High Vacuum Angle Valve

Example) XLA-25H0-2M9NJLA-XAN1A 18 XLm Series Dimensions XLA/F (With D-M9mJm) C E E C E Fn D Heat-resistant auto switch H B A Heater G A [mm] Series Valve size A B C D E Fn G H 25 50 121 48 27 12 40 26 44 40 65 171 66 39 11 55 41 67 50 70 185 79 46 11 75 52 72 XLA XLF XLC/G25, 40 (With D-M9mJm) XLC/G50 (With D-M9mJm) C E C E E C E E C E Fn B A Fn D D Heat-resistant auto switch H J K H B A

CG5-S

Applicable bore size (mm) D B1 C d H1 (mm) Part no.

HRX-OM-X071

Configuration One thermo-chiller for one master. 2 2 R D R D 3 3 S D S D 5 5 S G S G Master This product Do not connect any wire to other PIN numbers. Fig. 3-12 Connection of RS-232C 3.3 Installation HRR Series 3-20 HRX-OM-X071 Chapter 3 Transport and Setting Up 3.4 Piping Piping port size Connect piping firmly.

CJ5-S

Applicable bore size (mm) D B1 C d H1 Part no.

CJ5-S

Applicable bore size (mm) D B1 C d H1 Part no.

Air Cylinder NCA1 Series

(5 Bore) D-A53 24VDC 5~20MA YES D-F59 28VDC OR LESS 150MA 3 WIRE (NPN) 600 (6 Bore) 24VDC 5~20MA D-F5P 100MA 3 WIRE (PNP) BT-18A 800 (8 Bore) D-A54 100VAC 5~25MA YES D-J59 24VDC 5~150MA 2 WIRE BT-20 1000 (10 Bore) 200VAC 5~12.5MA (10~28VDC) 1200 (12 Bore) D-A56 4~8VDC 20MA YES D-F59W 28VDC 80MA 3 WIRE (NPN) D-A59W 24VDC 5~40MA YES D-F59PW 80MA 3 WIRE (PNP) 24VAC/DC 50MA D-J59W 24VDC 5~40MA

F

N N North America A R E A C O D E Nil T Tamper-Resistant D Tamper-Resistant Flat Head Screw Driver Adjustment Type B O D Y S I Z E 1 M3, M5 2 18, 14 3 38 4 12 A B C D E F G Port Size Model O P T I O N D I R E C T C O N N E C T I O N T Y P E 9 28.3 25.5 10.3 9 10 8 M5x0.8 (N)AS1200-M5 Nil S Sealant 14.6 36.4 31.4 14.1 14.3 18 12 1/8 (N)AS2200-01 P O R T T H R E A D 19.5 40.8 35.8 18 18

Guide Cylinder Series MGG

M N C D 4-O T Q 2-P E B S K L U W AA A I AP R X AB Y + Stroke J V Z + Stroke AC AD 8-AF AE For standard stroke (mm) Bore size (mm) Stroke range (mm) AC E D AF G AE AD AB AA N M F L K B J AP C H I A 20 25 32 40 50 75, 100, 125, 150, 200 M5 x 0.8 depth 10 16.5 92 60 9.5 depth 6 30 75 11 12 45 25 5.5 80 60 55 108 M8 x 1.25 depth 14 25 24 30 99 M6 x 1 depth 12 16.5 113 65 11 depth 8 30 85 13

JXCx-OMT0001CN

0.4 0.6[Nm]) 0.4 0.6[Nm] -31No.JXC-OMT0001CN-C A B M5X14 (2) () M3 -32No.JXC-OMT0001CN-C (1)D (100) (2)2mm 2 D (3) 40 50mm ()100mm 100 -33No.JXC-OMT0001CN-C 5.

Heavy Duty Stopper Cylinder

(Lock type) Used for -D (Lock type) Used for -D (Lock type) Used for -D (Lock type) Used for -D (Lock type) Used for -C (Cancel cap type) Used for -C (Cancel cap type) Metallic painted Hard anodized Hard anodized Chromated Hard chrome plated Hexagon socket head cap screw Flat washer Cancel cap O-ring Piston seal Rod seal Tube gasket O-ring Chrome molybdenum steel Carbon steel Aluminum alloy

Digital Flow Switch

0 L/min C*2 D Voltage output (0 to 10 V)*1*3 0 V 0.1 V 10 V Model Minimum value of rated flow range*4 Maximum value of rated flow range PF3A703H 30 L/min 3000 L/min PF3A706H 60 L/min 6000 L/min PF3A712H 120 L/min 12000 L/min A C 0 0 *1 Analog output accuracy is within 3% F.S. *2 A and C will change according to the setting of the zero cut function. *3 The analog output current from the

