Modular F.R.L. Units

Nr c Pressure unit of the scale plate Nil MPa P2 MPa/psi dual scale + Center of F.R.L. body D A d Mounting position Nil Right R Left Model 1 Port size A B C D E Applicable model IS10E-20l01-A 1/8 29.8 66.3 55.3 28 16 AC20l-B IS10E-20l02-A 1/4 IS10E-20l03-A 3/8 IS10E-30l02-A 1/4 31.8 72.8 58.8 30 13 AC25l-B, AC30l-B IS10E-30l03-A 3/8 IS10E-30l04-A 1/2 IS10E-40l02-A 1/4 1 Set pressure range

CC

Data (A) Volume of Cylinder/Capacity of Converter 160 140 180 125 300 250 800 700 600 200 Selection Step 100 10,000 8,000 6,000 5,000 4,000 500 400 Step (1) Select the bore size of air-hydro cylinder 80 300 First of all, select a bore size from data (D) .

HRX-OM-W002

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-8 Connection of RS-232C 3.3 Installation HRR Series 3-18 HRX-OM-W002 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

Electric Actuator Triple Axis P&P Unit

Unit Configuration Examples XYZ axes YZ axes Xaxis Yaxis Zaxis 1 Triple Axis P&P Unit How to Order Combination LG 240Z A0 50 20 X L E G J ZB D C Y Axis type X X axis Stroke(mm) 100 10 Ball screw specifications Axis type Z axis Rolled ball screw(mm) 15, lead 20 900 1000 1100 1200 1300 1400 1500 Symbol C 90 A0 B0 C0 D0 E0 F0 Motor specifications Motor specifications Mitsubisi Electric Corporation

ø 40, ø 50, ø 63, ø 80, ø 100 Series CLA2 Fine Lock Cylinder Double Acting, Single Rod

/M9lV D-M9lW/M9lWV D-M9lA/M9lAV D-A9l/A9lV D-B5l/B64 D-B59W D-Z7l/Z80 D-Y59l/Y69l/Y7P/Y7PV D-Y7lW/Y7lWV D-Y7BA Hs Auto switch Auto switch Hs Ht Ht 24.5 A B 15 A 33 B D-A3l D-G39/K39 D-A5l/A6l D-A59W G1/2 (Applicable cable O.D.: 6.8 to 9.6) Hs Auto switch Hs Ht Ht 49 56 34 S M C AUTO SWITCH S M C AUTO SWITCH A 33 B A 36 B D-A3lC D-G39C/K39C Auto switch G1/2 (Applicable cable O.D.:

OMU0023

How to order L E C C G 1 L Cable length(L) K 0.3m L 0.5m 1 1m ii. Dimensions 70 - (3) Cable between branches (between the branch connectors) i. How to order L E C C G 2 L Cable length(L) K 0.3m L 0.5m 1 1m ii. Dimensions (4) Branch connector i. How to order L E C C G D Branch connector ii. Dimensions (5) Terminating resistor i. How to order L E C C G R ii. Dimensions 71 - 8.

CE

bore size (mm) D C d H B C D Part no.

CE

Bore size (mm) Stroke (mm) Bore size (mm) Manufacturable stroke range Applicable auto switch Note D25 50 100 75 125 150 175 200 250 300 400 500 12 25 to 150 D-A7/A80 D-A7H/A80H D-A73C/A80C D-A79W D-F7V D-F7/J79 D-J79C D-F7WV D-F7W/J79W D-F7BAL/F7BAVL D-F79F/F7NTL Switch mounting screw (M3 x 0.5 x 8l ) Square nut 12 20 -X BQ-1 20 25 to 300 32 2025 to 400 40 25 to 600 32 40 50 63 Switch

End Lock Cylinder Series CBM2/ø20, ø25, ø32, ø40 Series CBA1/ø40, ø50, ø63, ø80, ø100 CL MLGC CNA CB CV/MVG Maintains the cylinder’s CXW original position even if the CXS air supply is interrupted. CXT MX

