W W W 0.7 281 250 309 0.3 210 185 229 G 0.5 160 141 175 0.7 134 117 129 D-X 215 CS2Y Series

Auto Switch Guide

RZQ Reed switchD-A90(V)/A93(V)/A96(V) Solid state switchD-M9N(V)/M9P(V)/M9B(V) F9NW(V)/F59W/F9BW(V) F9BAL MI W S CEP1 CE1 Auto Switch Mounting Bracket Part No.

AC Servo Motor Driver LECYM/LECYU Series Compatible LEF  Position control, speed control and torque control Power supply voltage (V) LEJ can be used. 200 to 230 VAC 
Control encoder: Absolute 20-bit encoder LEL Motor capacity (W) (Resolution: 10485

How to Order w e r q t y u i o !

15

Series Variations Series Size Page 25 32 40 63 Slider Type Ball Screw Drive LEFS Series 784 100 W 200 W 400 W Slider Type Belt Drive LEFB Series 805 100 W 200 W 400 W High Rigidity Slider Type Ball Screw Drive LEJS Series 824 100 W 200 W Rod Type LEY Series 848 100 W 200 W 400 W Guide Rod Type LEYG Series 864 100 W 200 W The values in shows the equivalent motor capacity. 780 LE Series Compatible

Air Cylinder

Contents 20 CBG1N20-PS Set of the nos. @5, @6, @7, @8 and grease pack 20 CBG1N20-PS-W Set of the nos. @5, @6, @7, @8 and grease pack CBG1lN Rubber bumper type CBG1lN Rubber bumper type 25 CBG1N25-PS 32 CBG1N32-PS 40 CBG1N40-PS 25 CBG1N25-PS-W 32 CBG1N32-PS-W 40 CBG1N40-PS-W Order seal kit in accordance with the bore size. * The seal kit includes a grease pack (10 g).

Integrated Controller

/s2 3000 mm/s2 4 Work load: W [kg] Work load: W [kg] 3 2 5000 mm/s2 1 10 mm/s2 0 0 Speed: V [mm/s] 200 400 600 800 1000 1400 1200 0 Speed: V [mm/s] 200 400 600 800 1000 1200 EQFS40HA/Ball Screw Drive Horizontal/Lead 20 Vertical/Lead 20 70 5 4.5 4 3.5 3 2.5 2 1.5 1 0.5 0 3000 mm/s2 60 Work load: W [kg] Work load: W [kg] 50 40 3000 mm/s2 30 5000 mm/s2 20 10 10 mm/s2 0 0 Speed: V [mm/s] 200

2–4

D-M9 D-F9BAL D-F9 W 12 A B W 16, 20, 25 W A B 32, 40, 50 (mm) D-A9 D-M9 D-F9 W Auto switch model D-F9BAL Mounting height Hs exists only for the D-F9BAL type.

MHZ

End boss type One-touch fitting for coaxial tubing End boss type One-touch fitting for coaxial tubing W W Only the basic type is applicable for 32 and 40.

MHZ

2 w i @5 !4 e !7 !1 @4 !5 !6 r t u q @3 !3 @0 !9 !

Rotary Table Rack & Pinion Style Series MSQ Size: 1, 2, 3, 7, 10, 20, 30, 50, 70, 100, 200 1

Positioning pin hole Counterclockwise 5 Adjustment bolt A 5 (For counterclockwise rotation end adjustment) 9 22 CRB2 e B port .5 g Adjustment bolt B n ra (For clockwise rotation end adjustment) nt CRBU2 e m e st is w u dj k CRB1 c a e o is d cl w C A port B port n k er c lo o e l Clockwise C a nt c n dj k u o w 0 MSU o u ti is C st ta e 19 m ro ro ta e ti o d n n e nt e ra ng n 5 g e 9 ra

Compact Cylinder Series CQ2 ø12, ø16, ø20, ø25, ø32, ø40, ø50, ø63, ø80, ø100, ø125, ø140, ø160, ø180, ø200 1

Contents No. q w e r t y u i o !0 !1 !2 !3 !

e-Rodless Actuator

D-M9P D-M9NV D-M9B D-M9N D-M9PV D-M9BV Auto switch part no.

