CXS Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.
Bore size/Stroke (mm) Bore size (mm) 6 10 15 20 25 32 Standard stroke 10, 20, 30, 40, 50 10, 20, 30, 40, 50, 75 10, 20, 30, 40, 50, 75, 100 Applicable Auto Switch/Refer to page 8-30-1 for further information on auto switches.
6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 1/8 83 126.5 32 Up to 450 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 128.5 40 Up to 800 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 147 50 Up to 1200 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 Up to 1200 35 32 27 90 38
6 18 12 40 6 33 M5 x 0.8 5.5 8 3.5 M10 x 1.25 29 1/8 83 126.5 32 Up to 450 22 19.5 17 50 20 12 38 6.6 6 18 12 40 6 38 M5 x 0.8 5.5 10 3.5 M10 x 1.25 35.5 1/8 85 128.5 40 Up to 800 30 27 19 60 26 16 46 6.6 6 19 13 50 8 47 M6 x 1.0 6 14 4 M14 x 1.5 44 1/8 93 147 50 Up to 1200 35 32 27 75 32 20 58 9 9 21 14 58 11 58 M8 x 1.25 7 18 5.5 M18 x 1.5 55 1/4 109 172.5 63 Up to 1200 35 32 27 90 38
Environment Clean Room Specification ISO Class 4*1 (ISO14644-1) Built-in vacuum piping Possible to mount the main body without removing the external cover etc. Body-integrated linear guide specification *1 Changes depending on the suction flow rate.
8 NPT 1/8 Rc 1/8 NPT 1/8 58 75 129 84 26 154 68 27.5 8 56 71 6.5 62 58 75 138 84 32 165 77 27.5 8 56 71 6.5 71 17-5-11 9 Series LVC Dimensions With flow rate adjustment With by-pass (Max.
16.5 25.5 90 87 115 10 11 M6 x 1.0 M14 x 1.5 Rc 1/8 7 40 70 100 42 73 16.5 25.5 0.5 1 90 97 115 12 11.5 M8 x 1.25 M20 x 1.5 Rc 1/8 8.7 40 75 122 50 91 18.5 28.5 0.5 1 110 119 138 12 10.5 M8 x 1.25 M20 x 1.5 Rc 1/4 8.7 65 105 145 64 99 20.5 35.5 1 1 120 142 155 PA dimensions are for split from center.
38.5 42.5 42.5 V 30 31 35.5 37 U 2.3 2.3 2.3 2.3 T 55 53 70 70 S 15.4 8 10.5 10.5 Q 5.4 6.5 8.5 8.5 P 44 46 54 56 N 34 40 54 54 M 30 41 50 50 K 5 3.5 1.5 1.2 J 27 30.5 38.5 38.5 H 63 66 76 76 E 40 57 73 73 D 52 59 75 75 C 73 86 92 93 B 160 201 239 242 A 40 53 70 75 G 40 55 80 80 AW20K AW30K AW40K AW40K-06 1/8, 1/4 1/4, 3/8 1/4, 3/8, 1/2 3/4 Optional specification With barb fitting With drain
560 935 1290 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 750 20 175 73 445 318.5 240 560 1195 1550 100 150 40 (1 1/2B) 50 (2B) 65 (2 1/2B) 40 (1 1/2B) 25 (1B) 620 9 1000 20 200 92 445 318.5 240 560 1460 1815 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40 (1 1/2B) 720 18 500 24 260 103 560 400 270 710 1045 1445 100 150 65 (2 1/2B) 80 (3B) 100 (4B) 40 (1 1/2B) 40
MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking GC ID IE IF IG IH J JA 139.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 56.5 22 25 61 91.5 15.5 14.5 18 202 240 M12 51.5 110 137 18.5 23 7.5 11 30 50 5.5 5.5 Rc 1/8 Rc 1/4 43 7 15 54.2 45.5 38 45 19 23 25 30 80 100 167.5 50, 75, 100, 125,
MLGPM, MLGPL common dimensions (mm) IC Standard stroke (mm) Bore size (mm) B C DA FA FB G GA GB H HA IA IB Extension locking Retraction locking GC ID IE IF IG IH J JA 139.5 25, 50, 75, 100, 125, 150, 175, 200, 250, 300, 350 56.5 22 25 61 91.5 15.5 14.5 18 202 240 M12 51.5 110 137 18.5 23 7.5 11 30 50 5.5 5.5 Rc 1/8 Rc 1/4 43 7 15 54.2 45.5 38 45 19 23 25 30 80 100 167.5 50, 75, 100, 125,
. 0 = 2 0 . . , . . o l:.1:/ 0 a 0 2 0 4 0 . 6 0 8 1 . 0 1 2 1 . 4 1 6 1 . 4 2 . 0 1 . 0 1 . 5 2 0 2 5 3 . 0 0 0 5 TOTAL ENERGY (i IbS/C) (Tho!
19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 20, 25, 32 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 S ZZ Z MM N NA NN P H1 H2 I K KA Bore (mm) 20 M20 x 1.5 1/8 146 200 191 M8 x 1.25 20 30 5 8 33.5 5 6 25 M26 x 1.5 1/8 146 204 195 M10 x 1.25 20 34.5 6 8 37.5 5.5 8 32 M26 x 1.5 1/8 159 217 208 M10 x 1.25 22 42.5 6 8 46.5 5.5 10 40 M32 x
19.5 40 32 13 10 17 10.5 10 45 4 60 75 26 20, 25, 32 32 22 19.5 40 32 13 12 17 10.5 11 45 4 60 75 26 40 24 21 52 41 16 14 22 13.5 12.5 50 5 66 36 82 32 S ZZ Z MM N NA NN P H1 H2 I K KA Bore (mm) 20 M20 x 1.5 1/8 146 200 191 M8 x 1.25 20 30 5 8 33.5 5 6 25 M26 x 1.5 1/8 146 204 195 M10 x 1.25 20 34.5 6 8 37.5 5.5 8 32 M26 x 1.5 1/8 159 217 208 M10 x 1.25 22 42.5 6 8 46.5 5.5 10 40 M32 x
8 16.5 6 11.5 25 9.5 depth 5.4 53 45 8 14 12 M10 x 1.5 12 6 36 5.5 49 1/8 17 8 12 32 11 depth 6.5 66 56 10 18 14 M12 x 1.75 15 7 47 6.6 63 1/4 19.5 10 19.5 40 14 depth 8.6 75 65 10 22.4 19 M16 x 2 20 7 52 9 71 1/4 21.5 10 21.5 50 17.5 depth 10.8 81 70 11 28 24 M20 x 2.5 24 8 58 11 81 1/4 24 10 24 63 20 depth13 90 77 13 35.5 30 M27 x 3 33 9 69 13 100 1/4 27.5 10 27.5 80 23 depth 15.2 105 88
Mitsubishi Electric Corporation Yaskawa Electric Corporation G 1 N.C.
point) Port size Rc 1/2, 3/4 3/4, 1 1/2, 3/4, 1 Material Housing/Seal SUS304/NBR or FPM Element Note) Cotton, PP, SUS304, SUS316, etc.