VQZ1000/2000/3000

1 R2 3 < >: AC Formula L1 = 19n + 11, L2 = 19n + 23 n: Stations (Maximum 20 stations) Dimensions L n 2 49 61 87.5 98 3 68 80 100 110.5 4 87 99 125 135.5 5 106 118 137.5 148 6 125 137 162.5 173 7 144 156 187.5 198 8 163 175 200 210.5 9 182 194 225 235.5 10 201 213 237.5 248 11 220 232 262.5 273 12 239 251 275 285.5 13 258 270 300 310.5 14 277 289 312.5 323 15 296 308 337.5 348 16 315 327 350

Series SYJ500 Rubber seal 3 Port Pilot Solenoid Valve

Station n L1 L2 L3 Station 2 62 53 47 Station 20 350 341 335 3 78 69 63 4 94 85 79 5 110 101 95 6 126 117 111 7 142 133 127 8 158 149 143 9 174 165 159 10 190 181 175 11 206 197 191 12 222 213 207 13 238 229 223 14 254 245 239 15 270 261 255 16 286 277 271 17 302 293 287 18 318 309 303 19 334 325 319 28 Series SYJ500 Type 40R Manifold: Bottom Ported (External Pilot Type)/SS3YJ5-40RStations

Stainless Steel Heat Exchanger Type Air Dryer Series IDUS/IDFS

on condition r C = 0.90 based on condition r 2 2 Based on condition t, A and C Corrected air flow = 350 (0.75 x 1.00) = 467 l/min (ANR) 3 Based on condition t, B and C Corrected air flow = 1200 (0.95 x 0.90) = 1400 l/min (ANR) 3 Based on condition y; IDUS4E is selected as the model to process an air flow larger than 467 l/min (ANR) with a 50Hz power supply, according to data D-1.

Refrigerated Air Dryer Series IDF/IDU

(Except for 1E to 3E) (Except for 1E to 3E) Refrigerant Coefficient of ozone depletion-Zero Model Air flow capacity Outlet air pressure dew point Rated inlet condition l/min(ANR) 50Hz 60Hz 100 200 310 500 740 1200 1650 310 500 740 110 220 350 570 810 1300 1820 350 570 810 IDF1E IDF2E IDF3E IDF4E IDF6E IDF8E IDF11E IDU3E IDU4E IDU6E Inlet air of normal temperature 35C Saturation 0.7MPa 10C

Series LC7R Dedicated Regenerative Absorption Unit

Applicable Controller Power Supply Voltage 100VAC Specification Series LJ1H10 Series LJ1H20 LJ1H1021H-K (8mm lead) LJ1H2021F-K (5mm lead) 250 400 225 350 12kg 6kg 200 300 175 250 Speed (mm/s) Speed (mm/s) 150 8kg 13kg 125 200 10kg 100 150 14kg 75 100 15kg 50 50 25 0 100 200 Stroke (mm) 300 400 0 100 200 300 400 500 600 Stroke (mm) When an actuator is operated under conditions that exceed

Electric Actuator with Integrated Guide Series LTF

to 290 to 240 46 LTF8FNH 14 to 500 to 440 to 350 to 290 to 240 52 LTF6EPH-K 20 to 500 to 390 56 24 LTF6ENH-K to 500 to 390 60 28 LTF8FPL-K to 1000 to 890 to 710 to 580 to 480 64 32 LTF8FNL-K to 890 to 710 to 580 to 480 to 1000 71 50 18 LTF6EPF-K to 300 to 230 54 22 LTF6ENF-K to 300 to 230 58 26 LTF8FPH-K to 500 to 440 to 350 to 290 to 240 62 30 LTF8FNH-K to 500 to 440 to 350 to 290 to 240

3 Port Solenoid Valve, VQZ Series, Base Mounted and Body Ported

) 87 83 Pg.7 Indicator light Applicable cord O.D. 3.5 to 7 61 Cover diameter 1.5 Cross sectional area 0.23mm2 90.5 R 3 1 P 83 R 3 1 P M type plug connector (M) 92 (Lead wire length) 80 300 77 Cover diameter 1.5 Cross sectional area 0.23mm2 Indicator light 66 R 3 1 P Dimensions n: Stations (Max. 20 stations) Equation L1=16n+10 L2=16n+20 L n 2 42 52 75 85.5 18 298 308 337.5 348 19 314 324 350

Table of Contents

[mmHg] to [kPa]. 1 [mmHg] = 1.3332 x 101 1.3332 x 101 x 350 = 46.662 [kPa] Ex. 2) Convert the units of 80 [kPa] to [kgf/cm2]. 1 [kPa] = 1.0197 x 102 [kgf/cm2] 1.01972 x 102 x 80 = 0.81576 [kgf/cm2] 16-13-13 1 Safety Instructions These safety instructions are intended to prevent a hazardous situation and/or equipment damage.