SFOD-OMT0009CN

(c)BUSY ONINP OFF No. () (d)INP ONBUSY OFF INP ON BUSY OFF (INP ONBUSY OFF) 2 ABS 75 No.SFOD-OMT0009CN-B (3) --(a)No.(INx) (b)DRIVE ON Min.15ms No.(OUTx ) No. No. (c)BUSY ONINP OFF (d)INP ON 2.5[s] ALARM ON( ) BUSY OFF INP ON BUSY OFF 1)(0-149) 2)(d) 2 ABS 76 No.SFOD-OMT0009CN-B (4) HOLD --(a)(BUSY ON)HOLD ON (b)BUSY OFF () No. (c)HOLD OFF No.

4 Way • 4 and 5 Port, Rubber Seal • Solenoid Pilot Valve, Series SYJ3000

4 Way 4 and 5 Port Rubber Seal Solenoid Pilot Valve Series SYJ3000 Interchangeable with the NVJ Series Low Power Consumption: 0.5W Base Mounted/Body Ported Configurations Manifolds with Built-in One-Touch Fittings P R O D U C T S Q Q Q Table of Contents Q Q Q Features & Benefits .4-5 Q Q Preferred Option Program .6 Q Specifications Q Valve .8 Manifold .9 Q Q How

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

How to Order B 20 30 D C CQSY Without auto switch F9BW S B 20 30 D C CDQSY With auto switch Number of auto switches Built-in magnet 2 pcs. 1 pc. n pcs.

CQSY/CQ2Y/CM2Y/CG1Y/CA2Y

How to Order B 20 30 D C CQSY Without auto switch F9BW S B 20 30 D C CDQSY With auto switch Courtesy of Steven Engineering, Inc.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Number of auto switches Built-in magnet 2 pcs. 1 pc. n pcs.

Intrinsically Safe Valve

Electrical entry TT is approved for Class I, II, III, Division 1, Groups A, B, C, D, E, F, G. Electrical entry L and LL is approved for Class I, Division 1, Groups A, B, C, D. 4.

CG5-S

C type 22 for shaft 13 Accessary Dimensions Series CG5-S Accessory Dimensions Rod end nut Clevis pin Material: SUS440 (pin) SUS304 (snap ring) Material: SUS304 30 d d Dd9 D C t m t l m L H1 B1 Metric (mm) (mm) Part no.

5 Port Solenoid Valve/Body Ported, Cassette Type Manifold, Series SY3000/5000/7000

They can be ordered in lots of 10 pieces. d D Series SY3000 SY5000 SY7000 Part No.

Dual Rod Cylinder: Basic Type Series CXS ø6, ø10, ø15, ø20, ø25, ø32 1

B A C Operating Range D B D-Z7/Z8, D-Y7W D-Y5, D-Y7 D-Y6, D-Y7V D-Y7WV D-Y7BAL Bore size (mm) A C 11.5 (10) 18.5 (17) 26.5 (25) 34 (32.5) 34 (32.5) 44 (42.5) D 0.5 (1) 3.5 (2) 0.5 (1) 3 (1.5) 5 (3.5) 5 (3.5) C 13 20 28 36 36 46 D C 5.5 12.5 20.5 28 28 38 Auto switch model Bore size (mm) 6 10 15 20 25 32 9 7 9 9 9 11 6 10 15 20 25 32 5.5 2.5 5.5 3 1 1 2 5 2 4.5 6.5 6.5 4.5 7.5 4.5 7 9 9 15.5

Compact Type

A C D-F9 D-F9W D-M9 D-A93 D-A90 D-A96 D-F9V D-F9WV Bore size (mm) CXSJ15 to 32 B D A 15.5 25.5 31.5 39 40 49 D 9.5 7 0 3 5 5.5 C 9.5 19.5 25.5 33 34 43 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 D 7.5 5 2 5 7 7.5 A 15.5 25.5 31.5 39 40 49 A 19.5 29.5 35.5 43 44 53 C 11.5 21.5 27.5 35 36 45 D 5.5 3 4 7 9 9.5 D 8 5.5 1.5 4.5 6.5 7 B 6 9 11 11.5 B 0.5 3 10 13 15 15.5 C 13.5 23.5 29.5 37 38