D-B5/B6, D-B59W, D-A3/A44 Band mounting Reed switch Tie rod mounting D-A5/A6, D-A59W, D-A3C/A44C D-G5/K59, D-G5NTL, D-G5W/K59W D-G5BAL, D-G59F, D-G39/K39 D-F5/J5, D-F5NTL, D-F5W/J59W D-F5BAL, D-F59F, D-G39C/K39C D-H7, D-H7W, D-H7F, D-H7BAL, D-H7C, D-G5NTL, D-G39A/K39A Band mounting Solid state switch Tie rod mounting 3.4-1 Series CB Prior to Use Precautions Be sure to read before handling

VQ7-6/7-8

0 t r i w y e q o Replacement Parts (For valve) Description VQ7-8-FG-SVQ7-8-FG-DVQ7-8-FPG-DVQ7-8-FG-S-R VQ7-8-FG-D-R VQ7-8--D-R VQ7-8--DNumber q w e r t y u i o !

5 Port Solenoid Valve SY Series

rate: 50% Stroke 500 mm Series CM2 Pressure 0.5 MPa Load rate: 50% Stroke 300 mm Average speed (mm/s) Series 800 700 600 500 400 300 200 100 0 Perpendicular, upward actuation SY3140-01 Horizontal actuation 800 700 600 500 400 300 200 100 0 SY5140-02 800 700 600 500 400 300 200 100 0 SY7140-03 800 700 600 500 400 300 200 100 0 SY9140-04 Cylinder is in extending.

Title not found

Connector C (14.2) Cable length (L) 1 3 5 8 A B C (16.6) (23.7) (6.5) Connector A (12.7) (5.6) 1 3 2 4 1.5 m 3 m 5 m 8 m 3 2 1 (13.5) 1 4 A 1 2 (18) B 10 m (6.5) (14.7) 15 m 15 16 (30.7) (11) L Connector B 20 m (10) Connector D Produced upon receipt of order Connector C terminal no. 1 2 3 Connector A terminal no. 1 2 3 Circuit Cable color U V W Red White Black Connector D terminal no. 12

Stroke Reading Cylinder and Counter

Rod End Nut Dimensions Material 12, 20: Steel 32 to 63: Rolled steel (1 pc. is attached as standard.) 30 d (mm) Applicable bore size (mm) D C H d B C D Part no.

VM

E C Padlock mounting position C D D Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com SUP SUP . A OUT IN A OUT IN 1 2 B 3 B EXH. EXH.

HRL

40 HRS090 Standard type 0.5 5 to 35 Indoor use (400 V as standard) Outdoor installation IPX4 (400 V as standard) HRS100/150 Standard type 1.0 5 to 35 HRSH090 Inverter type 0.1 5 to 40 Indoor use (400 V as standard, 200 V as an option) (Only 200 V as an option) Outdoor installation IPX4 HRSH Inverter type 0.1 5 to 35 (400 V as standard, 200 V as an option) (Only 200 V as an option)

100

0 Unit o Output N NPN open collector 1 output P PNP open collector 1 output A NPN open collector 2 outputs B PNP open collector 2 outputs C NPN open collector 1 output + Analog voltage output D NPN open collector 1 output + Analog current output E PNP open collector 1 output + Analog voltage output F PNP open collector 1 output + Analog current output Nil With unit switching function M SI

AC Servo Motor Driver (CC-Link Type)

A B C A B C A B C Lead 12 6 3 12 6 3 20 10 5 16 8 4 Point table No.1 Initial value Recommended value Home position return acceleration time constant (msec) *5 0 600 300 150 600 300 150 1000 500 250 800 400 200 Different from the initial value. *5.

Electric Actuator / Slider Type 《 AC Servo Motor 》

Check the product for the following points before operation. a) Damage to power supply line and signal line. b) Looseness of the connector to each power line and signal line. c) Looseness of the actuator /cylinder and driver /driver mounting. d) Abnormal operation. e) Emergency stop of the total system. 3.

Electric Slide Table / High Precision Type 《 AC servo motor 》

385 Max. speed[mm/s] 400 200 400 200 400 200 Pushing speed [mm/s] *2 35 or less 30 or less Actuator specifications Max. acceleration/deceleration[mm/s2] 5000 Positioning repeatability [mm] 0.01 Lost motion [mm] *3 0.1 or less Lead [mm] (including pulley ratio) 12 6 20 10 16 8 Impact/Vibration resistance [m/s2] *4 50/20 Ball screw Ball screw(In-line) Actuation type Belt[1.25:1] Ball screw

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C