Hydraulic

Stainless steel With switch only 9 Magnet plate 10 Scraper 11 Rod seal NBR 12 Piston seal 13 Tube gasket 14 Piston gasket 6 Series CHKDB Dimensions 2-Rc P F with effective thread depth G F with effective thread depth G Q Q R D R H E E 4-K through 8-L counter bore 4-K through C B + Stroke J J 8-L counter bore A + Stroke M M CHKDB20 & 25 CHKDB32 to 100 Width across flats f c a b g e h + Stroke

V100

r e w q r e w q VG VP S070 VQ VKF N.C.

smcmaintenancepartslist

2 r Pressure gauge r Outlet Pressure gauge e e Outlet y Fluid release Replacement Parts No. Description Part No.

•

/>B ' C . 0 E . F.

Aluminum High Vacuum Angle Valve

Indicator: Dimensions (b) E C D E C XLA F A (a) XL XL XLQ E (c) XM XY H DXSA XVD B G XGT CYV A (mm) A B C D E Note 1) F G H Model XLH-16 XLH-25 XLH-40 XLH-50 40 100.5 38 1 30 17 35 50 114 48 1 12 40 26 41 65 162.5 66 2 11 55 41 57 70 179.5 79 2 11 75 52 70 Note 1) Dimension E applies when heater option is included.

e-Rodless Actuator

Refer to pages 5 and 6 for detailed selection procedures. 2 How to Select Series E-MY2 Moment / E-MY2C E-MY2C/M3 E-MY2C/M1 E-MY2C/M2 50 40 50 40 50 40 30 30 30 20 20 20 10 10 10 Moment (Nm) Moment (Nm) Moment (Nm) 5 5 5 E-MY2C25 E-MY2C25 4 4 4 3 3 3 E-MY2C25 2 2 2 E-MY2C16 E-MY2C16 E-MY2C16 1 1 1 0.5 0.5 0.5 100 200 300400500 1000 1500 100 200 300 400500 1000 1500 100 200 300 400500 1000

Table of Contents

C D E F Dimensions Part no.

LEC-OM02704CN

DEL (3) 03132ASCII 0 1 2 3 4 5 6 7 8 9 10 11 12 13 14 15 ASCII 0 1 2 3 4 5 6 7 8 9 A B C D E F 16 17 18 19 20 21 22 23 24 25 26 27 28 29 30 31 ASCII G H I J K L M N O P Q R S T U V 0"(1)1630H (4) a b c d e f ASCII a b c d e f * a1661H 14 6 14 14.3.3 1 [A] [a] [B] [b] [C] [c] [D] [d] [E] [e] [F] [f] 14.3.4 ETX(STXSOH)ASCII 162ASCII16 S T X E T X [0] [A] [1] [F] [5] [2] [5]

Vacuum Unit

Pressure sensor assembly: 3 m (With lead wire) Note Centralized wiring specification (Plug-in) Individual wiring specification: 300 mm (Connector assembly)4 Symbol C V None V Cannot be selected when e is N C1 V None None Cannot be selected when e is P or T L None V V Cannot be selected when e is N L1 None None V L2 None V None Cannot be selected when e is P or T L3 None None None 4 For the

C85

1 w e !3 !

ISO Cylinder

(Screw: Stainless steel) BJ6-010S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-012S (A set of a, b, c, e) (Screw: Stainless steel) BJ6-016S (A set of a, b, c, e) (Screw: Stainless steel) BM5-020S (A set of a, b, c, e) (Screw: Stainless steel) BM5-025S (A set of a, b, c, e) (Screw: Stainless steel) BM5-032S (A set of a, b, c, e) (Screw: Stainless steel) BM5-040S (A set of a, b, c, e

MG

0 r o @2 e !

Profi-E

t h l ow ri ppl e.

4 Port Direct Operated Poppet Solenoid Valve Series VQD1000 1

sides) e (b) Lever D side (a) Bolt (Both sides) Replacement Parts No.

Vacuum System Peripherals:

e Valve Model SX340 is for internal pilot.

Magnet: None, Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 40mm, Thread: Rc, Stroke: 450mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: D (Spring/Air Pressure Lock)

Magnet: None, Mounting: B (Basic Style), Style: Aluminum Tube, Bore Size: 40mm, Thread: Rc, Stroke: 450mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: P (Air Pressure Lock-up)

Magnet: None, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 40mm, Thread: Rc, Stroke: 450mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: Spring/Air Pressure Lock, Auto Switch: -, Lead Wire or Prewied Connector: -, Number: -

Magnet: None, Mounting: Basic Style, Style: Aluminum Tube, Bore Size: 40mm, Thread: Rc, Stroke: 450mm, Option: w/o Rod Boot, Cushion: Both Sides (Air-hydro has No Cushion), Lock Operation: Air Pressure Lock-up, Auto Switch: -, Lead Wire or Prewied Connector: -, Number: -

Refrigerated Air Dryer

(kg) Applicable dryer Port size NPT A B C D E D E Part no.