Table of Contents

D J K Y A J K B Y C D Misc.

Table of Contents

DZ/Y/YZ VFS3320-D/DZ/Y/YZ VFS3420-D/DZ/Y/YZ VFS3520-D/DZ/Y/YZ Lead wire O.D.

ISO Cylinder

Auto switch mounting Auto switch model C85 Series C75 Series Bore size [mm] 8 10 12 16 20 25 32 40 D-M9l(V) D-M9lW(V) D-A9l(V)*7 BJ6-008 (A set of a, b, c, d) BJ6-010 (A set of a, b, c, d) BJ6-012 (A set of a, b, c, d) BJ6-016 (A set of a, b, c, d) BM5-020 (A set of a, b, c, d) BM5-025 (A set of a, b, c, d) BM5-032 (A set of a, b, c, d) BM5-040 (A set of a, b, c, d) D-M9lA(V) BJ6-008S (A

Aluminum High Vacuum Angle Valve

0 Body Valve side exhaust Refer to the back of page 465 for Maintenance Parts. 457 XLS Series Dimensions XLS/Without control power supply D E D F L J K 2 J K L 270 10 290 10 M J K J 33 25 C B 39 G G1/2 G1/2 C B B C A B C 6 to 9 G1/2 A DIN terminal (D) Terminal (T) Conduit (C) Grommet (G) XLS/With control power supply 41 26 J K 530 10 72 OPERATION V INPUT C B L (mm) Grommet (G) A B C

Direct Operated Pilot Operated 2-Port Solenoid Valve Refer to pages 7, 9, 11, 25, 35, and 39 for details.

Body Material Aluminum Body Material Brass A A 2 x J 4 x J A A 2 x J 4 x J B C F B B C F B 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 1/8, 1/4, 3/8 C F C D E D E F D E D E Body Material: Aluminum [mm] Body Material: Brass [mm] Size Port size A B C D E F J 20 1/8, 1/4 11 36 6 34 46 1.5 5.3 30 1/4, 3/8 13 46 7 40 56 1.5 Size Port size A B C D E F J 20 1/8 52 24 9 36 64 1.5 6 20, 30 1/4, 3/8

3 Port Direct Operated Poppet Solenoid Valve Series VKF300 1

Flow Characteristics/Weight C [dm 3/(sbar)] b Cv C [dm 3/(sbar)] b Cv 1 2 (P A) 2 3 (A R) Valve model Flow characteristics Weight (g) Operating pressure range (MPa) Port size Grommet DIN terminal 0.10 0.13 0.13 0.10 0.13 0.13 0.13 0.13 0.13 0.13 0.41 0.32 0.32 0.41 0.32 0.59 0.32 0.32 0.59 0.32 2 3 2 3 2 3 VKF33 VKF33 Y VKF33 E VKF33 V VKF33 W VKF334 VKF334Y VKF334E VKF334V VKF334W 0.67

Table of Contents

(mm) Fitting size D 3.2 4 Weight g A B C E F Model M-32R-2 M-04R-2 36 36.5 31 .5 32 0.9 0.7 0.8 2 x 1 .2 20.5 4 Component Parts Note Electroless nickel plated Electroless nickel plated Material Brass Brass PP No. 1 2 3 Description Sleeve Studded body Stem Applicable fitting size D Applicable tubing 3 2 1 C F D E B A 15-6-29 6 Miniature Tubing and Miniature Fittings Specific Product Precautions

MHZ

Auto switch mounting groove 4 (For D-F, D-M9(V)) 3.7 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible. 12-2-38 38 Standard Type/Series MHZ2 Finger Option Through-holes in Opening/ Closing Direction [2/N2] Side Tapped Mounting [1/N1] 4-MM (Thread for mounting attachment) C C MHZ MHF MHL B A MHR 4-H (Hole for mounting attachment) MHK S S MHS O