Table of Contents

CDU Double Acting, Single Rod D-A9, D-A9V D-M9, D-F9W D-M9V, D-F9WV Bore size (mm) B W A W W B B A A 6 10 16 20 25 32 3.5 4.5 17.5 6.5 0.5 3.5 13.5 17.5 2.5(5) 7.5 0.5 16.5 2.5 3.5 7.5 12.5 16.5 1.5(1) 8 0.5 20 1.5 4 8 16 20 2(0.5) 10 2 24 0 6 10 20 24 4(1.5) 11 3.5 26.5 1.5 7 11 22.5 26.5 5.5(3) 12.5 4.5 27.5 2.5 8.5 12.5 23.5 27.5 6.5(4) Note 1) Figures in the table above are used as a

XM, XY

2101-80 Changed part Note 2) Symbol Internal 1.3 x 10-10 (FKM) 1.3 x 10-8 External 1.3 x 10-11 (FKM) 1.3 x 10-9 w, e w e Nil A B C P1 70W 1.3 x 10-8 1.3 x 10-11 (FKM) 1.3 x 10-9 Kalrez 1.3 x 10-10 (FKM) Q1 R1 R2 R3 S1 T1 4079 SS592 SS630 SSE38 1232-70 3310-75 Note 1) Values at ambient temperatures, excluding gas permeation.

CQS

(N) Allowable lateral load W (N) Allowable lateral load W (N) 2025 Data 20 Caution 20 16 Snap Ring Installation/Removal 16 1.

Compact Cylinder with Solenoid Valve/

Proper Mounting Position (Detection at Stroke End) and Mounting Height 32, 40, 50, 63 D-M9/D-M9W/D-A9 D-M9V/D-M9WV/D-A9V Hs B W A A A B (mm) D-A9V D-A9 D-M9 D-M9W D-M9V D-M9WV A B A B Bore size (mm) W Hs A B W A B Hs 32 40 50 63 12 [17] 9 1 12 [17] 9 29 8 [13] 5 3 (0.5) 8 [13] 5 27 16 11.5 1.5 16 11.5 32.5 12 7.5 5.5 (3) 12 7.5 30.5 14 <19> 14.5 4.5 14 <19> 14.5 42 10 <15> 10.5 8.5 (6)

Compact Cylinder

(mm) D-A9 D-M9 D-F9 W D-F9BAL Auto switch model Symbol A B W A B W A B W Hs 22 24 27 30 36 41 20 25 32 40 50 63 15.5 15.5 19 20 13.5 15.5 8.5 10.5 12 12 18.5 20.5 11.5 11.5 15 16 9.5 11.5 5.5 7.5 9 9 15.5 17.5 3.5(1) 14.5 14.5 18 19 12.5 14.5 9.5 11.5 13 13 19.5 21.5 -9.5 -7.5 -6 -6 0.5 2.5 -0.5 1.5 3 3 9.5 11.5 5.5(3) Bore size (mm) 7 (4.5) 7 (4.5) 13.5(11.5) 15.5(13.5) The dimension inside

Compact Type

Auto switch model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Dimensions D-M9 Auto Switch Internal Circuit Mounting screw M2.5 x 4 L Slotted set screw D-M9B, N, P D-M9N Indicator light DC (+) Brown 2.6 Switch main circuit Switch main circuit Switch main circuit OUT Black 2.7 2.8 4 22 DC () Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC (+) Brown 22 3.2 D-M9B (

Compact Type Dual-Rod Cylinder Series CXSJ

Auto switch model D-M9N D-M9B D-M9P 0.5 8 7 8 Lead wire length m 3 41 38 41 Dimensions D-M9 Auto Switch Internal Circuit Mounting screw M2.5 x 4 L Slotted set screw D-M9B, N, P D-M9N Indicator light DC (+) Brown 2.6 Switch main circuit Switch main circuit Switch main circuit OUT Black 2.7 2.8 4 22 DC () Blue 3.2 D-M9N, P (3-wire) D-M9P Most sensitive position 6 DC (+) Brown 22 3.2 D-M9B (