Table of Contents

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com 0.1 0 VX211 VX22 VX23 VX2 4 VX2 5 VX2 60-02 VX2 602 50 100 150 200 250 300 350 3 100 200 300 400 500 600 4.5 200 400 600 800 1,000 1,200 3 2 3 2 3 2 3 2 03 04 6 500 1,000 1,250 8 500 700 900 10 500 700 900 10 700 1,000 Flow rate Q l/min (ANR) How to read

Series SYJ300/500/700 3 Port Solenoid Valve Rubber Seal

[ ] for AC Other dimensions are the same as the C4, C6. 3 68 59 70 61 66 57 6 116 107 121 112 114 105 8 148 139 155 146 146 137 10 180 171 189 180 178 169 2 52 43 53 44 50 41 20 340 331 359 350 338 329 4 84 75 87 78 82 73 5 100 91 104 95 98 89 7 132 123 138 129 130 121 9 164 155 172 163 162 153 11 196 187 206 197 194 185 12 212 203 223 214 210 201 13 228 219 240 231 226 217 14 244 235

2/3 Port Valve

490 220 350 490 350 490 3 0.33 6 Individual SUP 3.0 5.0 0.45 0.2 0.2 0.15 4.5 0.61 11 0.75 0.35 0.35 0.3 1.0 0.9 0.55 0.85 0.4 0.15 0.2 0.1 0.5 0.35 0.35 0.3 6 1.05 19 Note 1) It is a grommet value.

3 Port Air Operated Valve Series SYJA300

Station n L1 L2 L3 L1 L2 L3 Station 2 62 53 47 63 54 48 3 78 69 63 80 71 65 Station 20 350 341 335 369 360 354 4 94 85 79 97 88 82 5 110 101 95 114 105 99 6 126 117 111 131 122 116 7 142 133 127 148 139 133 8 158 149 143 165 156 150 9 174 165 159 182 173 167 10 190 181 175 199 190 184 11 206 197 191 216 207 201 12 222 213 207 233 224 218 13 238 229 223 250 241 235 14 254 245 239 267 258 252

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit. For a stroke in the standard stroke range, suffix the part number with -XB10.

Low Profile Guide Type

Standard Stroke Maximum manufacturable stroke (mm) Bore size (mm) Standard stroke (mm) 10 50, 100, 150, 200, 250, 300 500 15 50, 100, 150, 200, 250, 300, 350, 400, 450, 500 750 25 100, 150, 200, 250, 300, 350, 400, 450, 500, 550, 600 1200 The stroke is available in 1 mm increments with the maximum stroke as the upper limit.

High Vacuum Angle Valve

Heater assembly quantity 200/40 200/50 400/100 600/150 800/220 1200/350 100V H4 100C Heater assembly quantity used Heater power W (Nominal value) In-rush/Power consumption (Option symbolOperating voltage) 800/40 800/50 1600/100 2400/150 3200/220 4800/350 200V 1 pc. 1 pc. 1 pc. 1 pc. 2 pcs. 3 pcs. 4 pcs.

100

Specific Product Precautions 22 A ZL3/ZL6 Series Exhaust Characteristics (Representative value) ZL3H ZL3M 100 90 80 70 60 50 40 30 20 10 0 100 90 80 70 60 50 40 30 20 10 0 0.3 0.4 0.5 400 500 450 400 350 300 250 200 150 100 50 0 0.2 0.6 Vacuum pressure Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Suction flow rate [L/min(ANR)] Air consumption [L/min(ANR)] Vacuum pressure 350

IDUS/IDFS

condition r C = 0.90 based on condition r 2 2 Based on condition t, A and C Corrected air flow = 350 (0.75 x 1.00) = 467 l/min (ANR) 3 3 Based on condition t, B and C Corrected air flow = 1200 (0.95 x 0.90) = 1400 l/min (ANR) Based on condition y; IDUS4E is selected as the model to process an air flow larger than 467 l/min (ANR) with a 50Hz power supply, according to data D-1.

Special Specifications:

C With N.O. auto-drain D With drain guide (2) 150 250 350 450 550 650 850 With N.C. auto-drain J Note 1) 850 size comes with a ball valve. Note 2) Drain piping, or piping for a stop valve, like a ball valve, is required. 850 size comes with a ball valve. substitute with (Symbol: A).

MK

MK-F020 MK-F025 MK-F032 MK-F040 MK-F050 MK-F063 Bore size (mm) 20 25 32 40 50 63 Accessory With boss in head side 2 3 5 7 13 25 With arm 100 100 200 200 350 350 13 32 Centering location ring Set pin Bolt for cylinder body Rear flange type (including mounting bolt) 133 153 166 198 345 531 Calculation: (Example) MKG20-10RFN Standard calculation: MKB20-10R 250 g 6 g 133 g 2 g 100 g 491

Magnetically Coupled Rodless Cylinder Low Profile Guide Type Series CY1F ø10, ø15, ø25 1

.-230 Ryan Way, South San Francisco, CA 94080-6370-Main Office: (650) 588-9200-Outside Local Area: (800) 258-9200-www.stevenengineering.com Piping directions Maximum stroke Cushion Bore size (mm) Model Height Overall length mm mm 150 200 250 300 350 400 450 500 550 600 50 100 CX 10 15 25 15 10 25 240 350 310 For 100mm stroke cylinder Series Series 10 500 CY1F CY1H CY1F CY1H MY2H Concentrated