MHZ

Auto switch mounting groove 4 (For D-F, D-M9(V)) 3.7 Note) When using D-Y59, D-Y69 and D-Y7 type auto switches, through-hole mounting is not possible. 12-2-38 38 Standard Type/Series MHZ2 Finger Option Through-holes in Opening/ Closing Direction [2/N2] Side Tapped Mounting [1/N1] 4-MM (Thread for mounting attachment) C C MHZ MHF MHL B A MHR 4-H (Hole for mounting attachment) MHK S S Courtesy

Cylinder with Lock

Auto Switch Mounting Height [mm] Auto switch model D-F5m D-J59 D-F59F D-F5mW D-J59W D-F5BA D-F5NT D-Y59m D-Y7P D-Y7mW D-Y7BA D-Z7m D-Z80 D-M9m D-M9mW D-M9mA D-A9m D-A9mV D-M9mV D-M9mWV D-M9mAV D-A5m D-A6m D-A59W D-Y69m D-Y7PV D-Y7mWV D-P3DWA D-P4DW D-G39 D-K39 D-A3m D-A44 Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht Hs Ht 32 24.5 23 27.5 23 30.5 23 32.5 25 35 24.5 67 27.5 77

Title not found

-"c" :^''^" *'."' -.t;^'."d;-:.df o,r's!.4 d.!

New

A 2 x P Port size 2 P Port size A B1 B1 B B Vacuum For Oil Construction Dimensions Construction Dimensions DIN terminal Conduit terminal F Q Cable 6 to 12 D D S G1/2 Qp2 F 34 (44) 31.5 25 T C C R R E G1/2 E 2 x P Port size A 2 x P Port size A B1 Sp2 B B1 B Conduit Faston type D G1/2 Q F D Q F 11 z 280 VX2 23 R C C R E E 2 x P Port size A 2 x P Port size B1 A B1 B B Terminal part (mm) Faston

Title not found

Connector C (14.2) Cable length (L) 1 3 5 8 A B C (16.6) (23.7) (6.5) Connector A (12.7) (5.6) 1 3 2 4 1.5 m 3 m 5 m 8 m 3 2 1 (13.5) 1 4 A 1 2 (18) B 10 m (6.5) (14.7) 15 m 15 16 (30.7) (11) L Connector B 20 m (10) Connector D Produced upon receipt of order Connector C terminal no. 1 2 3 Connector A terminal no. 1 2 3 Circuit Cable color U V W Red White Black Connector D terminal no. 12

MY2

C D A B (mm) D-A9, D-A9V (mm) D-F9, D-F9V (mm) D-F9W, D-F9WV A B A B A B Bore size 16 25 32 Operating range Bore size 16 25 40 Operating range Bore size 16 25 40 Operating range 54 106 58 102 57 103 54 156 58 152 57 153 11 8.5 8.5 85 245 89 241 88 242 (mm) (mm) (mm) C D C D C D Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range Bore size 16 25 32 Operating range 27 133

Power Clamp Cylinder

90 CKZT80-A015B 30 to 90 80 CKZ80-42 3680N-R A B C 30 to 105 CKZ80-42 3680N-R D E F 30 to 105 For mounting bolt, a hexagon socket head cap screw and a spring washer No. 2 are recommended.

3-Position Rotary Table

(Make sure that there is no rotation backlash in the table.) 3 Tighten both adjustment bolts c and d to approx. 45. Note 1) Tighten both adjustment bolts c and d to approx. 45. Note 1) 4 Lock adjustment bolts c and d with fixing nuts. Note 2) Lock adjustment bolts c and d with fixing nuts.

KJ

L1 L2 M D I.D.

2/3 Port Valve

VN VQ Applicable flange 65 80 Model H F E D C B A 1 4 1 4 405.5 441.5 65 80 140 150 204 235 175 185 305.5 341.5 210 240 VNC81 -65F VNC91 -80F 4.2-25 VNC Construction N.C.

VZS

from D side as the 1st one.

Cylinder with Lock Series MNB

Dd9 2d D C L l m H B Bore size (mm) Clevis Knuckle Part No. d Bore size (mm) Part No.