Table of Contents EZ VFS1320-E/EZ VFS1420-E/EZ VFS1520-E/EZ Lead wire O.D.
Stainless steel With switch only 9 Magnet plate 10 Scraper 11 Rod seal NBR 12 Piston seal 13 Tube gasket 14 Piston gasket 6 Series CHKDB Dimensions 2-Rc P F with effective thread depth G F with effective thread depth G Q Q R D R H E E 4-K through 8-L counter bore 4-K through C B + Stroke J J 8-L counter bore A + Stroke M M CHKDB20 & 25 CHKDB32 to 100 Width across flats f c a b g e h + Stroke
EZ VFS1320-E/EZ VFS1420-E/EZ VFS1520-E/EZ Lead wire O.D.
Pressure sensor assembly: 3 m (With lead wire) Note Centralized wiring specification (Plug-in) Individual wiring specification: 300 mm (Connector assembly)4 Symbol C V None V Cannot be selected when e is N C1 V None None Cannot be selected when e is P or T L None V V Cannot be selected when e is N L1 None None V L2 None V None Cannot be selected when e is P or T L3 None None None 4 For the
E2l6lcr ava alr e a!1. svrlclrs Nole)Nol r.tat n! avaiab e 20mm lo 6.lmm cn y i 6-,,cylinder stroke (mm) Nole) Sriqe act n!
With air cushion 4-FD E-0.05 0 FT F FX0.15 B (mm) Bore size 40 B 61 E 25 F 2 FX 46 FD 6.6 FT 8 50 63 76 92 30 32 2 2 58 70 9 11 9 9 Note) End boss is machined on the flange for E.
L1 L2+A5 L3 2 1 W V 2 E= ( ) 2 9.8 1000 Collision speed V=1.4 Va *) Corrected coeficient 1 10 420 E= ( ) =0.09 2 9.8 1000 V=1.4 x 300=420 Calculate kinetic energy E(J) of moment. Calculate allwable kinetic energy Ea(J). Check that kinetic energy of moment does not exceed allowable kinetic energy.
Single vane type Double vane type +4 0 9 0 a a r r n n e n n g g g o o e e n i i t t 1 2 a a a 8 7 r t t 0 -5 +4 0 o o 0 0 n R R +4 0 +4 0 o 0 i 0 0 t a 9 1 t o e e R g g n n a a r r n n o o i i t t a a Chamfer Chamfer t t o o Chamfer Chamfer Chamfer R R A port B port B port A port A port B port A port B port A port B port For size 40 actuators, a parallel key will be used instead of
Switch (when equipped with switch) Internal pilot manifold L: Dimensions n : Stations (n1 + n2) External pilot manifold L: Dimensions n : Stations (n1 + n2) L n 4 160.5 150 129 16 L n 4 173 162.5 139.5 17 2 135.5 125 108 14 3 148 137.5 118.5 15 5 173 162.5 139.5 17 6 185.5 175 150 18 7 185.5 175 160.5 12.5 8 198 187.5 171 13.5 9 210.5 200 181.5 14.5 10 223 212.5 192 15.5 2 148 137.5 118.5
D C B A Model Port size 4 3 F 345 419.2 K 57 49.6 J 14 14 H 95 120 G 32.5 0 1 1 , 87.5 125 4 3 ALD600-06 to 10 ALD900-12 to 20 , 1 4 3 175 250 135 209 460 613 175 250 2 1 1 1 4 1 2 , , ALDU600-06 to 10, ALDU900-12 to 20 D.P.
) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.
[Torque: 0.1 Nm or less] Push-turn locking lever type [Type E] While pressing, turn in the direction of the arrow. If it is not turned, it can be operated in the same way as the non-locking push type. Locked position PUSH LOCK Caution When locking the manual override on the push-turn locking types (D, E), be sure to push it down before turning.
Actuator driving system Inside of clean room w t e q r t q Cylinder relief port piping w Solenoid valve exhaust piping e Breathing piping of regulator r Drain piping t Exhaust Cleaner for Clean room/AMP series Cylinder relief port piping Series 10-/12-/21(atmospheric release type) Connect the relief port piping with the dedicated duct piping installed outside the clean room or with the exhaust
N.O. 3(R) (P)1 3(R) (P)1 e t q r e t q r (A) (A) 2 2 u u 3 (R) 1 (P) 3 (R) 1 (P) w w y y Component Parts Replacement Parts Note Zinc die-casted Part no.
) x PC F=-q x PA+r x PB+(w-e) x PC F=q x PA q, w and e are piston areas.
B AT IDF IDU IDF FS C IDFA IDFA F IDFB M IDH N ID L P IDG K 4 x 13 IDK Dimensions AMG (mm) A B C D E F G K L M N P Q Port size Model AFF IDFA22E IDFA37E R 1 775 600 290 623 134 405 698 93 13 25 85 340 R 11/2 855 680 AM AMD IDFA55E, IDFA75E AMH A R B AME AMF Q E ZFC D SF G SFD F LLB C AD GD M N L P K 4 x 13 Dimensions (mm) A B C D E F G K L M N P Q R Model Port size IDFA55E IDFA75E 800 (868